[Scan]
initial_time=2016-01-28T19:39:35
final_time=2016-01-28T19:39:58
ip_count=19
run=1026
dataset=6
scan=415
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08833E-4
ql1_vset=
ql1_vmon=-8.17537E-1
ql1_imon=1.39091E-8
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=1.94228E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=9.35066E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-1.51825E-10
mult1=-9.7949E-9
mult2=-2.80949E-9
rf_tmon=-3.72491E-3
rf_agc=3.45066E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.70546E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65619E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.98687E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.0883E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05082E1
cs_ea1_imon=1.22802E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39026E0
lens1_imon=2.57865E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64416E1
os_ef1alow_imon=2.95639E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04127E1
cs_ea2_imon=1.40959E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=3.00973E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.23149E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15831E1
os_ea1_imon=2.41832E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=9.60792E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.05432E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.20676E-8
tplens_vset=1.4E-1
tplens_vmon=1.63966E0
tplens_imon=-1.50232E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25894E1
iondef3_imon=1.5094E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26832E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98318E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.98197E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.35769E0
ionrepsh_imon=9.53005E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7485E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4975E0
os_ea2_imon=-7.0238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07798E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.37914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23019E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.10333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72373E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.07764E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.07375E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.56231E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.14188E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.55449E-6
window_vset=0.0E0
window_vmon=2.20346E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86728E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92587E3
multa_neg_imon=7.78512E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.71622E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.39225E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35831E0
defgridb_imon=6.10036E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.41051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06957E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62385E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30605E1
cs_fil1_imon=9.25427E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33587E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6415E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06123E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.18724E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21886E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06744E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.17347E-1	-7.98988E-1	-9.13148E0	-9.14183E0	4.95911E-3	9.39608E-2	2.7301E1	-3.26726E1	-3.2639E1	2.69148E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.17466E-1	-7.99012E-1	-9.13165E0	-9.14216E0	4.81606E-3	9.37939E-2	2.73014E1	-3.2686E1	-3.26334E1	2.68126E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.1737E-1	-7.9906E-1	-9.13117E0	-9.14192E0	4.79221E-3	9.377E-2	2.73219E1	-3.26671E1	-3.26167E1	2.68806E1	1.19861E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.02396E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.17585E-1	-7.98821E-1	-9.13126E0	-9.14168E0	4.95911E-3	9.35555E-2	2.72997E1	-3.26753E1	-3.26086E1	2.67583E1	1.20042E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.17442E-1	-7.99036E-1	-9.13136E0	-9.14147E0	4.98295E-3	9.3627E-2	2.72296E1	-3.26697E1	-3.26231E1	2.68424E1	1.20084E-7	2.5147E-3	2.5147E-3	6.32978E-3	2.98554E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.17347E-1	-7.99084E-1	-9.13119E0	-9.14133E0	4.76837E-3	9.36508E-2	2.72919E1	-3.26717E1	-3.26579E1	2.67421E1	1.19953E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.17657E-1	-7.99179E-1	-9.13129E0	-9.14171E0	5.19753E-3	9.3627E-2	2.73261E1	-3.26789E1	-3.25803E1	2.68412E1	1.19809E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01085E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.17537E-1	-7.99155E-1	-9.13155E0	-9.14173E0	5.126E-3	9.36747E-2	2.72732E1	-3.26378E1	-3.26189E1	2.67746E1	1.198E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.17657E-1	-7.98917E-1	-9.13131E0	-9.14178E0	4.79221E-3	9.34839E-2	2.73069E1	-3.26374E1	-3.26152E1	2.69163E1	1.19783E-7	2.51607E-3	2.51607E-3	6.32661E-3	2.9913E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.178E-1	-7.99012E-1	-9.13136E0	-9.14161E0	4.673E-3	9.34839E-2	2.72811E1	-3.26573E1	-3.26158E1	2.6673E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.17633E-1	-7.98917E-1	-9.13169E0	-9.14178E0	4.88758E-3	9.35555E-2	2.73123E1	-3.26855E1	-3.26356E1	2.68971E1	1.19809E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.9978E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09734E0	-8.178E-1	-7.99108E-1	-9.13138E0	-9.14173E0	4.86374E-3	9.35316E-2	2.73509E1	-3.26915E1	-3.2659E1	2.68696E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.178E-1	-7.9906E-1	-9.13112E0	-9.1418E0	4.55379E-3	9.35793E-2	2.73118E1	-3.26364E1	-3.26174E1	2.66508E1	1.19991E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.00348E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.17752E-1	-7.98869E-1	-9.13124E0	-9.14185E0	4.72069E-3	9.33409E-2	2.72496E1	-3.26756E1	-3.26178E1	2.68953E1	1.19766E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.0201E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.17752E-1	-7.9875E-1	-9.13117E0	-9.14173E0	4.98295E-3	9.36985E-2	2.72603E1	-3.26691E1	-3.2626E1	2.68522E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.01995E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.17704E-1	-7.98917E-1	-9.13126E0	-9.1419E0	4.93526E-3	9.35555E-2	2.72721E1	-3.26512E1	-3.26657E1	2.6816E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01738E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.17823E-1	-7.98893E-1	-9.13148E0	-9.1419E0	4.8399E-3	9.377E-2	2.73517E1	-3.26626E1	-3.26531E1	2.68424E1	1.19757E-7	2.51007E-3	2.51007E-3	6.32936E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.1768E-1	-7.98655E-1	-9.13134E0	-9.14152E0	4.41074E-3	9.35078E-2	2.72907E1	-3.26705E1	-3.26314E1	2.68304E1	1.19697E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9841E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09657E0	-8.1749E-1	-7.9906E-1	-9.13131E0	-9.14178E0	4.45843E-3	9.36508E-2	2.72898E1	-3.26632E1	-3.2636E1	2.67416E1	1.20174E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.17537E-1	-7.98965E-1	-9.13129E0	-9.14195E0	4.55379E-3	9.36747E-2	2.72373E1	-3.26832E1	-3.25894E1	2.68514E1	1.19851E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99941E-1
