[Scan]
initial_time=2016-01-28T19:27:40
final_time=2016-01-28T19:28:00
ip_count=19
run=1026
dataset=5
scan=395
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.79612E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.92828E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=1.4704E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.57739E-9
ql4_vset=
ql4_vmon=-1.90735E-4
ql4_imon=1.63816E-8
mult1=-9.34032E-9
mult2=-2.73616E-9
rf_tmon=-3.89108E-3
rf_agc=3.31202E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=5.45061E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.61051E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19907E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53684E1
cs_ef1b_imon=3.09025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04905E1
cs_ea1_imon=1.25669E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04953E0
lens1_imon=1.41419E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64411E1
os_ef1alow_imon=2.9707E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04139E1
cs_ea2_imon=1.40959E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=2.9992E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.1255E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.32049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15441E1
os_ea1_imon=2.4477E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.08295E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=9.55483E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93537E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01931E1
cs_anode1_imon=2.0581E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.86814E-8
tplens_vset=1.4E-1
tplens_vmon=1.62138E0
tplens_imon=-2.8473E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26462E1
iondef3_imon=1.49595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2648E1
iondef2_imon=1.58974E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.636E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26685E0
ionrepsh_imon=9.31769E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.18153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.12118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39662E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00478E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71142E1
cs_ef2a_imon=3.18235E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06556E0
os_ef2alow_imon=-2.69622E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6885E-1
os_ef2bup_imon=-5.38606E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.35819E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.31486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01439E1
cs_anode2_imon=2.10606E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72775E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.03383E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.09711E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13767E0
cs_ionaccel_imon=-8.54332E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=1.97993E-1
window_imon=-1.12193E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86663E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.21174E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.69498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.34624E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5532E0
defgridb_imon=5.85614E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33249E1
os_fil1_imon=9.39999E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07057E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59867E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=9.24302E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33664E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60514E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74977E-2
os_fil2_imon=-2.72131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98186E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.63249E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32523E-1
cs_fil2_imon=-2.62864E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37948E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21695E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33896E-3
inlet_lpb_pmon=3.01158E-1
chamber_ion_pmon=1.20006E-7
chamber_cvt_pmon=2.52157E-3
foreline_cvt_pmon=2.52157E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68474E-1
res40_imon=-2.55721E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.1E2	1.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80019E1	-6.91414E-4	-8.80002E1	3.33786E-4	4.43459E-3	9.36985E-2	2.73104E1	-3.26703E1	-3.26472E1	2.68316E1	1.19902E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
2.0E0	8.097E3	7.0E0	3.16E2	1.6E2	-7.31692E-2	-8.8002E1	-8.58307E-4	-8.80003E1	3.57628E-4	4.8399E-3	9.38416E-2	2.72757E1	-3.26609E1	-3.26419E1	2.68034E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80018E1	-7.39098E-4	-8.80003E1	-7.15256E-5	4.48227E-3	9.37462E-2	2.7308E1	-3.26467E1	-3.26154E1	2.67908E1	1.19978E-7	2.51359E-3	2.51359E-3	6.33538E-3	3.00144E-1
4.0E0	1.988E3	1.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80019E1	-8.58307E-4	-8.79999E1	1.90735E-4	4.8399E-3	9.36508E-2	2.73004E1	-3.26838E1	-3.26012E1	2.68151E1	1.19646E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80017E1	-9.29832E-4	-8.8E1	2.86102E-4	4.74453E-3	9.36985E-2	2.73326E1	-3.26848E1	-3.26199E1	2.68288E1	1.20069E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80017E1	-3.8147E-4	-8.80001E1	1.90735E-4	4.76837E-3	9.37939E-2	2.7257E1	-3.26591E1	-3.26308E1	2.68004E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80015E1	-5.00679E-4	-8.80002E1	0.0E0	4.93526E-3	9.37939E-2	2.72874E1	-3.26319E1	-3.26095E1	2.68036E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80014E1	-5.48363E-4	-8.80003E1	0.0E0	4.79221E-3	9.37223E-2	2.72979E1	-3.26308E1	-3.26122E1	2.67818E1	1.20055E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00453E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80015E1	-7.62939E-4	-8.80003E1	3.33786E-4	4.69685E-3	9.37223E-2	2.7308E1	-3.26431E1	-3.26248E1	2.68112E1	1.20017E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80016E1	-7.39098E-4	-8.80001E1	1.43051E-4	4.81606E-3	9.36985E-2	2.72658E1	-3.26687E1	-3.26095E1	2.68065E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9926E-1
1.4E1	2.74E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80013E1	-5.24521E-4	-8.80001E1	2.14577E-4	4.79221E-3	9.37223E-2	2.73534E1	-3.2675E1	-3.26082E1	2.68311E1	1.2021E-7	2.51854E-3	2.51854E-3	6.33297E-3	2.99179E-1
1.5E1	1.0E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80014E1	-3.33786E-4	-8.79999E1	-9.53674E-5	4.69685E-3	9.36508E-2	2.7285E1	-3.2685E1	-3.26018E1	2.67896E1	1.20005E-7	2.51758E-3	2.51758E-3	6.32483E-3	3.0147E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80013E1	-6.91414E-4	-8.80003E1	4.05312E-4	4.74453E-3	9.36985E-2	2.73063E1	-3.26505E1	-3.26187E1	2.6792E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
1.7E1	5.5E1	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80015E1	-4.52995E-4	-8.80001E1	7.15256E-5	4.98295E-3	9.36508E-2	2.73195E1	-3.26663E1	-3.2599E1	2.68076E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9926E-1
1.8E1	1.84E2	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80014E1	-5.24521E-4	-8.8E1	0.0E0	4.95911E-3	9.34124E-2	2.73252E1	-3.26325E1	-3.26514E1	2.6781E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.98222E-1
1.9E1	3.24E2	2.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80016E1	-5.48363E-4	-8.80001E1	-4.76837E-5	4.72069E-3	9.35078E-2	2.73159E1	-3.26681E1	-3.26332E1	2.67932E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.98665E-1
2.0E1	2.096E3	2.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80015E1	-1.07288E-3	-8.80002E1	-4.76837E-5	4.24385E-3	9.3317E-2	2.72803E1	-3.26968E1	-3.2629E1	2.68569E1	1.19653E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00563E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80019E1	-7.86781E-4	-8.8E1	-3.09944E-4	4.673E-3	9.33886E-2	2.73684E1	-3.27749E1	-3.26345E1	2.68035E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
2.2E1	1.46E2	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.80015E1	-1.0252E-3	-8.80003E1	-7.15256E-5	5.126E-3	9.35793E-2	2.73424E1	-3.26702E1	-3.26129E1	2.67983E1	1.1998E-7	2.51474E-3	2.51474E-3	6.29771E-3	2.99874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80018E1	-9.77516E-4	-8.80005E1	-1.90735E-4	4.43459E-3	9.35793E-2	2.72775E1	-3.2648E1	-3.26462E1	2.68202E1	1.20006E-7	2.52157E-3	2.52157E-3	6.33896E-3	3.01158E-1
