[Scan]
initial_time=2016-01-28T19:33:38
final_time=2016-01-28T19:34:07
ip_count=19
run=1026
dataset=6
scan=405
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.19373E-1
ql1_imon=1.4955E-8
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=1.99535E-9
ql3_vset=
ql3_vmon=-9.13069E0
ql3_imon=3.83747E-9
ql4_vset=
ql4_vmon=-9.14154E0
ql4_imon=-5.27191E-10
mult1=-9.16244E-9
mult2=-2.6707E-9
rf_tmon=-4.79481E-3
rf_agc=3.29911E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.67676E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64557E0
bslens_imon=2.57865E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.04845E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.10379E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=1.25527E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40972E0
lens1_imon=2.72023E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03625E1
cs_ea2_imon=1.38694E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.99495E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.13216E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.30211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15512E1
os_ea1_imon=2.45371E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23086E0
cs_ionrep_imon=9.67871E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.04891E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.08396E-8
tplens_vset=1.4E-1
tplens_vmon=1.6143E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26681E1
iondef3_imon=1.47967E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.58798E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.9848E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.91879E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22732E0
ionrepsh_imon=9.31769E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39957E0
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.20398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11075E1
os_restr2_imon=3.35607E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.09432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.07936E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66412E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.82603E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.08934E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.17071E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56093E1
einzel_imon=7.57972E-6
window_vset=0.0E0
window_vmon=1.79501E-1
window_imon=-8.67976E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.63647E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.43307E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.34978E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48233E0
defgridb_imon=5.91985E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33218E1
os_fil1_imon=9.3902E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06783E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59909E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.25169E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35149E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60294E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73711E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15133E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34142E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.64194E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45457E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21811E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91728E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.19731E-1	-7.98917E-1	-9.13038E0	-9.14185E0	4.74453E-3	9.3627E-2	2.73075E1	-3.26675E1	-3.26146E1	2.70304E1	1.19991E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.00852E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.20041E-1	-7.98845E-1	-9.13053E0	-9.14164E0	4.48227E-3	9.36985E-2	2.73369E1	-3.26738E1	-3.26413E1	2.69187E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.20041E-1	-7.98845E-1	-9.13067E0	-9.14152E0	4.673E-3	9.36031E-2	2.73265E1	-3.2666E1	-3.26063E1	2.68945E1	1.20031E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.01742E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.20041E-1	-7.98845E-1	-9.13053E0	-9.1418E0	4.81606E-3	9.35793E-2	2.72745E1	-3.26855E1	-3.2647E1	2.68022E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.19707E-1	-7.98702E-1	-9.13067E0	-9.14152E0	4.93526E-3	9.34124E-2	2.73081E1	-3.26723E1	-3.26206E1	2.6607E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.19707E-1	-7.98655E-1	-9.13053E0	-9.14159E0	4.81606E-3	9.36747E-2	2.72991E1	-3.26224E1	-3.2614E1	2.66244E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.1985E-1	-7.98893E-1	-9.13074E0	-9.14216E0	4.88758E-3	9.34124E-2	2.73207E1	-3.26585E1	-3.26392E1	2.68292E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.1954E-1	-7.98869E-1	-9.13076E0	-9.14207E0	5.17368E-3	9.35555E-2	2.72709E1	-3.26627E1	-3.26152E1	2.67944E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.19707E-1	-7.9875E-1	-9.13036E0	-9.14183E0	5.22137E-3	9.35793E-2	2.7253E1	-3.26446E1	-3.26272E1	2.688E1	1.20122E-7	2.51662E-3	2.51662E-3	6.36244E-3	3.02659E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.19731E-1	-7.98678E-1	-9.1306E0	-9.14164E0	4.95911E-3	9.37462E-2	2.73267E1	-3.26693E1	-3.26158E1	2.67583E1	1.19991E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.006E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.19612E-1	-7.9875E-1	-9.13048E0	-9.14183E0	5.07832E-3	9.39608E-2	2.731E1	-3.26707E1	-3.26058E1	2.68731E1	1.19872E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.00144E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.19683E-1	-7.98655E-1	-9.13055E0	-9.14176E0	4.79221E-3	9.3627E-2	2.72538E1	-3.26685E1	-3.26242E1	2.68603E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.19731E-1	-7.98869E-1	-9.1305E0	-9.14159E0	4.74453E-3	9.33647E-2	2.73069E1	-3.26673E1	-3.26248E1	2.70358E1	1.19953E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.19659E-1	-7.98893E-1	-9.13036E0	-9.1418E0	5.10216E-3	9.3627E-2	2.73213E1	-3.26597E1	-3.2596E1	2.69025E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.19612E-1	-7.98798E-1	-9.13057E0	-9.14176E0	4.88758E-3	9.35793E-2	2.73243E1	-3.26897E1	-3.26248E1	2.69229E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.19468E-1	-7.98988E-1	-9.13069E0	-9.14161E0	4.8399E-3	9.3317E-2	2.72756E1	-3.26437E1	-3.26172E1	2.66657E1	1.20069E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01347E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.19278E-1	-7.98869E-1	-9.13045E0	-9.14197E0	5.05447E-3	9.34839E-2	2.72648E1	-3.26458E1	-3.26488E1	2.66268E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.19206E-1	-7.99179E-1	-9.13076E0	-9.14164E0	4.98295E-3	9.33409E-2	2.72979E1	-3.26669E1	-3.2605E1	2.67421E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.0041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.19492E-1	-7.98893E-1	-9.13072E0	-9.14178E0	4.91142E-3	9.32932E-2	2.7265E1	-3.26561E1	-3.26154E1	2.68286E1	1.20174E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.19373E-1	-7.98774E-1	-9.13069E0	-9.14154E0	4.88758E-3	9.35078E-2	2.73045E1	-3.26657E1	-3.26681E1	2.66412E1	1.19953E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.99686E-1
