[Scan]
initial_time=2016-01-28T19:28:07
final_time=2016-01-28T19:28:27
ip_count=19
run=1026
dataset=5
scan=396
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.80135E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.71799E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.46015E-9
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.54883E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.63131E-8
mult1=-1.06434E-8
mult2=-2.74057E-9
rf_tmon=-4.77078E-3
rf_agc=3.3676E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=5.75161E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65532E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=2.00182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12449E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.09442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02049E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=1.26172E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08582E0
lens1_imon=1.4094E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.40592E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=3.00649E-5
olens2_vset=9.7E-1
olens2_vmon=9.69553E-1
olens2_imon=1.12761E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.44883E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=9.68998E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93301E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.04026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.86407E-8
tplens_vset=1.4E-1
tplens_vmon=1.63182E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26062E1
iondef3_imon=1.49821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=9.01508E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=9.32588E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40831E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00443E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78203E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.34706E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.10549E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72943E1
iondef1_imon=1.08616E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.91421E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.08854E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-1.03015E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.5617E-6
window_vset=0.0E0
window_vmon=2.1494E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86662E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.372E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.78799E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=6.95742E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33245E1
os_fil1_imon=9.40876E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60111E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=9.2592E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31184E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6055E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57671E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36607E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21786E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32402E-3
inlet_lpb_pmon=3.00882E-1
chamber_ion_pmon=1.19945E-7
chamber_cvt_pmon=2.52174E-3
foreline_cvt_pmon=2.52174E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.43675E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.13E2	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80014E1	-3.8147E-4	-8.80001E1	2.14577E-4	4.8399E-3	9.35078E-2	2.72933E1	-3.26596E1	-3.26366E1	2.67842E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01609E-1
2.0E0	8.237E3	7.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80015E1	-5.72205E-4	-8.80002E1	4.76837E-5	4.64916E-3	9.377E-2	2.73317E1	-3.26903E1	-3.26098E1	2.6773E1	1.19809E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.00302E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80015E1	-8.10623E-4	-8.80004E1	7.15256E-5	4.45843E-3	9.38416E-2	2.7335E1	-3.26472E1	-3.26441E1	2.6825E1	1.20028E-7	2.51369E-3	2.51369E-3	6.33863E-3	3.0E-1
4.0E0	1.998E3	1.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80015E1	-5.72205E-4	-8.80002E1	1.66893E-4	4.43459E-3	9.38892E-2	2.7334E1	-3.26644E1	-3.26767E1	2.68184E1	1.19883E-7	2.51952E-3	2.51952E-3	6.31879E-3	3.02699E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80014E1	-9.53674E-4	-8.80005E1	-2.38419E-5	4.48227E-3	9.38892E-2	2.73069E1	-3.26801E1	-3.26819E1	2.67409E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.03976E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80014E1	-9.53674E-4	-8.80003E1	4.76837E-5	4.8399E-3	9.37223E-2	2.72787E1	-3.2641E1	-3.26248E1	2.68292E1	1.19851E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80018E1	-8.10623E-4	-8.80005E1	-9.53674E-5	4.86374E-3	9.37939E-2	2.72871E1	-3.26765E1	-3.2596E1	2.68418E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80017E1	-1.12057E-3	-8.80001E1	7.15256E-5	4.88758E-3	9.39608E-2	2.73455E1	-3.26272E1	-3.26756E1	2.68022E1	1.20031E-7	2.52473E-3	2.52473E-3	6.30182E-3	2.99613E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80014E1	-9.53674E-4	-8.80003E1	-7.15256E-5	4.93526E-3	9.38416E-2	2.73452E1	-3.26319E1	-3.2629E1	2.67962E1	1.20278E-7	2.51607E-3	2.51607E-3	6.32386E-3	3.00954E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80016E1	-1.21593E-3	-8.80003E1	3.57628E-4	4.8399E-3	9.36747E-2	2.72931E1	-3.26621E1	-3.26693E1	2.68106E1					
1.4E1	2.77E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80015E1	-6.4373E-4	-8.80002E1	1.90735E-4	4.81606E-3	9.37939E-2	2.73027E1	-3.26735E1	-3.26134E1	2.67878E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9943E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80015E1	-9.77516E-4	-8.80001E1	2.38419E-4	4.88758E-3	9.40084E-2	2.73293E1	-3.26431E1	-3.26107E1	2.6763E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
1.6E1	3.7E1	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80016E1	-8.10623E-4	-8.80003E1	-4.76837E-5	4.36306E-3	9.3627E-2	2.73075E1	-3.26597E1	-3.26765E1	2.6804E1	1.19902E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0148E-1
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80016E1	-1.26362E-3	-8.80003E1	3.09944E-4	4.36306E-3	9.38416E-2	2.72997E1	-3.26603E1	-3.26194E1	2.67836E1	1.19809E-7	2.52538E-3	2.52538E-3	6.31837E-3	2.99E-1
1.8E1	1.98E2	0.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80017E1	-8.34465E-4	-8.80002E1	4.29153E-4	4.98295E-3	9.34839E-2	2.72957E1	-3.26732E1	-3.26543E1	2.6819E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
1.9E1	3.2E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80015E1	-7.86781E-4	-8.80004E1	4.29153E-4	4.50611E-3	9.36031E-2	2.7266E1	-3.26771E1	-3.25996E1	2.68046E1	1.19851E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.01223E-1
2.0E1	2.105E3	2.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80017E1	-9.53674E-4	-8.80005E1	-2.38419E-5	4.72069E-3	9.37223E-2	2.73333E1	-3.26951E1	-3.2647E1	2.6777E1	1.20017E-7	2.5188E-3	2.5188E-3	6.27461E-3	3.01347E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80017E1	-1.16825E-3	-8.80002E1	7.15256E-5	4.93526E-3	9.35078E-2	2.72593E1	-3.26642E1	-3.27471E1	2.68348E1	1.20069E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
2.2E1	1.36E2	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80018E1	-1.3113E-3	-8.80003E1	2.6226E-4	5.38826E-3	9.37223E-2	2.73204E1	-3.26713E1	-3.26248E1	2.67451E1	1.1979E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80016E1	-1.04904E-3	-8.79998E1	4.76837E-4	5.00679E-3	9.37223E-2	2.72943E1	-3.26729E1	-3.26062E1	2.6801E1	1.19945E-7	2.52174E-3	2.52174E-3	6.32402E-3	3.00882E-1
