[Scan]
initial_time=2016-01-28T19:19:15
final_time=2016-01-28T19:19:34
ip_count=19
run=1026
dataset=5
scan=376
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.8217E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.82826E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.47898E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.60441E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.62569E-8
mult1=-9.47527E-9
mult2=-2.72193E-9
rf_tmon=-4.98073E-3
rf_agc=3.35793E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.69618E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6385E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19839E1
lens5a_imon=1.99605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05161E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.0901E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04553E2
lens23_imon=1.0202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=1.25451E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0726E0
lens1_imon=1.53558E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64398E1
os_ef1alow_imon=2.96144E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.40376E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=2.99567E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.14419E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.29563E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15372E1
os_ea1_imon=2.46577E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23948E0
cs_ionrep_imon=9.73684E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93258E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.04783E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.88798E-8
tplens_vset=1.4E-1
tplens_vmon=1.60719E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26634E1
iondef3_imon=1.51262E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26425E1
iondef2_imon=1.58292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.39846E-2
ql6_imon=8.63874E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27012E0
ionrepsh_imon=9.16366E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.18134E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.1056E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3999E0
os_ea2_imon=-8.47299E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00706E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.45582E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.36472E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.2827E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.09937E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72837E1
iondef1_imon=1.09986E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.93027E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.18421E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.08421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=1.9692E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-7.70669E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.2314E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.5717E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.26385E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28728E0
defgridb_imon=6.03816E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33224E1
os_fil1_imon=9.37993E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06969E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60351E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30928E1
cs_fil1_imon=9.24292E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25778E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61373E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.75727E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.13663E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.65395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21909E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.3947E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.77E2	1.0E0	1.47E2	4.1E1	-7.286E-2	-8.80017E1	-7.86781E-4	-8.80003E1	9.53674E-5	4.86374E-3	9.36985E-2	2.72808E1	-3.26347E1	-3.26602E1	2.68215E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
2.0E0	8.444E3	9.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80015E1	-5.96046E-4	-8.80002E1	1.19209E-4	4.62532E-3	9.36508E-2	2.73163E1	-3.26753E1	-3.25855E1	2.67951E1	1.20042E-7	2.51287E-3	2.51287E-3	6.31269E-3	3.01862E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80017E1	-7.86781E-4	-8.80004E1	3.57628E-4	4.81606E-3	9.33647E-2	2.72964E1	-3.26596E1	-3.26028E1	2.6803E1	1.19775E-7	2.52293E-3	2.52293E-3	6.3074E-3	3.00522E-1
4.0E0	1.92E3	2.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80018E1	-9.29832E-4	-8.80003E1	2.38419E-4	4.57764E-3	9.33409E-2	2.73069E1	-3.26714E1	-3.26508E1	2.68166E1	1.19941E-7	2.51814E-3	2.51814E-3	6.34982E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80018E1	-8.82149E-4	-8.80004E1	9.53674E-5	4.76837E-3	9.31501E-2	2.72985E1	-3.26332E1	-3.259E1	2.68204E1	1.19646E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80019E1	-6.4373E-4	-8.80004E1	3.09944E-4	4.88758E-3	9.3317E-2	2.73081E1	-3.26813E1	-3.25948E1	2.6801E1	1.19749E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80019E1	-8.10623E-4	-8.80001E1	9.53674E-5	4.52995E-3	9.32455E-2	2.73177E1	-3.26092E1	-3.26573E1	2.68148E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80019E1	-6.19888E-4	-8.8E1	-2.38419E-5	4.86374E-3	9.35316E-2	2.72945E1	-3.26331E1	-3.26567E1	2.68058E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01347E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80015E1	-8.58307E-4	-8.80003E1	2.6226E-4	4.8399E-3	9.33886E-2	2.73285E1	-3.26434E1	-3.2635E1	2.6813E1	1.19913E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80018E1	-7.15256E-4	-8.79998E1	1.19209E-4	4.79221E-3	9.32932E-2	2.73771E1	-3.26708E1	-3.26585E1	2.67998E1	1.19653E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.98481E-1
1.4E1	2.79E2	2.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80018E1	-6.91414E-4	-8.80001E1	0.0E0	4.72069E-3	9.35078E-2	2.73417E1	-3.26735E1	-3.2608E1	2.67878E1	1.19953E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.97901E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.8002E1	-8.58307E-4	-8.80004E1	1.90735E-4	4.60148E-3	9.35078E-2	2.72833E1	-3.26779E1	-3.26201E1	2.6807E1	1.20226E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.98481E-1
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80022E1	-1.0252E-3	-8.80003E1	1.43051E-4	4.8399E-3	9.34124E-2	2.73399E1	-3.26338E1	-3.26524E1	2.68022E1	1.198E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1
1.7E1	6.2E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80022E1	-1.12057E-3	-8.80003E1	1.43051E-4	4.93526E-3	9.35555E-2	2.72721E1	-3.26486E1	-3.26075E1	2.68163E1	1.19705E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.01609E-1
1.8E1	2.16E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80017E1	-9.05991E-4	-8.80004E1	3.33786E-4	4.88758E-3	9.3627E-2	2.72985E1	-3.26801E1	-3.26428E1	2.68028E1	1.20042E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.99845E-1
1.9E1	3.24E2	3.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80018E1	-7.39098E-4	-8.8E1	0.0E0	4.72069E-3	9.35078E-2	2.72962E1	-3.26124E1	-3.26484E1	2.68094E1	1.19902E-7	2.52492E-3	2.52492E-3	6.28056E-3	2.97901E-1
2.0E1	2.177E3	2.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80016E1	-1.09673E-3	-8.8E1	9.53674E-5	4.57764E-3	9.36747E-2	2.73321E1	-3.26861E1	-3.25834E1	2.68088E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80015E1	-7.15256E-4	-8.80002E1	2.86102E-4	4.62532E-3	9.36508E-2	2.72856E1	-3.26555E1	-3.26172E1	2.68007E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
2.2E1	1.38E2	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80015E1	-7.86781E-4	-8.80002E1	3.57628E-4	4.62532E-3	9.38177E-2	2.72915E1	-3.26661E1	-3.26455E1	2.6798E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80016E1	-3.33786E-4	-8.80001E1	9.53674E-5	4.76837E-3	9.39846E-2	2.72837E1	-3.26425E1	-3.26634E1	2.68148E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00966E-1
