[Scan]
initial_time=2016-01-28T19:14:48
final_time=2016-01-28T19:15:08
ip_count=19
run=1026
dataset=5
scan=366
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.73923E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.02233E-10
ql2_vset=
ql2_vmon=-1.00136E-3
ql2_imon=1.43372E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.72461E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.62016E-8
mult1=-1.01498E-8
mult2=-2.78049E-9
rf_tmon=-4.61457E-3
rf_agc=3.26967E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.77378E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63117E0
bslens_imon=2.48062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2E1
lens5a_imon=1.98795E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.10019E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.01816E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=1.25519E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07879E0
lens1_imon=1.33465E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03764E1
cs_ea2_imon=1.41019E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=2.98991E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.16709E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11033E1
os_restr1_imon=4.30067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15104E1
os_ea1_imon=2.44744E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26434E0
cs_ionrep_imon=9.58047E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93295E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=2.04783E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.89579E-8
tplens_vset=1.4E-1
tplens_vmon=1.64755E0
tplens_imon=-3.69609E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.50569E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26494E1
iondef2_imon=1.58135E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98232E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.43143E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23128E0
ionrepsh_imon=9.36009E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33584E1
lens5b_imon=2.16535E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41922E0
os_ea2_imon=-4.83471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00358E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5778E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.37445E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.32095E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73321E1
iondef1_imon=1.07999E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.06467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.05319E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82928E-1
olens1_imon=7.29588E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-8.93203E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=1.56676E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.61176E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.86615E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.45382E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44951E0
defgridb_imon=5.93321E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.4066E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06735E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60865E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30888E1
cs_fil1_imon=9.25199E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31244E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61984E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.54167E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.9911E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43655E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22011E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.72507E-1
res40_imon=-2.59788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.43E2	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80016E1	-6.67572E-4	-8.80005E1	-7.15256E-5	5.126E-3	9.37223E-2	2.72703E1	-3.26885E1	-3.26272E1	2.6807E1	1.20174E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01609E-1
2.0E0	8.383E3	7.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80018E1	-8.10623E-4	-8.80004E1	-7.15256E-5	4.86374E-3	9.37223E-2	2.73131E1	-3.26536E1	-3.26242E1	2.67995E1	1.2026E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80019E1	-7.62939E-4	-8.80004E1	2.38419E-5	4.74453E-3	9.3627E-2	2.72862E1	-3.26655E1	-3.25375E1	2.68012E1	1.20208E-7	2.52179E-3	2.52179E-3	6.30171E-3	3.00251E-1
4.0E0	1.866E3	3.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80018E1	-7.39098E-4	-8.80001E1	4.76837E-5	4.64916E-3	9.38177E-2	2.73261E1	-3.26957E1	-3.26458E1	2.68002E1	1.19991E-7	2.51498E-3	2.51498E-3	6.30212E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80017E1	-8.58307E-4	-8.80003E1	1.66893E-4	4.43459E-3	9.38177E-2	2.72715E1	-3.26614E1	-3.26284E1	2.68041E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13143E-2	-8.80016E1	-8.58307E-4	-8.80003E1	2.14577E-4	4.48227E-3	9.39369E-2	2.72919E1	-3.26951E1	-3.25966E1	2.6792E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80015E1	-7.86781E-4	-8.80003E1	5.00679E-4	4.88758E-3	9.39131E-2	2.7311E1	-3.2708E1	-3.26207E1	2.67836E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80014E1	-9.77516E-4	-8.80003E1	3.09944E-4	4.72069E-3	9.37939E-2	2.73131E1	-3.26499E1	-3.25666E1	2.67625E1	1.2026E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.02769E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80016E1	-9.77516E-4	-8.80004E1	4.05312E-4	5.26905E-3	9.38416E-2	2.72769E1	-3.26645E1	-3.26152E1	2.68196E1	1.19809E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.01871E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80016E1	-1.14441E-3	-8.80005E1	4.52995E-4	4.69685E-3	9.36985E-2	2.73249E1	-3.2641E1	-3.2638E1	2.67986E1	1.19705E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
1.4E1	2.68E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80016E1	-1.00136E-3	-8.80002E1	3.09944E-4	5.22137E-3	9.35078E-2	2.73129E1	-3.26669E1	-3.2641E1	2.68112E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01085E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80018E1	-7.62939E-4	-8.80004E1	1.19209E-4	4.74453E-3	9.36031E-2	2.73004E1	-3.26573E1	-3.26585E1	2.6804E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80015E1	-6.67572E-4	-8.80004E1	2.86102E-4	4.69685E-3	9.37462E-2	2.73326E1	-3.26291E1	-3.26346E1	2.68064E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00041E-1
1.7E1	6.2E1	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80017E1	-7.15256E-4	-8.80006E1	3.57628E-4	5.29289E-3	9.377E-2	2.7278E1	-3.26402E1	-3.26331E1	2.67848E1	1.19965E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.02922E-1
1.8E1	1.97E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80019E1	-8.10623E-4	-8.80005E1	0.0E0	4.69685E-3	9.36985E-2	2.73039E1	-3.26809E1	-3.26337E1	2.6818E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
1.9E1	3.41E2	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80021E1	-1.00136E-3	-8.80003E1	-9.53674E-5	5.17368E-3	9.37223E-2	2.72829E1	-3.26615E1	-3.26266E1	2.67776E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9892E-1
2.0E1	2.141E3	4.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80019E1	-6.4373E-4	-8.80001E1	3.57628E-4	4.95911E-3	9.37223E-2	2.73381E1	-3.2685E1	-3.26402E1	2.67962E1	1.19749E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9841E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80016E1	-7.39098E-4	-8.8E1	2.38419E-4	4.88758E-3	9.39846E-2	2.72943E1	-3.26891E1	-3.25852E1	2.68268E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9874E-1
2.2E1	1.64E2	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80019E1	-7.62939E-4	-8.80006E1	7.15256E-5	4.76837E-3	9.35316E-2	2.72874E1	-3.26301E1	-3.26195E1	2.68111E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80016E1	-1.00136E-3	-8.80003E1	1.19209E-4	4.52995E-3	9.34839E-2	2.73321E1	-3.26494E1	-3.26392E1	2.68172E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01223E-1
