[Scan]
initial_time=2016-01-28T19:31:24
final_time=2016-01-28T19:31:53
ip_count=19
run=1026
dataset=5
scan=402
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.77611E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.79405E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.45203E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.50344E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.62904E-8
mult1=-1.09842E-8
mult2=-2.81141E-9
rf_tmon=-5.25008E-3
rf_agc=3.31141E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.66709E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64463E0
bslens_imon=2.55408E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20202E1
lens5a_imon=1.98978E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04975E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.09587E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02239E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=1.25262E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07818E0
lens1_imon=1.37873E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03788E1
cs_ea2_imon=1.40872E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.99676E-5
olens2_vset=9.7E-1
olens2_vmon=9.69625E-1
olens2_imon=1.13395E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.30644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.45699E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.0728E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25393E0
cs_ionrep_imon=9.74208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93306E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01557E1
cs_anode1_imon=2.04891E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.86608E-8
tplens_vset=1.4E-1
tplens_vmon=1.64817E0
tplens_imon=-2.99822E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26144E1
iondef3_imon=1.4965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26689E1
iondef2_imon=1.58539E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.51297E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22149E0
ionrepsh_imon=9.28663E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.18886E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35984E0
os_ea2_imon=-7.11195E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86612E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=3.36869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.2901E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.09648E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68587E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.9108E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.14904E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.01934E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.04729E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86843E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.55666E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.67882E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.32894E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52306E0
defgridb_imon=6.29316E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.40138E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07587E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60061E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=9.24719E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34007E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60757E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.65993E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45076E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.92058E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21652E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68903E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.19E2	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80015E1	-9.29832E-4	-8.80004E1	-4.76837E-5	4.62532E-3	9.41277E-2	2.73063E1	-3.26732E1	-3.26189E1	2.677E1	1.20209E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.00453E-1
2.0E0	8.057E3	5.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80019E1	-9.05991E-4	-8.80003E1	1.19209E-4	4.69685E-3	9.377E-2	2.734E1	-3.26805E1	-3.26536E1	2.68394E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01738E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80017E1	-6.91414E-4	-8.80005E1	0.0E0	4.79221E-3	9.38892E-2	2.73387E1	-3.26254E1	-3.26243E1	2.67978E1	1.19721E-7	2.52179E-3	2.52179E-3	6.3131E-3	3.02972E-1
4.0E0	2.031E3	2.0E0	6.55E2	3.98E2	-7.286E-2	-8.80016E1	-8.34465E-4	-8.80003E1	2.38419E-5	5.05447E-3	9.36031E-2	2.73195E1	-3.26783E1	-3.2626E1	2.67193E1	1.19891E-7	2.51709E-3	2.51709E-3	6.33388E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80017E1	-8.58307E-4	-8.80005E1	-2.38419E-5	4.8399E-3	9.36031E-2	2.73252E1	-3.26938E1	-3.26296E1	2.68512E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80014E1	-7.62939E-4	-8.80002E1	1.43051E-4	5.10216E-3	9.3627E-2	2.72821E1	-3.26413E1	-3.26378E1	2.68141E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80015E1	-8.10623E-4	-8.80003E1	1.90735E-4	5.03063E-3	9.37223E-2	2.73577E1	-3.26523E1	-3.26181E1	2.68274E1	1.19902E-7	2.51847E-3	2.51847E-3	6.2645E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80018E1	-8.82149E-4	-8.80003E1	3.09944E-4	4.8399E-3	9.36985E-2	2.73051E1	-3.2648E1	-3.26382E1	2.66929E1	1.20297E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.01742E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.43285E-2	-8.80015E1	-1.19209E-3	-8.80001E1	2.14577E-4	5.17368E-3	9.36031E-2	2.72648E1	-3.2623E1	-3.26296E1	2.68953E1	1.20243E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.01609E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80017E1	-1.14441E-3	-8.80003E1	2.14577E-4	4.93526E-3	9.39608E-2	2.73195E1	-3.26699E1	-3.26026E1	2.67169E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9952E-1
1.4E1	2.5E2	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80018E1	-1.04904E-3	-8.80002E1	3.33786E-4	5.24521E-3	9.37223E-2	2.73514E1	-3.26488E1	-3.26236E1	2.67644E1	1.20043E-7	2.52154E-3	2.52154E-3	6.32661E-3	3.00824E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.8002E1	-9.05991E-4	-8.79998E1	3.57628E-4	4.95911E-3	9.40323E-2	2.73688E1	-3.26633E1	-3.26068E1	2.6714E1					
1.6E1	2.6E1	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.8002E1	-1.0252E-3	-8.80002E1	2.38419E-4	5.14984E-3	9.38177E-2	2.72857E1	-3.27097E1	-3.26072E1	2.67917E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9978E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80017E1	-1.07288E-3	-8.79997E1	1.19209E-4	5.4121E-3	9.34839E-2	2.72714E1	-3.2654E1	-3.26165E1	2.67471E1	1.1993E-7	2.52093E-3	2.52093E-3	6.33341E-3	3.01485E-1
1.8E1	1.96E2	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80015E1	-7.86781E-4	-8.80003E1	2.6226E-4	4.93526E-3	9.39131E-2	2.726E1	-3.26585E1	-3.26362E1	2.68647E1	1.19883E-7	2.51838E-3	2.51838E-3	6.30171E-3	3.02426E-1
1.9E1	3.36E2	2.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80018E1	-7.62939E-4	-8.80002E1	2.38419E-4	4.74453E-3	9.36031E-2	2.73243E1	-3.26579E1	-3.26326E1	2.66616E1	1.20069E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00824E-1
2.0E1	2.181E3	2.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80017E1	-1.04904E-3	-8.80002E1	3.8147E-4	4.76837E-3	9.3317E-2	2.72803E1	-3.27009E1	-3.26272E1	2.69103E1	1.19925E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.01209E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80017E1	-1.0252E-3	-8.80002E1	4.29153E-4	5.36442E-3	9.35078E-2	2.7253E1	-3.2659E1	-3.26289E1	2.66987E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99175E-1
2.2E1	1.6E2	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80019E1	-1.19209E-3	-8.80004E1	6.19888E-4	4.93526E-3	9.33409E-2	2.73505E1	-3.26803E1	-3.2636E1	2.66929E1	1.19991E-7	2.51814E-3	2.51814E-3	6.33388E-3	2.99343E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80019E1	-7.86781E-4	-8.80003E1	4.76837E-5	4.81606E-3	9.35793E-2	2.73039E1	-3.26689E1	-3.26144E1	2.68587E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99941E-1
