[Scan]
initial_time=2016-01-28T19:23:15
final_time=2016-01-28T19:23:34
ip_count=19
run=1026
dataset=5
scan=385
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.73572E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.70559E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.45675E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.61918E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.62678E-8
mult1=-9.63202E-9
mult2=-2.73258E-9
rf_tmon=-5.10724E-3
rf_agc=3.26907E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.39815E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53412E1
cs_ef1b_imon=3.09143E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04569E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04754E1
cs_ea1_imon=1.24189E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02573E0
lens1_imon=1.64372E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64845E1
os_ef1alow_imon=2.97316E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.41673E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.00011E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.14465E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11491E1
os_restr1_imon=4.29654E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14921E1
os_ea1_imon=2.47262E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63529E1
os_ef1bup_imon=3.08357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=9.68277E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91842E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01984E1
cs_anode1_imon=2.0334E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.88839E-8
tplens_vset=1.4E-1
tplens_vmon=1.62221E0
tplens_imon=-1.11888E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25978E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26512E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98231E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.672E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=9.36193E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33417E1
lens5b_imon=2.16656E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74732E1
cs_ef2b_imon=3.12923E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38368E0
os_ea2_imon=-8.90558E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00511E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71214E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.66039E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69562E-1
os_ef2bup_imon=-5.3588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10986E1
os_restr2_imon=3.3725E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22997E2
cs_ionfoca_imon=6.27621E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02033E1
cs_anode2_imon=2.09553E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73081E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67776E1
iondef4_imon=1.07979E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.97038E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.16312E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11455E0
cs_ionaccel_imon=-9.98689E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47286E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56386E1
einzel_imon=7.57182E-6
window_vset=0.0E0
window_vmon=2.21963E-1
window_imon=-9.08867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39069E-4
mask2_vset=0.0E0
mask2_vmon=-1.86625E1
mask2_imon=-5.75777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.27466E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.25085E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.42246E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32036E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.40106E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07136E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60501E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30927E1
cs_fil1_imon=9.27057E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28638E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61152E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6283E-2
os_fil2_imon=-2.6625E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.07863E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34492E-1
cs_fil2_imon=-2.43795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21988E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.56068E-1
res40_imon=-2.55934E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.91E2	0.0E0	1.47E2	4.1E1	-7.16233E-2	-8.80017E1	-8.10623E-4	-8.8E1	-4.76837E-5	4.74453E-3	9.37462E-2	2.73134E1	-3.2639E1	-3.26402E1	2.68111E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
2.0E0	8.402E3	7.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80016E1	-7.86781E-4	-8.80003E1	2.14577E-4	4.74453E-3	9.36985E-2	2.73339E1	-3.26413E1	-3.26407E1	2.68034E1	1.20106E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80017E1	-8.58307E-4	-8.80002E1	-7.15256E-5	4.95911E-3	9.377E-2	2.72827E1	-3.26679E1	-3.25983E1	2.67944E1	1.19978E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.99613E-1
4.0E0	1.902E3	1.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80018E1	-9.05991E-4	-8.80004E1	-2.38419E-5	4.72069E-3	9.36985E-2	2.73189E1	-3.26621E1	-3.26158E1	2.67968E1	1.19902E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80019E1	-1.21593E-3	-8.80005E1	-9.53674E-5	4.93526E-3	9.3627E-2	2.72575E1	-3.2659E1	-3.26025E1	2.68071E1	1.19965E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80018E1	-1.21593E-3	-8.80003E1	-2.6226E-4	4.93526E-3	9.36985E-2	2.73414E1	-3.26851E1	-3.26331E1	2.67764E1	1.1958E-7	2.5165E-3	2.5165E-3	6.32273E-3	3.01121E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80018E1	-1.12057E-3	-8.79999E1	-9.53674E-5	4.86374E-3	9.35316E-2	2.72774E1	-3.26649E1	-3.26437E1	2.68118E1	1.19907E-7	2.51085E-3	2.51085E-3	6.29558E-3	3.02459E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80017E1	-1.09673E-3	-8.80002E1	-2.86102E-4	4.64916E-3	9.37939E-2	2.73021E1	-3.2623E1	-3.26272E1	2.68376E1	1.20106E-7	2.5131E-3	2.5131E-3	6.2752E-3	3.01223E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.13143E-2	-8.80016E1	-9.53674E-4	-8.8E1	3.09944E-4	4.86374E-3	9.36508E-2	2.73363E1	-3.26579E1	-3.26152E1	2.67931E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80016E1	-8.82149E-4	-8.80003E1	1.43051E-4	4.60148E-3	9.38654E-2	2.72873E1	-3.26352E1	-3.26346E1	2.68363E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
1.4E1	2.98E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80015E1	-1.0252E-3	-8.80003E1	1.43051E-4	4.79221E-3	9.377E-2	2.72892E1	-3.26856E1	-3.26354E1	2.67827E1	1.19819E-7	2.51915E-3	2.51915E-3	6.34661E-3	3.0041E-1
1.5E1	8.0E0	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80014E1	-7.15256E-4	-8.80003E1	1.90735E-4	4.79221E-3	9.39846E-2	2.72775E1	-3.26591E1	-3.26074E1	2.68118E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.03804E-1
1.6E1	3.2E1	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80018E1	-8.34465E-4	-8.80002E1	-2.6226E-4	4.76837E-3	9.36747E-2	2.73015E1	-3.26825E1	-3.26032E1	2.68213E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
1.7E1	4.8E1	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80017E1	-7.39098E-4	-8.80003E1	2.38419E-4	4.86374E-3	9.37939E-2	2.73291E1	-3.26711E1	-3.25828E1	2.68198E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
1.8E1	2.32E2	0.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80019E1	-6.19888E-4	-8.80003E1	3.57628E-4	4.81606E-3	9.34601E-2	2.72585E1	-3.26785E1	-3.2675E1	2.67884E1	1.19757E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
1.9E1	3.4E2	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80015E1	-6.19888E-4	-8.80003E1	3.33786E-4	4.62532E-3	9.36031E-2	2.73129E1	-3.26278E1	-3.26452E1	2.68094E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01738E-1
2.0E1	2.13E3	1.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80015E1	-6.91414E-4	-8.79999E1	3.57628E-4	4.48227E-3	9.33647E-2	2.73129E1	-3.26849E1	-3.26362E1	2.67932E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.15461E-2	-8.80018E1	-1.12057E-3	-8.8E1	7.15256E-5	5.34058E-3	9.377E-2	2.73207E1	-3.2632E1	-3.26657E1	2.6822E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9926E-1
2.2E1	1.55E2	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80017E1	-1.09673E-3	-8.80002E1	1.90735E-4	4.91142E-3	9.37939E-2	2.73204E1	-3.26691E1	-3.2626E1	2.68279E1	1.20114E-7	2.51918E-3	2.51918E-3	6.31555E-3	2.98959E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80017E1	-1.04904E-3	-8.80001E1	4.76837E-5	4.86374E-3	9.37462E-2	2.73081E1	-3.26512E1	-3.25978E1	2.67776E1					
