[Scan]
initial_time=2016-01-28T19:21:02
final_time=2016-01-28T19:21:21
ip_count=19
run=1026
dataset=5
scan=380
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.80058E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.89705E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.43632E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-1.58085E-9
ql4_vset=
ql4_vmon=-1.66893E-4
ql4_imon=1.62684E-8
mult1=-1.21365E-8
mult2=-2.75654E-9
rf_tmon=-3.5451E-3
rf_agc=3.46734E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.70273E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.49017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=1.98757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53771E1
cs_ef1b_imon=3.10485E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05029E1
cs_ea1_imon=1.24855E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09495E0
lens1_imon=1.40357E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64695E1
os_ef1alow_imon=2.96931E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.40534E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84261E1
cs_ef1a_imon=2.9926E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.15505E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11239E1
os_restr1_imon=4.29825E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=2.45478E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63606E1
os_ef1bup_imon=3.07635E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=9.73534E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02058E1
cs_anode1_imon=2.05289E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.88111E-8
tplens_vset=1.4E-1
tplens_vmon=1.62079E0
tplens_imon=-1.75008E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.33821E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26272E0
ionrepsh_imon=9.32477E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34153E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41255E0
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71304E1
cs_ef2a_imon=3.19277E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08352E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85067E-1
os_ef2bup_imon=-5.34436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10915E1
os_restr2_imon=3.36549E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.09633E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72895E1
iondef1_imon=1.0875E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.08399E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.93299E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.23509E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11798E0
cs_ionaccel_imon=-1.00724E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47157E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56272E1
einzel_imon=7.79905E-6
window_vset=0.0E0
window_vmon=1.97993E-1
window_imon=-1.03505E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86651E1
mask2_imon=-7.67451E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.2082E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.78347E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.22944E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33238E1
os_fil1_imon=9.40966E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07022E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60678E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.24922E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35518E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61194E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52184E-2
os_fil2_imon=-2.61126E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95869E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.11235E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33273E-1
cs_fil2_imon=-2.28112E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21905E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04384E-1
res40_imon=-2.50855E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=240
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.78E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80021E1	-1.04904E-3	-8.80001E1	2.38419E-4	4.69685E-3	9.38416E-2	2.73069E1	-3.26699E1	-3.26374E1	2.67932E1	1.19927E-7	2.51721E-3	2.51721E-3	6.29844E-3	3.02038E-1
2.0E0	8.216E3	7.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80018E1	-1.00136E-3	-8.80002E1	2.6226E-4	4.62532E-3	9.36985E-2	2.72943E1	-3.26597E1	-3.26338E1	2.67995E1	1.20297E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.0041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80018E1	-6.4373E-4	-8.8E1	2.86102E-4	4.52995E-3	9.34601E-2	2.73062E1	-3.26606E1	-3.26417E1	2.6792E1	1.19902E-7	2.52599E-3	2.52599E-3	6.31278E-3	3.00453E-1
4.0E0	1.985E3	1.0E0	6.55E2	3.98E2	-7.29374E-2	-8.8002E1	-7.86781E-4	-8.80001E1	2.14577E-4	4.41074E-3	9.37223E-2	2.73238E1	-3.2646E1	-3.2656E1	2.68166E1	1.1986E-7	2.51723E-3	2.51723E-3	6.31242E-3	2.99577E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80018E1	-1.07288E-3	-8.80002E1	4.76837E-4	4.62532E-3	9.35555E-2	2.73016E1	-3.26579E1	-3.26325E1	2.68076E1	1.20137E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01209E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80017E1	-5.00679E-4	-8.80001E1	3.09944E-4	4.48227E-3	9.35078E-2	2.73171E1	-3.2632E1	-3.262E1	2.67908E1	1.20017E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80018E1	-5.72205E-4	-8.80004E1	2.86102E-4	4.33922E-3	9.34839E-2	2.72967E1	-3.26651E1	-3.26188E1	2.6795E1	1.20004E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.03286E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80015E1	-9.05991E-4	-8.80003E1	2.38419E-4	4.3869E-3	9.35078E-2	2.73207E1	-3.26663E1	-3.26585E1	2.6837E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80015E1	-9.53674E-4	-8.80004E1	5.48363E-4	4.48227E-3	9.37939E-2	2.73057E1	-3.26518E1	-3.26344E1	2.68286E1	1.20122E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.01085E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.80018E1	-7.15256E-4	-8.80002E1	2.86102E-4	4.79221E-3	9.3317E-2	2.73045E1	-3.26512E1	-3.265E1	2.68112E1	1.19819E-7	2.51693E-3	2.51693E-3	6.27399E-3	3.01475E-1
1.4E1	2.78E2	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80016E1	-8.82149E-4	-8.80003E1	3.8147E-4	4.55379E-3	9.34839E-2	2.72967E1	-3.26843E1	-3.26422E1	2.68214E1	1.19902E-7	2.51954E-3	2.51954E-3	6.28056E-3	3.00966E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80014E1	-6.67572E-4	-8.80003E1	2.38419E-4	4.673E-3	9.3627E-2	2.73169E1	-3.26638E1	-3.26124E1	2.68117E1	1.19809E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9926E-1
1.6E1	2.9E1	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80016E1	-7.86781E-4	-8.80003E1	3.57628E-4	4.72069E-3	9.38177E-2	2.73201E1	-3.26795E1	-3.26434E1	2.6797E1	1.198E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.99941E-1
1.7E1	5.2E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80015E1	-6.19888E-4	-8.80005E1	1.66893E-4	4.69685E-3	9.3627E-2	2.72859E1	-3.26561E1	-3.26044E1	2.68244E1	1.20031E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.01742E-1
1.8E1	2.51E2	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80016E1	-9.53674E-4	-8.80001E1	1.43051E-4	4.3869E-3	9.38177E-2	2.72763E1	-3.26713E1	-3.26187E1	2.67986E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00824E-1
1.9E1	3.26E2	1.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80016E1	-7.39098E-4	-8.80002E1	4.05312E-4	4.50611E-3	9.3627E-2	2.73122E1	-3.26555E1	-3.26296E1	2.68227E1	1.19601E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.00041E-1
2.0E1	2.25E3	3.0E0	8.08E2	5.58E2	-7.286E-2	-8.80016E1	-6.67572E-4	-8.80003E1	4.05312E-4	4.52995E-3	9.36985E-2	2.73135E1	-3.26591E1	-3.26062E1	2.68356E1	1.2026E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99941E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80017E1	-6.19888E-4	-8.80004E1	4.29153E-4	4.64916E-3	9.34124E-2	2.73309E1	-3.26651E1	-3.2647E1	2.68041E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
2.2E1	1.52E2	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80016E1	-6.67572E-4	-8.80007E1	2.14577E-4	4.86374E-3	9.37223E-2	2.72786E1	-3.26685E1	-3.26154E1	2.68004E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80016E1	-6.4373E-4	-8.80009E1	-1.66893E-4	4.673E-3	9.35316E-2	2.72895E1	-3.26849E1	-3.26314E1	2.68016E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
