[Scan]
initial_time=2016-01-28T19:17:55
final_time=2016-01-28T19:18:14
ip_count=19
run=1026
dataset=5
scan=373
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.80588E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.17242E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.41112E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.61393E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.62459E-8
mult1=-1.08722E-8
mult2=-2.6727E-9
rf_tmon=-4.68066E-3
rf_agc=3.31293E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.59485E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6373E0
bslens_imon=2.75405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20193E1
lens5a_imon=1.98271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.0523E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=3.09046E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04784E1
cs_ea1_imon=1.25812E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0744E0
lens1_imon=1.60046E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.41457E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8464E1
cs_ef1a_imon=3.00432E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.16363E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=4.29959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.45172E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6387E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26892E0
cs_ionrep_imon=9.76929E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91833E2
cs_nozzle_imon=1.93626E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.05972E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.89262E-8
tplens_vset=1.4E-1
tplens_vmon=1.64263E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02877E2
lens6_imon=2.98393E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=7.97522E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30377E0
ionrepsh_imon=9.1961E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33297E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49363E0
os_ea2_imon=-8.25669E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.17804E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70995E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.37373E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.10982E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.09229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67872E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.94589E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.24578E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-1.01574E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.53647E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86758E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.86948E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.91777E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.01871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=5.91199E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.40672E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07563E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60634E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30935E1
cs_fil1_imon=9.24857E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28301E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6163E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60251E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.04125E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2206E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.59292E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.32E2	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80015E1	-5.48363E-4	-8.80003E1	4.05312E-4	5.00679E-3	9.36031E-2	2.73294E1	-3.26973E1	-3.26695E1	2.67902E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
2.0E0	8.285E3	4.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80018E1	-5.48363E-4	-8.80002E1	2.14577E-4	4.86374E-3	9.33647E-2	2.73419E1	-3.2616E1	-3.26909E1	2.68138E1	1.20092E-7	2.51393E-3	2.51393E-3	6.30212E-3	2.99845E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80015E1	-8.10623E-4	-8.80003E1	4.76837E-5	4.95911E-3	9.36508E-2	2.73196E1	-3.26277E1	-3.2633E1	2.67943E1	1.20262E-7	2.51271E-3	2.51271E-3	6.3074E-3	2.99981E-1
4.0E0	2.025E3	0.0E0	6.55E2	3.98E2	-7.45602E-2	-8.80014E1	-6.19888E-4	-8.80005E1	2.14577E-4	4.95911E-3	9.32455E-2	2.73405E1	-3.26753E1	-3.26272E1	2.67914E1	1.19941E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80014E1	-9.05991E-4	-8.80007E1	1.66893E-4	4.33922E-3	9.34124E-2	2.73093E1	-3.26765E1	-3.26218E1	2.6792E1	1.19601E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80013E1	-8.10623E-4	-8.80006E1	4.29153E-4	4.55379E-3	9.33409E-2	2.72733E1	-3.26603E1	-3.26542E1	2.67938E1	1.20383E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80011E1	-7.86781E-4	-8.80003E1	2.38419E-5	5.126E-3	9.35555E-2	2.73134E1	-3.26708E1	-3.26201E1	2.67992E1	1.20244E-7	2.5147E-3	2.5147E-3	6.29624E-3	3.01209E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80011E1	-6.91414E-4	-8.80003E1	-1.66893E-4	4.98295E-3	9.32455E-2	2.72474E1	-3.26993E1	-3.2629E1	2.67968E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0148E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80019E1	-5.72205E-4	-8.80003E1	4.76837E-5	4.74453E-3	9.38654E-2	2.72768E1	-3.26773E1	-3.26384E1	2.68007E1	1.19965E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01871E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80018E1	-6.67572E-4	-8.80003E1	1.43051E-4	4.673E-3	9.34839E-2	2.72865E1	-3.26645E1	-3.26098E1	2.68064E1	1.20092E-7	2.52131E-3	2.52131E-3	6.31798E-3	3.01862E-1
1.4E1	2.64E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80015E1	-6.91414E-4	-8.80003E1	2.38419E-4	4.62532E-3	9.34124E-2	2.73243E1	-3.26506E1	-3.26038E1	2.67728E1	1.20137E-7	2.51248E-3	2.51248E-3	6.31299E-3	3.0201E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80016E1	-9.53674E-4	-8.80003E1	-1.19209E-4	4.8399E-3	9.35078E-2	2.73141E1	-3.26633E1	-3.2629E1	2.68364E1	1.20174E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9978E-1
1.6E1	3.4E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80017E1	-9.77516E-4	-8.80005E1	3.09944E-4	4.64916E-3	9.35793E-2	2.72805E1	-3.26681E1	-3.26987E1	2.68046E1	1.20036E-7	2.51863E-3	2.51863E-3	6.32099E-3	3.00507E-1
1.7E1	4.9E1	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80018E1	-6.67572E-4	-8.80003E1	9.53674E-5	4.57764E-3	9.36747E-2	2.73045E1	-3.26693E1	-3.26266E1	2.6804E1					
1.8E1	2.27E2	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80016E1	-5.72205E-4	-8.8E1	-7.15256E-5	4.673E-3	9.37462E-2	2.72672E1	-3.26536E1	-3.25978E1	2.67818E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.0201E-1
1.9E1	3.13E2	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80017E1	-7.39098E-4	-8.80003E1	4.76837E-5	4.62532E-3	9.3627E-2	2.73352E1	-3.26744E1	-3.26101E1	2.68316E1	1.2033E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01609E-1
2.0E1	2.106E3	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80017E1	-5.48363E-4	-8.80003E1	7.15256E-5	4.79221E-3	9.35555E-2	2.7288E1	-3.2663E1	-3.26488E1	2.67909E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99941E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80018E1	-6.67572E-4	-8.80001E1	-7.15256E-5	4.55379E-3	9.35078E-2	2.73275E1	-3.26732E1	-3.26101E1	2.6798E1	1.19725E-7	2.51956E-3	2.51956E-3	6.32273E-3	3.01365E-1
2.2E1	1.53E2	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80018E1	-9.53674E-4	-8.80004E1	-2.38419E-5	4.74453E-3	9.36747E-2	2.72949E1	-3.26753E1	-3.25725E1	2.68106E1	1.19757E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80018E1	-6.91414E-4	-8.80003E1	2.86102E-4	4.673E-3	9.35555E-2	2.73135E1	-3.26645E1	-3.2617E1	2.67872E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
