[Scan]
initial_time=2016-01-28T19:16:35
final_time=2016-01-28T19:16:54
ip_count=19
run=1026
dataset=5
scan=370
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.82083E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.66857E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.42342E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.64269E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.62498E-8
mult1=-1.07759E-8
mult2=-2.7745E-9
rf_tmon=-5.55185E-3
rf_agc=3.37361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=5.87296E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63178E0
bslens_imon=2.45858E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20074E1
lens5a_imon=1.99456E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05199E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=3.09659E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02275E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.25042E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07328E0
lens1_imon=1.47055E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6426E1
os_ef1alow_imon=2.96108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03813E1
cs_ea2_imon=1.42415E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.00216E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.16364E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.29671E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15073E1
os_ea1_imon=2.45001E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24904E0
cs_ionrep_imon=9.56211E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93372E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=2.03594E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.89211E-8
tplens_vset=1.4E-1
tplens_vmon=1.63776E0
tplens_imon=-2.04325E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.50569E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.5718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=8.74794E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25883E0
ionrepsh_imon=9.3858E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3367E1
lens5b_imon=2.18335E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41861E0
os_ea2_imon=-6.34062E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40962E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.37878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.30332E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.10694E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72895E1
iondef1_imon=1.11194E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.95357E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.23261E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.03736E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=2.01125E-1
window_imon=-1.13827E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-8.1752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.40975E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.34458E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=6.97266E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43726E0
defgridb_imon=6.12053E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.37903E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07047E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60592E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30917E1
cs_fil1_imon=9.25265E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35269E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61697E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.50225E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.99767E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.12537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21976E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=3.02545E-1
chamber_ion_pmon=1.20137E-7
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04942E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.39E2	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80015E1	-7.15256E-4	-8.80006E1	7.15256E-5	4.50611E-3	9.39608E-2	2.73116E1	-3.26579E1	-3.26573E1	2.67926E1	1.20122E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9952E-1
2.0E0	8.319E3	6.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80014E1	-6.91414E-4	-8.80005E1	1.90735E-4	4.57764E-3	9.39131E-2	2.73608E1	-3.26676E1	-3.26523E1	2.68094E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00197E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80014E1	-1.04904E-3	-8.80003E1	1.43051E-4	4.74453E-3	9.3627E-2	2.73219E1	-3.26506E1	-3.26445E1	2.68009E1	1.20244E-7	2.51581E-3	2.51581E-3	6.30182E-3	2.99348E-1
4.0E0	2.022E3	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80016E1	-1.04904E-3	-8.80002E1	7.15256E-5	4.98295E-3	9.39369E-2	2.73254E1	-3.26353E1	-3.2655E1	2.68088E1	1.20064E-7	2.51345E-3	2.51345E-3	6.32784E-3	3.01121E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80014E1	-1.21593E-3	-8.80003E1	4.52995E-4	4.86374E-3	9.39608E-2	2.73222E1	-3.26921E1	-3.26334E1	2.68052E1	1.1969E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.03129E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80014E1	-1.0252E-3	-8.80004E1	3.57628E-4	4.93526E-3	9.37462E-2	2.73099E1	-3.26729E1	-3.26248E1	2.68226E1	1.20137E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80016E1	-1.35899E-3	-8.80004E1	9.53674E-5	5.00679E-3	9.36031E-2	2.72624E1	-3.26422E1	-3.26554E1	2.68016E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80019E1	-1.12057E-3	-8.80004E1	-4.76837E-5	5.24521E-3	9.36031E-2	2.72823E1	-3.26663E1	-3.25773E1	2.67866E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.97704E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80018E1	-5.96046E-4	-8.80005E1	1.43051E-4	5.14984E-3	9.38416E-2	2.73039E1	-3.26693E1	-3.26543E1	2.67806E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.9978E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80017E1	-7.39098E-4	-8.80003E1	1.66893E-4	5.24521E-3	9.38654E-2	2.73105E1	-3.26837E1	-3.27113E1	2.68418E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
1.4E1	2.85E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80015E1	-9.53674E-4	-8.80003E1	1.43051E-4	5.126E-3	9.40323E-2	2.73315E1	-3.26711E1	-3.25605E1	2.67854E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80015E1	-7.62939E-4	-8.80003E1	2.38419E-4	5.22137E-3	9.36985E-2	2.73177E1	-3.26416E1	-3.26068E1	2.67968E1	1.19965E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.02133E-1
1.6E1	3.4E1	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80016E1	-8.82149E-4	-8.80003E1	1.19209E-4	5.24521E-3	9.37462E-2	2.72768E1	-3.26561E1	-3.26001E1	2.67992E1	1.20017E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01871E-1
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80018E1	-6.91414E-4	-8.80005E1	7.15256E-5	4.86374E-3	9.38892E-2	2.73201E1	-3.26494E1	-3.27077E1	2.68058E1	1.20209E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.00966E-1
1.8E1	2.16E2	2.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80016E1	-6.67572E-4	-8.80007E1	-9.53674E-5	4.98295E-3	9.39846E-2	2.72624E1	-3.2653E1	-3.25803E1	2.67955E1	1.19861E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
1.9E1	3.8E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80017E1	-6.4373E-4	-8.80003E1	7.15256E-5	4.79221E-3	9.377E-2	2.73225E1	-3.26164E1	-3.2644E1	2.68058E1	1.19653E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
2.0E1	2.043E3	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80013E1	-7.39098E-4	-8.80002E1	2.14577E-4	4.72069E-3	9.39369E-2	2.7355E1	-3.26567E1	-3.2608E1	2.6792E1	1.19913E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.00824E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80017E1	-1.00136E-3	-8.80006E1	2.86102E-4	4.64916E-3	9.36747E-2	2.73461E1	-3.27E1	-3.26801E1	2.67955E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9874E-1
2.2E1	1.47E2	1.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80016E1	-1.00136E-3	-8.80005E1	3.8147E-4	5.43594E-3	9.408E-2	2.73149E1	-3.26921E1	-3.25599E1	2.68004E1	1.20177E-7	2.51783E-3	2.51783E-3	6.3074E-3	3.01237E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80018E1	-7.15256E-4	-8.80001E1	2.14577E-4	5.00679E-3	9.3627E-2	2.72895E1	-3.26753E1	-3.26416E1	2.67956E1	1.20137E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.02545E-1
