[Scan]
initial_time=2016-01-28T19:18:22
final_time=2016-01-28T19:18:41
ip_count=19
run=1026
dataset=5
scan=374
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.10825E-2
qbias_imon=-3.78223E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.23608E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.4416E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.62088E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.62737E-8
mult1=-1.26203E-8
mult2=-2.75461E-9
rf_tmon=-5.5831E-3
rf_agc=3.26484E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.31364E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65619E0
bslens_imon=2.48663E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.98014E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53511E1
cs_ef1b_imon=3.0972E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05112E1
cs_ea1_imon=1.25315E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10911E0
lens1_imon=1.43896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64684E1
os_ef1alow_imon=2.97001E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.411E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84255E1
cs_ef1a_imon=3.00407E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.15625E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11425E1
os_restr1_imon=4.30763E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=2.46256E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20609E0
cs_ionrep_imon=9.54775E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93551E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01861E1
cs_anode1_imon=2.04455E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.88586E-8
tplens_vset=1.4E-1
tplens_vmon=1.61961E0
tplens_imon=1.78933E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26107E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26679E1
iondef2_imon=1.55577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98073E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.44765E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=9.37432E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74727E1
cs_ef2b_imon=3.12813E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42789E0
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00488E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71235E1
cs_ef2a_imon=3.17783E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06962E0
os_ef2alow_imon=-2.59891E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6885E-1
os_ef2bup_imon=-5.36174E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10921E1
os_restr2_imon=3.36306E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.10641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72974E1
iondef1_imon=1.07582E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.07878E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.98745E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.24801E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-1.1393E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.4731E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.60096E-6
window_vset=0.0E0
window_vmon=1.9278E-1
window_imon=-1.13235E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39237E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-7.46599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92591E3
multa_neg_imon=8.54963E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.44723E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.06662E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49414E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.41343E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60648E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.25594E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30536E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61089E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76243E-2
os_fil2_imon=-2.74448E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90656E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.91873E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.64023E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23468E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21931E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.74469E-1
res40_imon=-2.44947E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.92E2	1.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80014E1	-6.19888E-4	-8.80005E1	1.90735E-4	4.91142E-3	9.37462E-2	2.7308E1	-3.26927E1	-3.25995E1	2.68172E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01085E-1
2.0E0	8.214E3	6.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80014E1	-5.24521E-4	-8.80002E1	3.09944E-4	4.74453E-3	9.36031E-2	2.73112E1	-3.26009E1	-3.26817E1	2.68069E1	1.19953E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99941E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80016E1	-4.76837E-4	-8.80002E1	4.29153E-4	4.69685E-3	9.36031E-2	2.72964E1	-3.26845E1	-3.26069E1	2.68026E1	1.19933E-7	2.51863E-3	2.51863E-3	6.29655E-3	3.01025E-1
4.0E0	1.903E3	3.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80015E1	-4.76837E-4	-8.8E1	4.29153E-4	4.62532E-3	9.3627E-2	2.7308E1	-3.26313E1	-3.26744E1	2.6798E1	1.20106E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80016E1	-5.24521E-4	-8.79999E1	3.33786E-4	4.57764E-3	9.37939E-2	2.72931E1	-3.26801E1	-3.26482E1	2.67992E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80014E1	-7.15256E-4	-8.80002E1	3.09944E-4	4.673E-3	9.38892E-2	2.7324E1	-3.26673E1	-3.26095E1	2.67986E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80014E1	-5.96046E-4	-8.80002E1	3.33786E-4	4.33922E-3	9.34839E-2	2.73039E1	-3.26524E1	-3.26561E1	2.68209E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80015E1	-6.67572E-4	-8.8E1	4.05312E-4	4.79221E-3	9.39608E-2	2.72762E1	-3.26526E1	-3.25877E1	2.6804E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01609E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80015E1	-8.58307E-4	-8.80001E1	7.15256E-5	4.8399E-3	9.36985E-2	2.72788E1	-3.26676E1	-3.25642E1	2.67896E1	1.20209E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.02511E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80013E1	-6.67572E-4	-8.80005E1	-9.53674E-5	4.8399E-3	9.34839E-2	2.73488E1	-3.2652E1	-3.27228E1	2.67824E1	1.2035E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.02813E-1
1.4E1	2.7E2	0.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80015E1	-9.29832E-4	-8.80004E1	2.38419E-4	4.36306E-3	9.34839E-2	2.72961E1	-3.26488E1	-3.25347E1	2.68184E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02511E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80017E1	-9.05991E-4	-8.80004E1	1.66893E-4	5.07832E-3	9.38892E-2	2.73571E1	-3.27044E1	-3.26903E1	2.67932E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80017E1	-5.96046E-4	-8.80003E1	7.15256E-5	4.74453E-3	9.3627E-2	2.72931E1	-3.26543E1	-3.25797E1	2.67926E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9952E-1
1.7E1	4.8E1	0.0E0	6.87E2	4.7E2	-7.16233E-2	-8.80017E1	-4.76837E-4	-8.80002E1	7.15256E-5	4.69685E-3	9.35555E-2	2.72673E1	-3.26496E1	-3.26921E1	2.6807E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1
1.8E1	2.16E2	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80017E1	-4.76837E-4	-8.80004E1	3.09944E-4	4.43459E-3	9.34362E-2	2.73147E1	-3.26633E1	-3.25557E1	2.68178E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01871E-1
1.9E1	3.47E2	0.0E0	7.68E2	5.29E2	-7.10051E-2	-8.80015E1	-6.91414E-4	-8.80002E1	3.09944E-4	4.673E-3	9.34601E-2	2.72892E1	-3.26484E1	-3.26431E1	2.67674E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.02659E-1
2.0E1	2.185E3	8.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80016E1	-8.58307E-4	-8.8E1	5.48363E-4	5.10216E-3	9.35078E-2	2.72865E1	-3.26488E1	-3.26518E1	2.67955E1	1.20363E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80017E1	-8.82149E-4	-8.8E1	2.6226E-4	4.91142E-3	9.34124E-2	2.73116E1	-3.26508E1	-3.279E1	2.67956E1	1.19757E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00041E-1
2.2E1	1.76E2	0.0E0	8.89E2	6.17E2	-7.08504E-2	-8.80017E1	-8.34465E-4	-8.80001E1	1.90735E-4	5.07832E-3	9.37939E-2	2.72967E1	-3.26326E1	-3.26404E1	2.68148E1	1.2026E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.10825E-2	-8.80016E1	-5.96046E-4	-8.80003E1	1.19209E-4	5.05447E-3	9.36985E-2	2.72974E1	-3.26679E1	-3.26107E1	2.6801E1	1.19705E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.99E-1
