[Scan]
initial_time=2016-01-28T19:20:35
final_time=2016-01-28T19:20:54
ip_count=19
run=1026
dataset=5
scan=379
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.75988E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.94461E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.45997E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.60501E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.62037E-8
mult1=-1.0511E-8
mult2=-2.71462E-9
rf_tmon=-4.96905E-3
rf_agc=3.37722E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=5.52857E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64262E0
bslens_imon=2.50786E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20196E1
lens5a_imon=2.00669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.0493E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.09478E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04327E1
cs_ea1_imon=1.22943E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09672E0
lens1_imon=1.45312E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.411E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.99531E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.15976E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.30536E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.44982E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2226E0
cs_ionrep_imon=9.67163E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93448E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=2.04423E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.8922E-8
tplens_vset=1.4E-1
tplens_vmon=1.63907E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26609E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26981E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98222E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=8.74496E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25328E0
ionrepsh_imon=9.28937E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37716E0
os_ea2_imon=-5.00633E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.17155E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81807E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.37157E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02043E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73285E1
iondef1_imon=1.07653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.99184E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.25562E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15957E0
cs_ionaccel_imon=-1.01574E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=2.10135E-1
window_imon=-1.15269E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.6242E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.9392E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4026E0
defgridb_imon=6.08621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33248E1
os_fil1_imon=9.41099E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07137E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60734E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=9.24917E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35749E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61465E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66113E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.70991E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22029E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.96823E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.85E2	1.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80015E1	-5.96046E-4	-8.80001E1	1.19209E-4	4.72069E-3	9.34362E-2	2.72588E1	-3.26957E1	-3.26194E1	2.68202E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9892E-1
2.0E0	8.475E3	1.2E1	3.16E2	1.6E2	-7.24736E-2	-8.80016E1	-5.24521E-4	-8.80001E1	-4.76837E-5	4.86374E-3	9.35555E-2	2.73314E1	-3.26719E1	-3.26223E1	2.68172E1	1.20069E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80016E1	-6.67572E-4	-8.80005E1	9.53674E-5	5.17368E-3	9.36031E-2	2.7297E1	-3.26619E1	-3.25907E1	2.68151E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00676E-1
4.0E0	1.978E3	1.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80014E1	-7.39098E-4	-8.80004E1	-1.19209E-4	4.81606E-3	9.35078E-2	2.73393E1	-3.26825E1	-3.26014E1	2.68274E1	1.20004E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.03545E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80016E1	-1.0252E-3	-8.80003E1	-2.38419E-5	4.72069E-3	9.36985E-2	2.72901E1	-3.26458E1	-3.26362E1	2.6795E1	1.20106E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80014E1	-8.34465E-4	-8.80004E1	-4.76837E-5	4.55379E-3	9.37223E-2	2.73075E1	-3.26759E1	-3.26278E1	2.681E1	1.19653E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80016E1	-1.07288E-3	-8.80005E1	4.05312E-4	5.07832E-3	9.36031E-2	2.72889E1	-3.26783E1	-3.26693E1	2.67876E1	1.19705E-7	2.51116E-3	2.51116E-3	6.27461E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80016E1	-6.4373E-4	-8.80006E1	2.6226E-4	4.95911E-3	9.38416E-2	2.72937E1	-3.26927E1	-3.26278E1	2.68024E1	1.19819E-7	2.5225E-3	2.5225E-3	6.33538E-3	3.01475E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80016E1	-8.82149E-4	-8.80004E1	2.38419E-4	4.8399E-3	9.37939E-2	2.72456E1	-3.26488E1	-3.2626E1	2.68172E1	1.198E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.99941E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80013E1	-8.58307E-4	-8.80002E1	-2.38419E-5	4.88758E-3	9.38177E-2	2.73123E1	-3.26627E1	-3.26675E1	2.67938E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
1.4E1	2.68E2	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80015E1	-1.04904E-3	-8.80003E1	9.53674E-5	5.07832E-3	9.36508E-2	2.73222E1	-3.26921E1	-3.26697E1	2.67968E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80017E1	-1.00136E-3	-8.80002E1	2.14577E-4	4.76837E-3	9.39131E-2	2.72943E1	-3.26458E1	-3.26056E1	2.6804E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
1.6E1	3.5E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80017E1	-9.29832E-4	-8.80001E1	-9.53674E-5	4.74453E-3	9.35793E-2	2.73051E1	-3.26464E1	-3.26236E1	2.68232E1	1.19902E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.99941E-1
1.7E1	6.1E1	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80017E1	-8.82149E-4	-8.8E1	3.57628E-4	4.60148E-3	9.36508E-2	2.72522E1	-3.26909E1	-3.26182E1	2.68058E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.8E1	2.1E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80018E1	-9.05991E-4	-8.8E1	3.33786E-4	4.76837E-3	9.377E-2	2.73448E1	-3.26645E1	-3.26398E1	2.68004E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
1.9E1	3.17E2	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80017E1	-9.29832E-4	-8.80004E1	3.57628E-4	4.74453E-3	9.39131E-2	2.73163E1	-3.26644E1	-3.26024E1	2.67764E1	1.20069E-7	2.50789E-3	2.50789E-3	6.34037E-3	3.00563E-1
2.0E1	2.101E3	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80019E1	-1.14441E-3	-8.80003E1	1.90735E-4	4.52995E-3	9.39369E-2	2.72841E1	-3.26933E1	-3.26236E1	2.67862E1	1.20017E-7	2.51552E-3	2.51552E-3	6.27461E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80017E1	-7.62939E-4	-8.80002E1	1.90735E-4	4.45843E-3	9.39846E-2	2.72856E1	-3.26419E1	-3.26396E1	2.68016E1	1.198E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.01995E-1
2.2E1	1.45E2	0.0E0	8.89E2	6.17E2	-7.12368E-2	-8.80017E1	-5.00679E-4	-8.80006E1	7.15256E-5	4.50611E-3	9.39608E-2	2.73033E1	-3.26602E1	-3.26107E1	2.68232E1	1.20004E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.02511E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80018E1	-7.15256E-4	-8.80003E1	1.90735E-4	4.69685E-3	9.40084E-2	2.73285E1	-3.26981E1	-3.26609E1	2.68094E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9978E-1
