[Scan]
initial_time=2016-01-28T19:28:34
final_time=2016-01-28T19:28:54
ip_count=19
run=1026
dataset=5
scan=397
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.76439E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.72586E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.43884E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.50222E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.63415E-8
mult1=-1.02581E-8
mult2=-2.71661E-9
rf_tmon=-5.07119E-3
rf_agc=3.41868E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.1322E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63908E0
bslens_imon=2.30258E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05224E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53719E1
cs_ef1b_imon=3.0972E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.26589E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08433E0
lens1_imon=1.54514E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64603E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03566E1
cs_ea2_imon=1.40888E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.98808E-5
olens2_vset=9.7E-1
olens2_vmon=9.69577E-1
olens2_imon=1.12665E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11031E1
os_restr1_imon=4.28922E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15353E1
os_ea1_imon=2.46893E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63693E1
os_ef1bup_imon=3.08852E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26213E0
cs_ionrep_imon=9.82382E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93516E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=2.04351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.86892E-8
tplens_vset=1.4E-1
tplens_vmon=1.6084E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.48887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.57134E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.89373E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25505E0
ionrepsh_imon=9.2292E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.16348E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74797E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38954E0
os_ea2_imon=-7.5901E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.18965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06498E0
os_ef2alow_imon=-2.69969E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76379E-1
os_ef2bup_imon=-5.42429E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=3.35333E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23008E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.0866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72528E1
iondef1_imon=1.08078E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68569E1
iondef4_imon=1.08434E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.8952E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=7.09608E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10408E0
cs_ionaccel_imon=-1.06632E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.68436E-6
window_vset=0.0E0
window_vmon=1.88725E-1
window_imon=-9.44689E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.30376E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.79055E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.23651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51777E0
defgridb_imon=6.27026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.38852E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07572E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59986E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30839E1
cs_fil1_imon=9.24349E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29378E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60739E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76243E-2
os_fil2_imon=-2.8024E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96448E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49202E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33647E-1
cs_fil2_imon=-2.54176E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21786E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.97647E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.14231E-1
res40_imon=-2.44252E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.87E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80016E1	-7.86781E-4	-8.80002E1	1.19209E-4	4.57764E-3	9.39131E-2	2.7251E1	-3.26464E1	-3.2623E1	2.67962E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.03286E-1
2.0E0	8.214E3	8.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80016E1	-5.00679E-4	-8.80001E1	2.38419E-4	4.74453E-3	9.36747E-2	2.73027E1	-3.26634E1	-3.26101E1	2.67639E1	1.19861E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80017E1	-1.07288E-3	-8.80002E1	2.86102E-4	4.45843E-3	9.37462E-2	2.72988E1	-3.26915E1	-3.26363E1	2.67875E1	1.1966E-7	2.51915E-3	2.51915E-3	6.29067E-3	2.99083E-1
4.0E0	1.935E3	2.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80021E1	-1.16825E-3	-8.80003E1	2.86102E-4	4.79221E-3	9.377E-2	2.737E1	-3.26597E1	-3.26707E1	2.68138E1	1.1993E-7	2.51679E-3	2.51679E-3	6.30221E-3	2.99506E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80019E1	-8.34465E-4	-8.80005E1	1.43051E-4	4.91142E-3	9.3317E-2	2.7308E1	-3.2682E1	-3.26413E1	2.68001E1	1.1966E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.01475E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.8002E1	-1.09673E-3	-8.80005E1	2.14577E-4	4.74453E-3	9.38892E-2	2.72845E1	-3.26638E1	-3.26166E1	2.67866E1	1.20055E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80019E1	-8.34465E-4	-8.80002E1	2.86102E-4	4.74453E-3	9.39846E-2	2.72771E1	-3.26692E1	-3.2616E1	2.68282E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80018E1	-1.00136E-3	-8.80004E1	0.0E0	4.48227E-3	9.41992E-2	2.73179E1	-3.26562E1	-3.26306E1	2.68136E1	1.20036E-7	2.51404E-3	2.51404E-3	6.31685E-3	2.99958E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80022E1	-6.91414E-4	-8.80005E1	1.90735E-4	4.93526E-3	9.37223E-2	2.73437E1	-3.26013E1	-3.27125E1	2.67352E1	1.19962E-7	2.52351E-3	2.52351E-3	6.31992E-3	3.01709E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80019E1	-7.62939E-4	-8.80005E1	1.90735E-4	4.69685E-3	9.3627E-2	2.72642E1	-3.26801E1	-3.25791E1	2.6831E1	1.19824E-7	2.51147E-3	2.51147E-3	6.32151E-3	3.006E-1
1.4E1	2.6E2	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80019E1	-7.15256E-4	-8.80005E1	1.90735E-4	4.95911E-3	9.38177E-2	2.72949E1	-3.26597E1	-3.262E1	2.6804E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80019E1	-6.91414E-4	-8.80004E1	1.66893E-4	4.55379E-3	9.36031E-2	2.73628E1	-3.2647E1	-3.26182E1	2.67806E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
1.6E1	2.5E1	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.8002E1	-6.4373E-4	-8.8E1	4.76837E-5	5.17368E-3	9.37223E-2	2.73117E1	-3.26585E1	-3.26753E1	2.68106E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.97647E-1
1.7E1	5.9E1	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80019E1	-8.34465E-4	-8.80003E1	0.0E0	5.07832E-3	9.4223E-2	2.73135E1	-3.26464E1	-3.26482E1	2.68082E1	1.19872E-7	2.51804E-3	2.51804E-3	6.29624E-3	2.9829E-1
1.8E1	2.17E2	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80017E1	-8.34465E-4	-8.80003E1	9.53674E-5	5.29289E-3	9.38177E-2	2.73234E1	-3.26472E1	-3.26254E1	2.67578E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9978E-1
1.9E1	3.41E2	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80017E1	-1.09673E-3	-8.80003E1	2.38419E-4	5.26905E-3	9.36985E-2	2.72811E1	-3.26693E1	-3.2641E1	2.68376E1	1.20004E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00197E-1
2.0E1	2.177E3	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.8002E1	-7.86781E-4	-8.80003E1	1.19209E-4	5.17368E-3	9.41038E-2	2.73057E1	-3.26627E1	-3.26158E1	2.68082E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80018E1	-8.34465E-4	-8.80003E1	1.19209E-4	5.126E-3	9.38177E-2	2.71388E1	-3.25912E1	-3.27627E1	2.67746E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
2.2E1	1.54E2	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80017E1	-5.24521E-4	-8.80003E1	-3.57628E-4	5.43594E-3	9.36508E-2	2.73617E1	-3.26638E1	-3.26413E1	2.6819E1	1.20042E-7	2.51393E-3	2.51393E-3	6.31269E-3	2.98592E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80019E1	-9.29832E-4	-8.80003E1	-1.19209E-4	5.03063E-3	9.35316E-2	2.72528E1	-3.26795E1	-3.26362E1	2.68569E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.97647E-1
