[Scan]
initial_time=2016-01-28T19:30:44
final_time=2016-01-28T19:31:13
ip_count=19
run=1026
dataset=5
scan=401
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.79311E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.95534E-10
ql2_vset=
ql2_vmon=-1.07288E-3
ql2_imon=1.48835E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.50281E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.63029E-8
mult1=-1.03183E-8
mult2=-2.76452E-9
rf_tmon=-3.90559E-3
rf_agc=3.46554E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.5846E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.73242E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19616E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05363E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.10271E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02024E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05144E1
cs_ea1_imon=1.25451E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03835E0
lens1_imon=1.4058E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03937E1
cs_ea2_imon=1.41169E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.9982E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.13537E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.29779E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15065E1
os_ea1_imon=2.43477E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28695E0
cs_ionrep_imon=9.58544E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91823E2
cs_nozzle_imon=1.93251E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.03197E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.86934E-8
tplens_vset=1.4E-1
tplens_vmon=1.65645E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.48847E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.56165E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=8.61764E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26411E0
ionrepsh_imon=9.2646E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33381E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45097E0
os_ea2_imon=-9.30213E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.0045E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=3.35607E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.28775E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.08868E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.08269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.90098E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.10886E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.05538E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86789E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92567E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.07639E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=6.10305E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33224E1
os_fil1_imon=9.39339E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06686E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60071E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=9.24424E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.42897E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6052E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56381E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57875E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54467E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21794E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.85431E-1
res40_imon=-2.42489E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=224
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.97E2	1.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80017E1	-9.05991E-4	-8.80003E1	1.43051E-4	4.91142E-3	9.33409E-2	2.72522E1	-3.27023E1	-3.25984E1	2.67878E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
2.0E0	8.181E3	1.2E1	3.16E2	1.6E2	-7.20871E-2	-8.80019E1	-9.05991E-4	-8.80003E1	9.53674E-5	4.55379E-3	9.37223E-2	2.73582E1	-3.2629E1	-3.26396E1	2.68208E1	1.20158E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.02253E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80017E1	-8.10623E-4	-8.80004E1	1.43051E-4	4.74453E-3	9.39131E-2	2.7278E1	-3.26502E1	-3.26449E1	2.68018E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
4.0E0	1.912E3	2.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80018E1	-6.67572E-4	-8.80004E1	9.53674E-5	4.91142E-3	9.37223E-2	2.73189E1	-3.26669E1	-3.26567E1	2.67794E1	1.1969E-7	2.51077E-3	2.51077E-3	6.29684E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.80018E1	-7.39098E-4	-8.80004E1	-2.86102E-4	5.19753E-3	9.3627E-2	2.73443E1	-3.26664E1	-3.26242E1	2.68487E1	1.20031E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.99613E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80017E1	-5.48363E-4	-8.80001E1	2.38419E-5	5.03063E-3	9.38892E-2	2.72827E1	-3.26419E1	-3.26242E1	2.68041E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80017E1	-5.24521E-4	-8.80002E1	0.0E0	4.79221E-3	9.35793E-2	2.72678E1	-3.26645E1	-3.26218E1	2.68851E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80016E1	-8.82149E-4	-8.8E1	2.38419E-5	5.03063E-3	9.35078E-2	2.7269E1	-3.26332E1	-3.2641E1	2.68112E1	1.20122E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.01609E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80018E1	-7.15256E-4	-8.80002E1	-4.76837E-5	4.98295E-3	9.36985E-2	2.72782E1	-3.26291E1	-3.26254E1	2.68045E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.03185E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80018E1	-7.86781E-4	-8.8E1	2.38419E-4	4.74453E-3	9.35793E-2	2.72906E1	-3.26875E1	-3.264E1	2.68272E1	1.1966E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00676E-1
1.4E1	3.06E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80017E1	-8.34465E-4	-8.80001E1	1.19209E-4	4.64916E-3	9.35316E-2	2.73293E1	-3.26387E1	-3.26057E1	2.6787E1	1.19575E-7	2.52224E-3	2.52224E-3	6.3074E-3	3.02931E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80018E1	-1.0252E-3	-8.8E1	9.53674E-5	4.98295E-3	9.37462E-2	2.73139E1	-3.26638E1	-3.25971E1	2.6783E1	1.19963E-7	2.51085E-3	2.51085E-3	6.32518E-3	3.00197E-1
1.6E1	2.6E1	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80017E1	-9.05991E-4	-8.79999E1	0.0E0	4.79221E-3	9.35555E-2	2.73139E1	-3.26661E1	-3.2649E1	2.68209E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
1.7E1	6.8E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80019E1	-8.10623E-4	-8.79999E1	1.90735E-4	4.79221E-3	9.377E-2	2.72716E1	-3.26693E1	-3.26466E1	2.68605E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01223E-1
1.8E1	1.97E2	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80019E1	-7.62939E-4	-8.80001E1	2.38419E-4	5.126E-3	9.35555E-2	2.73252E1	-3.26408E1	-3.26402E1	2.67607E1	1.19913E-7	2.51896E-3	2.51896E-3	6.29801E-3	3.02847E-1
1.9E1	3.56E2	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80018E1	-8.10623E-4	-8.80002E1	7.15256E-5	4.8399E-3	9.37223E-2	2.72438E1	-3.26627E1	-3.26176E1	2.68118E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00966E-1
2.0E1	2.041E3	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80019E1	-8.58307E-4	-8.80002E1	-1.90735E-4	4.88758E-3	9.377E-2	2.72933E1	-3.26815E1	-3.26136E1	2.67445E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02133E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80017E1	-7.15256E-4	-8.80001E1	-7.15256E-5	5.10216E-3	9.36985E-2	2.7285E1	-3.26703E1	-3.25847E1	2.69321E1	1.20209E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00966E-1
2.2E1	1.47E2	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80017E1	-6.19888E-4	-8.80002E1	1.66893E-4	5.31673E-3	9.3627E-2	2.73225E1	-3.26512E1	-3.26651E1	2.70791E1	1.19697E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80016E1	-1.07288E-3	-8.80003E1	1.66893E-4	5.03063E-3	9.36747E-2	2.73087E1	-3.26753E1	-3.26128E1	2.68316E1	1.19861E-7	2.52428E-3	2.52428E-3	6.29098E-3	3.00563E-1
