[Scan]
initial_time=2016-01-28T19:17:02
final_time=2016-01-28T19:17:21
ip_count=19
run=1026
dataset=5
scan=371
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.7925E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.91445E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=1.45099E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.62064E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.62325E-8
mult1=-9.71631E-9
mult2=-2.62679E-9
rf_tmon=-5.19136E-3
rf_agc=3.28409E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=5.46467E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63377E0
bslens_imon=2.43354E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19748E1
lens5a_imon=2.00598E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04803E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.09442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05124E1
cs_ea1_imon=1.22023E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04186E0
lens1_imon=1.96633E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04109E1
cs_ea2_imon=1.39826E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.00973E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.16478E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.30175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14775E1
os_ea1_imon=2.45407E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28985E0
cs_ionrep_imon=9.68225E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91839E2
cs_nozzle_imon=1.93208E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.03414E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.8882E-8
tplens_vset=1.4E-1
tplens_vmon=1.70514E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26675E1
iondef3_imon=1.48781E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26194E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02881E2
lens6_imon=2.98148E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.67748E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=9.45218E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.16065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44205E0
os_ea2_imon=-5.8204E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00276E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85411E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.3622E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22982E2
cs_ionfoca_imon=6.32583E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.10333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68128E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.00919E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=7.26549E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-9.07619E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56057E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92596E3
multa_neg_imon=7.73557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.69852E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.13033E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53253E0
defgridb_imon=6.2207E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.403E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07672E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60696E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30935E1
cs_fil1_imon=9.25211E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30584E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61671E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.62314E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.04528E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22042E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99594E-1
chamber_ion_pmon=1.20192E-7
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.16955E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.71E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80017E1	-1.00136E-3	-8.80007E1	5.24521E-4	4.673E-3	9.36985E-2	2.7319E1	-3.26411E1	-3.26364E1	2.67966E1	1.20209E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01223E-1
2.0E0	8.645E3	9.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80017E1	-7.39098E-4	-8.80006E1	4.29153E-4	4.36306E-3	9.39846E-2	2.72604E1	-3.2656E1	-3.27136E1	2.68163E1	1.20042E-7	2.51709E-3	2.51709E-3	6.33919E-3	3.00097E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80017E1	-5.72205E-4	-8.80005E1	4.29153E-4	4.64916E-3	9.38892E-2	2.73104E1	-3.26596E1	-3.25582E1	2.68111E1	1.20031E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00144E-1
4.0E0	1.952E3	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80015E1	-4.76837E-4	-8.80002E1	2.6226E-4	4.64916E-3	9.38892E-2	2.73163E1	-3.26354E1	-3.26018E1	2.68012E1	1.20081E-7	2.52223E-3	2.52223E-3	6.29934E-3	3.00582E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80014E1	-7.15256E-4	-8.80002E1	9.53674E-5	4.64916E-3	9.39369E-2	2.72979E1	-3.2647E1	-3.26242E1	2.67986E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80018E1	-7.86781E-4	-8.80002E1	1.90735E-4	4.76837E-3	9.38416E-2	2.72951E1	-3.26378E1	-3.2636E1	2.6822E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80019E1	-6.67572E-4	-8.80002E1	2.6226E-4	4.60148E-3	9.38654E-2	2.73502E1	-3.2641E1	-3.26645E1	2.6834E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80019E1	-6.19888E-4	-8.80003E1	2.86102E-4	5.07832E-3	9.41515E-2	2.72901E1	-3.26831E1	-3.26585E1	2.6789E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00563E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80019E1	-6.91414E-4	-8.80006E1	4.29153E-4	5.126E-3	9.36031E-2	2.72892E1	-3.26266E1	-3.26514E1	2.68388E1	1.19809E-7	2.51334E-3	2.51334E-3	6.35692E-3	3.00824E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80018E1	-6.19888E-4	-8.80005E1	3.57628E-4	4.8399E-3	9.34362E-2	2.72877E1	-3.26549E1	-3.26182E1	2.68136E1	1.19697E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0071E-1
1.4E1	2.92E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80019E1	-7.86781E-4	-8.80001E1	1.66893E-4	4.95911E-3	9.33647E-2	2.73186E1	-3.26646E1	-3.26891E1	2.68028E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01609E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80019E1	-1.12057E-3	-8.80005E1	3.8147E-4	4.62532E-3	9.41515E-2	2.73063E1	-3.26963E1	-3.25689E1	2.67968E1	1.19925E-7	2.50803E-3	2.50803E-3	6.32978E-3	3.0201E-1
1.6E1	4.0E1	0.0E0	6.47E2	4.41E2	-7.43285E-2	-8.80018E1	-1.04904E-3	-8.80003E1	3.8147E-4	5.05447E-3	9.38177E-2	2.73105E1	-3.26428E1	-3.26681E1	2.6807E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
1.7E1	4.6E1	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80017E1	-9.29832E-4	-8.80002E1	3.8147E-4	4.95911E-3	9.377E-2	2.72666E1	-3.26663E1	-3.26374E1	2.68082E1	1.19913E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
1.8E1	2.03E2	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80016E1	-9.05991E-4	-8.80004E1	2.38419E-4	4.76837E-3	9.36747E-2	2.73273E1	-3.26753E1	-3.25996E1	2.67962E1	1.19913E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00824E-1
1.9E1	3.39E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80016E1	-9.77516E-4	-8.80006E1	3.09944E-4	4.64916E-3	9.36031E-2	2.72973E1	-3.26645E1	-3.26392E1	2.6792E1	1.20311E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.02253E-1
2.0E1	2.252E3	1.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80015E1	-9.77516E-4	-8.80003E1	1.90735E-4	4.76837E-3	9.36508E-2	2.73316E1	-3.26608E1	-3.2606E1	2.68124E1	1.19978E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.01209E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80015E1	-9.05991E-4	-8.80003E1	4.29153E-4	5.26905E-3	9.3627E-2	2.72648E1	-3.26573E1	-3.26518E1	2.68065E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99175E-1
2.2E1	1.58E2	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80016E1	-9.29832E-4	-8.80003E1	4.52995E-4	4.95911E-3	9.35793E-2	2.72895E1	-3.2659E1	-3.26254E1	2.68268E1	1.19965E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80016E1	-9.53674E-4	-8.80006E1	3.09944E-4	4.95911E-3	9.36031E-2	2.73147E1	-3.26194E1	-3.26675E1	2.68128E1	1.20192E-7	2.51919E-3	2.51919E-3	6.3074E-3	2.99594E-1
