[Scan]
initial_time=2016-01-28T19:24:08
final_time=2016-01-28T19:24:28
ip_count=19
run=1026
dataset=5
scan=387
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.7806E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.10411E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.44835E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.56604E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.6272E-8
mult1=-1.10953E-8
mult2=-2.79969E-9
rf_tmon=-4.3384E-3
rf_agc=3.37102E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=5.40948E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.98415E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12455E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5337E1
cs_ef1b_imon=3.0955E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04838E1
cs_ea1_imon=1.2437E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09603E0
lens1_imon=1.30125E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.96108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.43332E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8413E1
cs_ef1a_imon=3.01838E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.14147E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.41711E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.09478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=9.65753E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91825E2
cs_nozzle_imon=1.93467E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.03666E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.87437E-8
tplens_vset=1.4E-1
tplens_vmon=1.65165E0
tplens_imon=-4.86804E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26331E1
iondef3_imon=1.49857E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2652E1
iondef2_imon=1.56093E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.54349E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=9.15284E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3987E0
os_ea2_imon=-6.20187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.005E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04134E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10571E1
os_restr2_imon=3.36905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.3E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.10009E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.06309E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.10756E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.95121E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.16046E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-1.14909E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47507E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.389E-4
mask2_vset=0.0E0
mask2_vmon=-1.86572E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92685E3
multa_neg_imon=7.6676E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.47797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.33955E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.39657E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07629E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60243E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.25271E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33467E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61091E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6412E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.27198E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32843E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.219E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29684E-3
inlet_lpb_pmon=2.99594E-1
chamber_ion_pmon=1.20042E-7
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19959E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.05E2	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80016E1	-3.09944E-4	-8.80004E1	4.76837E-5	4.31538E-3	9.35316E-2	2.72901E1	-3.26753E1	-3.26182E1	2.68436E1	1.19809E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9952E-1
2.0E0	8.455E3	8.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80018E1	-3.8147E-4	-8.80003E1	0.0E0	4.12464E-3	9.38177E-2	2.73231E1	-3.26464E1	-3.26536E1	2.67806E1	1.20106E-7	2.51739E-3	2.51739E-3	6.28056E-3	3.00453E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80017E1	-5.24521E-4	-8.80005E1	1.66893E-4	4.33922E-3	9.37223E-2	2.73051E1	-3.26608E1	-3.26054E1	2.68046E1	1.1966E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.01209E-1
4.0E0	2.021E3	1.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80018E1	-8.82149E-4	-8.80003E1	0.0E0	4.33922E-3	9.36747E-2	2.73195E1	-3.26681E1	-3.26356E1	2.67619E1	1.19697E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80014E1	-1.26362E-3	-8.80006E1	1.43051E-4	4.673E-3	9.38654E-2	2.72949E1	-3.26771E1	-3.26182E1	2.68124E1	1.20209E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80016E1	-1.04904E-3	-8.80004E1	1.43051E-4	4.24385E-3	9.38177E-2	2.72949E1	-3.2632E1	-3.2641E1	2.6807E1	1.19913E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80018E1	-4.29153E-4	-8.80002E1	4.76837E-4	4.62532E-3	9.37462E-2	2.72895E1	-3.26651E1	-3.26206E1	2.68112E1	1.20031E-7	2.52362E-3	2.52362E-3	6.31299E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80017E1	-4.05312E-4	-8.80006E1	4.76837E-5	4.22001E-3	9.32217E-2	2.72763E1	-3.26464E1	-3.26302E1	2.68052E1	1.20069E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00302E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80017E1	-6.19888E-4	-8.80004E1	2.38419E-4	4.19617E-3	9.32932E-2	2.73111E1	-3.26554E1	-3.26434E1	2.68196E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00563E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80016E1	-6.67572E-4	-8.80004E1	9.53674E-5	4.31538E-3	9.377E-2	2.73087E1	-3.26536E1	-3.26723E1	2.67716E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
1.4E1	2.84E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80016E1	-5.72205E-4	-8.80003E1	2.14577E-4	4.64916E-3	9.36508E-2	2.72992E1	-3.26809E1	-3.26183E1	2.68292E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02922E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80018E1	-8.34465E-4	-8.80003E1	4.76837E-4	4.17233E-3	9.34601E-2	2.72829E1	-3.26543E1	-3.26302E1	2.67968E1	1.20311E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.99941E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80018E1	-9.05991E-4	-8.80002E1	3.57628E-4	4.81606E-3	9.35316E-2	2.72552E1	-3.26819E1	-3.25912E1	2.67824E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9952E-1
1.7E1	6.1E1	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.8002E1	-7.39098E-4	-8.80004E1	3.8147E-4	4.74453E-3	9.35555E-2	2.73976E1	-3.2632E1	-3.26518E1	2.67986E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00041E-1
1.8E1	2.15E2	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80018E1	-6.19888E-4	-8.80003E1	2.6226E-4	4.81606E-3	9.377E-2	2.73189E1	-3.26296E1	-3.26236E1	2.68028E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.98222E-1
1.9E1	3.04E2	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80019E1	-6.91414E-4	-8.80004E1	4.05312E-4	5.22137E-3	9.38177E-2	2.72606E1	-3.26771E1	-3.26182E1	2.67968E1	1.19705E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.99E-1
2.0E1	2.125E3	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80018E1	-8.34465E-4	-8.80003E1	5.24521E-4	4.55379E-3	9.34601E-2	2.73135E1	-3.26699E1	-3.26386E1	2.67848E1	1.19965E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.9874E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.13915E-2	-8.80017E1	-5.00679E-4	-8.80004E1	5.96046E-4	4.69685E-3	9.36747E-2	2.73558E1	-3.26756E1	-3.25729E1	2.68279E1	1.20311E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
2.2E1	1.43E2	0.0E0	8.89E2	6.17E2	-7.13915E-2	-8.80017E1	-6.91414E-4	-8.80001E1	2.86102E-4	4.57764E-3	9.34124E-2	2.72626E1	-3.27198E1	-3.25593E1	2.68316E1	1.19757E-7	2.52757E-3	2.52757E-3	6.28006E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80019E1	-8.34465E-4	-8.80002E1	4.05312E-4	4.41074E-3	9.32693E-2	2.73075E1	-3.2652E1	-3.26331E1	2.6798E1	1.20042E-7	2.51919E-3	2.51919E-3	6.29684E-3	2.99594E-1
