[Scan]
initial_time=2016-01-28T19:22:48
final_time=2016-01-28T19:23:08
ip_count=19
run=1026
dataset=5
scan=384
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.82025E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.88E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.42369E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.56904E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.63223E-8
mult1=-8.96979E-9
mult2=-2.68667E-9
rf_tmon=-4.56049E-3
rf_agc=3.37782E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.24354E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.73793E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=1.97059E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05181E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.10379E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04728E1
cs_ea1_imon=1.2627E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0979E0
lens1_imon=1.43896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.96036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.41454E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.00649E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.14688E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.31401E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.44026E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26862E0
cs_ionrep_imon=9.69994E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93211E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.04639E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.88676E-8
tplens_vset=1.4E-1
tplens_vmon=1.65854E0
tplens_imon=-1.0422E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26338E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.3673E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34117E0
ionrepsh_imon=9.52297E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32802E1
lens5b_imon=2.15286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44618E0
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00389E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52374E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.3658E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.31379E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01581E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.08361E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67842E1
iondef4_imon=1.07296E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.96439E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=7.17332E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.05538E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.86709E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86728E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.52675E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.69498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.17634E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47347E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.38612E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07449E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60305E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3092E1
cs_fil1_imon=9.25349E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31485E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61247E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.59781E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25156E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21874E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89926E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.87E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80014E1	-8.58307E-4	-8.80005E1	2.86102E-4	4.69685E-3	9.377E-2	2.73195E1	-3.26723E1	-3.26044E1	2.6813E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01995E-1
2.0E0	8.503E3	1.0E1	3.16E2	1.6E2	-7.31692E-2	-8.80014E1	-6.19888E-4	-8.80006E1	2.14577E-4	4.93526E-3	9.40084E-2	2.73082E1	-3.26536E1	-3.26376E1	2.68028E1	1.19965E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00302E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80015E1	-8.82149E-4	-8.80006E1	1.43051E-4	4.74453E-3	9.38416E-2	2.72958E1	-3.26666E1	-3.26457E1	2.67943E1	1.19819E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.00144E-1
4.0E0	2.076E3	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80016E1	-9.29832E-4	-8.80004E1	1.66893E-4	4.91142E-3	9.39846E-2	2.73345E1	-3.26543E1	-3.26254E1	2.67914E1	1.1974E-7	2.51919E-3	2.51919E-3	6.33388E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80013E1	-7.86781E-4	-8.80002E1	3.33786E-4	5.00679E-3	9.377E-2	2.72862E1	-3.26242E1	-3.26667E1	2.68064E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80013E1	-9.05991E-4	-8.8E1	3.33786E-4	4.3869E-3	9.36747E-2	2.73123E1	-3.26585E1	-3.2653E1	2.68004E1	1.2026E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80014E1	-9.29832E-4	-8.80003E1	1.19209E-4	4.60148E-3	9.35793E-2	2.72998E1	-3.26478E1	-3.26142E1	2.67717E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80017E1	-9.53674E-4	-8.80002E1	4.05312E-4	4.74453E-3	9.37223E-2	2.73297E1	-3.26284E1	-3.26825E1	2.68051E1	1.198E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.01223E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80016E1	-8.58307E-4	-8.8E1	2.86102E-4	4.57764E-3	9.39131E-2	2.72612E1	-3.26452E1	-3.26458E1	2.67995E1	1.19809E-7	2.51007E-3	2.51007E-3	6.29645E-3	3.00563E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80013E1	-7.39098E-4	-8.80004E1	4.05312E-4	4.45843E-3	9.40084E-2	2.73315E1	-3.26987E1	-3.26278E1	2.68076E1	1.19913E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9978E-1
1.4E1	2.66E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80016E1	-1.21593E-3	-8.80004E1	4.05312E-4	4.33922E-3	9.39369E-2	2.72662E1	-3.26555E1	-3.2626E1	2.6807E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80017E1	-1.21593E-3	-8.80003E1	3.33786E-4	4.41074E-3	9.39846E-2	2.73225E1	-3.26777E1	-3.262E1	2.68058E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01738E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80019E1	-8.10623E-4	-8.80005E1	3.33786E-4	4.673E-3	9.377E-2	2.72992E1	-3.26891E1	-3.26154E1	2.68047E1	1.19965E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.9952E-1
1.7E1	5.0E1	0.0E0	6.87E2	4.7E2	-7.13143E-2	-8.80018E1	-1.09673E-3	-8.80005E1	5.00679E-4	4.62532E-3	9.37939E-2	2.72715E1	-3.26524E1	-3.26567E1	2.6797E1	1.2026E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0071E-1
1.8E1	2.07E2	0.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80017E1	-1.19209E-3	-8.80007E1	3.57628E-4	4.60148E-3	9.35555E-2	2.73213E1	-3.26666E1	-3.26666E1	2.68233E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
1.9E1	3.58E2	0.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80017E1	-1.00136E-3	-8.80001E1	2.14577E-4	4.72069E-3	9.34839E-2	2.73113E1	-3.26553E1	-3.26447E1	2.68101E1	1.1979E-7	2.52448E-3	2.52448E-3	6.3074E-3	2.99594E-1
2.0E1	2.141E3	0.0E0	8.08E2	5.58E2	-7.10051E-2	-8.8002E1	-9.53674E-4	-8.80002E1	2.38419E-4	4.673E-3	9.35793E-2	2.72474E1	-3.26374E1	-3.26933E1	2.67787E1	1.19937E-7	2.52179E-3	2.52179E-3	6.3245E-3	2.9944E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.80018E1	-9.05991E-4	-8.80003E1	1.43051E-4	4.88758E-3	9.34362E-2	2.7301E1	-3.2622E1	-3.26544E1	2.67868E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
2.2E1	1.55E2	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80019E1	-9.05991E-4	-8.80003E1	1.90735E-4	4.81606E-3	9.38892E-2	2.73216E1	-3.26508E1	-3.26419E1	2.67866E1	1.20142E-7	2.51919E-3	2.51919E-3	6.29157E-3	2.99343E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80017E1	-6.19888E-4	-8.80004E1	-4.76837E-5	4.72069E-3	9.36985E-2	2.73123E1	-3.26338E1	-3.26464E1	2.67842E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.9892E-1
