[Scan]
initial_time=2016-01-28T19:30:04
final_time=2016-01-28T19:30:33
ip_count=19
run=1026
dataset=5
scan=400
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.818E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.87857E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.43424E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.52695E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.63368E-8
mult1=-1.0847E-8
mult2=-2.54491E-9
rf_tmon=-4.62746E-3
rf_agc=3.29552E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=5.41294E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71577E0
bslens_imon=2.33443E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19811E1
lens5a_imon=1.9835E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04886E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.09248E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.0214E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.053E1
cs_ea1_imon=1.23131E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04823E0
lens1_imon=1.62584E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64544E1
os_ef1alow_imon=2.9652E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0406E1
cs_ea2_imon=1.40573E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8477E1
cs_ef1a_imon=3.00957E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.12659E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11072E1
os_restr1_imon=4.29402E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15267E1
os_ea1_imon=2.49042E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6396E1
os_ef1bup_imon=3.08353E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25794E0
cs_ionrep_imon=9.30742E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93529E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0177E1
cs_anode1_imon=2.03533E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.85937E-8
tplens_vset=1.4E-1
tplens_vmon=1.63949E0
tplens_imon=-4.49312E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.259E1
iondef3_imon=1.542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26844E1
iondef2_imon=1.54239E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98517E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=8.38065E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27935E0
ionrepsh_imon=9.11275E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3334E1
lens5b_imon=2.2101E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7465E1
cs_ef2b_imon=3.13918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34294E0
os_ea2_imon=-9.90488E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00697E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71154E1
cs_ef2a_imon=3.16682E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07532E0
os_ef2alow_imon=-2.59168E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9591E-1
os_ef2bup_imon=-5.43305E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10948E1
os_restr2_imon=3.37545E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29111E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.08944E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73434E1
iondef1_imon=1.11879E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.07744E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.86201E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.08657E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09641E0
cs_ionaccel_imon=-1.12429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47362E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55964E1
einzel_imon=7.55939E-6
window_vset=0.0E0
window_vmon=1.70515E-1
window_imon=-9.45245E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82583E2
mask1_imon=2.38975E-4
mask2_vset=0.0E0
mask2_vmon=-1.86857E1
mask2_imon=-5.59909E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=8.65723E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93747E3
defgrida_imon=6.55093E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=7.2712E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23134E0
defgridb_imon=6.08373E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33216E1
os_fil1_imon=9.4109E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07297E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59632E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.25437E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.27835E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60394E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72065E-2
os_fil2_imon=-2.77553E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94062E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.69172E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33567E-1
cs_fil2_imon=-2.8404E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12973E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2171E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40045E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.73107E-1
res40_imon=-2.62282E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.11E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80022E1	-7.62939E-4	-8.80006E1	0.0E0	4.95911E-3	9.34124E-2	2.72648E1	-3.26713E1	-3.26154E1	2.68171E1	1.20116E-7	2.51642E-3	2.51642E-3	6.32483E-3	3.00639E-1
2.0E0	8.21E3	4.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80021E1	-6.91414E-4	-8.80003E1	3.57628E-4	4.43459E-3	9.34124E-2	2.72636E1	-3.26597E1	-3.26266E1	2.67872E1	1.19831E-7	2.51472E-3	2.51472E-3	6.29703E-3	2.99014E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80019E1	-8.10623E-4	-8.80001E1	2.38419E-4	4.673E-3	9.34601E-2	2.73424E1	-3.26585E1	-3.26162E1	2.67708E1	1.19757E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9874E-1
4.0E0	1.872E3	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80017E1	-6.4373E-4	-8.80001E1	1.66893E-4	4.673E-3	9.34601E-2	2.733E1	-3.26868E1	-3.26127E1	2.68157E1	1.19925E-7	2.51248E-3	2.51248E-3	6.32418E-3	3.00144E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.8002E1	-4.52995E-4	-8.80003E1	1.19209E-4	4.48227E-3	9.32693E-2	2.72974E1	-3.2662E1	-3.26478E1	2.67711E1	1.19941E-7	2.51287E-3	2.51287E-3	6.33388E-3	3.00852E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80018E1	-7.62939E-4	-8.80002E1	-7.15256E-5	4.74453E-3	9.35078E-2	2.72909E1	-3.2639E1	-3.26408E1	2.6813E1	1.19891E-7	2.52025E-3	2.52025E-3	6.3074E-3	2.99594E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80019E1	-8.34465E-4	-8.79997E1	1.43051E-4	4.62532E-3	9.36031E-2	2.73339E1	-3.26597E1	-3.26062E1	2.68208E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80019E1	-8.10623E-4	-8.8E1	2.38419E-5	4.62532E-3	9.35078E-2	2.72877E1	-3.26585E1	-3.25852E1	2.68106E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01609E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80021E1	-1.09673E-3	-8.8E1	3.09944E-4	4.60148E-3	9.33886E-2	2.73063E1	-3.26579E1	-3.25803E1	2.68166E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80019E1	-8.58307E-4	-8.80003E1	4.29153E-4	4.79221E-3	9.37939E-2	2.72907E1	-3.26549E1	-3.26554E1	2.67956E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01871E-1
1.4E1	2.6E2	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80022E1	-9.05991E-4	-8.79998E1	2.38419E-5	4.673E-3	9.33647E-2	2.73105E1	-3.26735E1	-3.26338E1	2.68184E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01609E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.8002E1	-1.12057E-3	-8.79998E1	1.43051E-4	5.22137E-3	9.36508E-2	2.72892E1	-3.26797E1	-3.26443E1	2.68007E1	1.20363E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01223E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80022E1	-8.34465E-4	-8.80003E1	6.19888E-4	5.24521E-3	9.38177E-2	2.73129E1	-3.26735E1	-3.26963E1	2.68184E1	1.19705E-7	2.51116E-3	2.51116E-3	6.27461E-3	3.01085E-1
1.7E1	5.6E1	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80021E1	-1.00136E-3	-8.80002E1	3.8147E-4	5.29289E-3	9.36508E-2	2.73514E1	-3.27019E1	-3.25884E1	2.68123E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00041E-1
1.8E1	2.27E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80019E1	-8.82149E-4	-8.80003E1	2.6226E-4	5.29289E-3	9.36985E-2	2.72751E1	-3.26695E1	-3.26456E1	2.67995E1	1.19841E-7	2.51709E-3	2.51709E-3	6.33919E-3	3.01609E-1
1.9E1	3.14E2	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80019E1	-7.15256E-4	-8.80003E1	3.57628E-4	4.8399E-3	9.36747E-2	2.73358E1	-3.26527E1	-3.26156E1	2.68053E1	1.20114E-7	2.52189E-3	2.52189E-3	6.32916E-3	3.01934E-1
2.0E1	2.178E3	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80018E1	-7.15256E-4	-8.80003E1	1.43051E-4	4.64916E-3	9.37223E-2	2.73093E1	-3.27059E1	-3.26164E1	2.68142E1					
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80017E1	-1.0252E-3	-8.80004E1	3.33786E-4	5.31673E-3	9.3627E-2	2.72862E1	-3.26408E1	-3.26531E1	2.68447E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00824E-1
2.2E1	1.59E2	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80018E1	-1.19209E-3	-8.80006E1	3.8147E-4	5.07832E-3	9.35555E-2	2.73153E1	-3.26639E1	-3.26368E1	2.67908E1	1.1959E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80018E1	-1.12057E-3	-8.80004E1	7.15256E-5	4.91142E-3	9.3627E-2	2.73434E1	-3.26844E1	-3.259E1	2.68214E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01085E-1
