[Scan]
initial_time=2016-01-28T19:38:01
final_time=2016-01-28T19:38:24
ip_count=19
run=1026
dataset=6
scan=412
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08844E-4
ql1_vset=
ql1_vmon=-8.17633E-1
ql1_imon=1.4008E-8
ql2_vset=
ql2_vmon=-7.99084E-1
ql2_imon=2.0041E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=1.16642E-9
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-1.90246E-10
mult1=-9.96598E-9
mult2=-2.63244E-9
rf_tmon=-5.15213E-3
rf_agc=3.38609E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.70807E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66687E0
bslens_imon=2.53466E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.97732E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12449E2
lens4a_imon=2.04958E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53795E1
cs_ef1b_imon=3.10103E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04756E1
cs_ea1_imon=1.264E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39168E0
lens1_imon=2.53119E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64811E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03945E1
cs_ea2_imon=1.40305E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84481E1
cs_ef1a_imon=3.01032E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.22142E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.2986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15236E1
os_ea1_imon=2.44417E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63734E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24341E0
cs_ionrep_imon=9.72346E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93497E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01792E1
cs_anode1_imon=2.04594E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.1979E-8
tplens_vset=1.4E-1
tplens_vmon=1.60667E0
tplens_imon=-2.70635E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26444E1
iondef3_imon=1.50003E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26884E1
iondef2_imon=1.57199E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98561E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.93453E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25905E0
ionrepsh_imon=9.19507E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33843E1
lens5b_imon=2.18589E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.746E1
cs_ef2b_imon=3.12396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50123E0
os_ea2_imon=-6.3216E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.0056E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71374E1
cs_ef2a_imon=3.19521E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04645E0
os_ef2alow_imon=-2.63366E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85647E-1
os_ef2bup_imon=-5.30961E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10759E1
os_restr2_imon=3.38183E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.31353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.10467E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72525E1
iondef1_imon=1.09297E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67372E1
iondef4_imon=1.07808E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.10212E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=7.54137E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11161E0
cs_ionaccel_imon=-9.5859E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.4715E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56133E1
einzel_imon=7.72954E-6
window_vset=0.0E0
window_vmon=1.91621E-1
window_imon=-1.04547E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86651E1
mask2_imon=-6.8752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.38744E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.50797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.23102E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=6.17773E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33289E1
os_fil1_imon=9.40098E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07625E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6197E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30661E1
cs_fil1_imon=9.25333E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30189E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6445E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93414E-2
os_fil2_imon=-2.37379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.31832E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.53597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20572E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21951E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30212E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20142E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.37196E-1
res40_imon=-2.62324E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=189
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.17776E-1	-7.98702E-1	-9.13069E0	-9.14195E0	4.8399E-3	9.34124E-2	2.72991E1	-3.26735E1	-3.26416E1	2.68316E1	1.19991E-7	2.52236E-3	2.52236E-3	6.31798E-3	3.01104E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.17895E-1	-7.99036E-1	-9.13119E0	-9.14211E0	4.48227E-3	9.36031E-2	2.7272E1	-3.26805E1	-3.26352E1	2.68653E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.03185E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.178E-1	-7.98917E-1	-9.13088E0	-9.14209E0	4.86374E-3	9.39131E-2	2.73523E1	-3.26561E1	-3.26555E1	2.67451E1	1.20031E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.01475E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.17776E-1	-7.98774E-1	-9.13107E0	-9.14199E0	4.69685E-3	9.36747E-2	2.72845E1	-3.26402E1	-3.2613E1	2.69157E1	1.1979E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17823E-1	-7.98631E-1	-9.13105E0	-9.14164E0	4.95911E-3	9.36508E-2	2.73051E1	-3.26591E1	-3.26362E1	2.67349E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17728E-1	-7.98297E-1	-9.13112E0	-9.14168E0	5.14984E-3	9.37223E-2	2.72654E1	-3.26603E1	-3.26128E1	2.69121E1	1.19913E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01609E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.17585E-1	-7.98464E-1	-9.13093E0	-9.14176E0	4.72069E-3	9.36985E-2	2.73498E1	-3.26603E1	-3.2626E1	2.69086E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.03712E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.17561E-1	-7.98607E-1	-9.13086E0	-9.14164E0	4.88758E-3	9.3627E-2	2.73151E1	-3.26455E1	-3.26178E1	2.67497E1	1.20031E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.00144E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.17752E-1	-7.98583E-1	-9.13119E0	-9.14185E0	4.81606E-3	9.36985E-2	2.72961E1	-3.26633E1	-3.2602E1	2.67698E1	1.19902E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.17919E-1	-7.98678E-1	-9.13134E0	-9.14183E0	4.36306E-3	9.36031E-2	2.72644E1	-3.26655E1	-3.26331E1	2.68833E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17704E-1	-7.98607E-1	-9.13122E0	-9.14209E0	4.52995E-3	9.3627E-2	2.73099E1	-3.26392E1	-3.26134E1	2.66953E1	1.19749E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.17919E-1	-7.98941E-1	-9.13134E0	-9.14152E0	4.48227E-3	9.34839E-2	2.72426E1	-3.27021E1	-3.26514E1	2.68372E1	1.20122E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.178E-1	-7.98845E-1	-9.13122E0	-9.14202E0	4.45843E-3	9.3627E-2	2.73381E1	-3.26543E1	-3.26325E1	2.69301E1	1.19941E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.01356E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.17847E-1	-7.98821E-1	-9.13117E0	-9.14202E0	4.33922E-3	9.39131E-2	2.73177E1	-3.26609E1	-3.25701E1	2.66605E1	1.19913E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00302E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.17871E-1	-7.99036E-1	-9.13112E0	-9.14204E0	4.673E-3	9.408E-2	2.72809E1	-3.26885E1	-3.2649E1	2.68707E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.9841E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.17966E-1	-7.98965E-1	-9.13129E0	-9.14207E0	4.93526E-3	9.37939E-2	2.72906E1	-3.26741E1	-3.26208E1	2.67908E1	1.19913E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9926E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.17895E-1	-7.99322E-1	-9.13122E0	-9.14183E0	4.86374E-3	9.33647E-2	2.73167E1	-3.26805E1	-3.26187E1	2.69205E1	1.1939E-7	2.51919E-3	2.51919E-3	6.26527E-3	3.00097E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.17657E-1	-7.9906E-1	-9.13124E0	-9.14187E0	4.55379E-3	9.36747E-2	2.73564E1	-3.26632E1	-3.26242E1	2.68036E1	1.20031E-7	2.51248E-3	2.51248E-3	6.31299E-3	3.01475E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.17609E-1	-7.99108E-1	-9.13141E0	-9.14195E0	4.673E-3	9.39369E-2	2.73358E1	-3.26697E1	-3.25912E1	2.6771E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.17633E-1	-7.99084E-1	-9.13126E0	-9.14176E0	4.41074E-3	9.36031E-2	2.72525E1	-3.26884E1	-3.26444E1	2.67372E1	1.20142E-7	2.52025E-3	2.52025E-3	6.30212E-3	3.01609E-1
