[Scan]
initial_time=2016-01-28T19:40:07
final_time=2016-01-28T19:40:30
ip_count=19
run=1026
dataset=6
scan=416
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=1.39126E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=1.99882E-9
ql3_vset=
ql3_vmon=-9.13074E0
ql3_imon=8.44824E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-1.07479E-10
mult1=-9.30177E-9
mult2=-2.78933E-9
rf_tmon=-4.49504E-3
rf_agc=3.30596E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.68531E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66144E0
bslens_imon=2.53139E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20146E1
lens5a_imon=2.00095E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53729E1
cs_ef1b_imon=3.09403E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02239E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04848E1
cs_ea1_imon=1.24022E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39419E0
lens1_imon=2.68025E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64621E1
os_ef1alow_imon=2.97493E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03951E1
cs_ea2_imon=1.39061E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84375E1
cs_ef1a_imon=3.01502E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.23899E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11169E1
os_restr1_imon=4.29402E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=2.41777E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63681E1
os_ef1bup_imon=3.08236E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27882E0
cs_ionrep_imon=9.52415E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01912E1
cs_anode1_imon=2.0439E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.21987E-8
tplens_vset=1.4E-1
tplens_vmon=1.63316E0
tplens_imon=-1.78686E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26382E1
iondef3_imon=1.50817E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26671E1
iondef2_imon=1.58986E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98449E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.94878E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25719E0
ionrepsh_imon=9.25696E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33671E1
lens5b_imon=2.1792E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.1279E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49448E0
os_ea2_imon=-7.24518E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71031E1
cs_ef2a_imon=3.18434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07661E0
os_ef2alow_imon=-2.66563E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76449E-1
os_ef2bup_imon=-5.26568E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.39646E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.326E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.1015E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72732E1
iondef1_imon=1.09326E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67364E1
iondef4_imon=1.09029E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.15655E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.66227E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13144E0
cs_ionaccel_imon=-1.00752E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56282E1
einzel_imon=7.67227E-6
window_vset=0.0E0
window_vmon=1.83489E-1
window_imon=-1.15543E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39224E-4
mask2_vset=0.0E0
mask2_vmon=-1.86759E1
mask2_imon=-6.10508E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.65763E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.43619E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46826E0
defgridb_imon=6.11556E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33314E1
os_fil1_imon=9.42745E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06953E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62895E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3051E1
cs_fil1_imon=9.25755E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.27835E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64428E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07143E-2
os_fil2_imon=-2.68471E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91467E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.89133E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33567E-1
cs_fil2_imon=-2.35386E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.67551E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21807E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.85433E-1
res40_imon=-2.50216E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.17323E-1	-7.98702E-1	-9.1315E0	-9.14164E0	4.43459E-3	9.38892E-2	2.71346E1	-3.26673E1	-3.26408E1	2.70549E1	1.20005E-7	2.52222E-3	2.52222E-3	6.31902E-3	2.98435E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.17323E-1	-7.98607E-1	-9.13148E0	-9.14171E0	4.60148E-3	9.39846E-2	2.73314E1	-3.2694E1	-3.25899E1	2.68124E1	1.19902E-7	2.52061E-3	2.52061E-3	6.28056E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.17561E-1	-7.98798E-1	-9.13079E0	-9.14192E0	4.69685E-3	9.38177E-2	2.72974E1	-3.27033E1	-3.26154E1	2.6849E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9874E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.1737E-1	-7.98774E-1	-9.13105E0	-9.14199E0	4.45843E-3	9.37462E-2	2.72148E1	-3.27068E1	-3.25942E1	2.66959E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.1737E-1	-7.98988E-1	-9.13131E0	-9.1419E0	4.48227E-3	9.35793E-2	2.73327E1	-3.27035E1	-3.2596E1	2.68803E1	1.2054E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.17251E-1	-7.98702E-1	-9.13112E0	-9.14187E0	4.88758E-3	9.35078E-2	2.71957E1	-3.26627E1	-3.26458E1	2.68376E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.17275E-1	-7.98965E-1	-9.13055E0	-9.14173E0	4.93526E-3	9.36985E-2	2.73375E1	-3.26272E1	-3.26337E1	2.66118E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.17251E-1	-7.98869E-1	-9.13064E0	-9.14159E0	4.86374E-3	9.35078E-2	2.72582E1	-3.2647E1	-3.25936E1	2.66394E1	1.19902E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.1737E-1	-7.98655E-1	-9.13098E0	-9.14164E0	4.72069E-3	9.35555E-2	2.73147E1	-3.26687E1	-3.26044E1	2.67752E1	1.20209E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.17323E-1	-7.98893E-1	-9.13107E0	-9.14142E0	4.79221E-3	9.35316E-2	2.73496E1	-3.26687E1	-3.26494E1	2.6786E1	1.20031E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.02813E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16917E-1	-7.98583E-1	-9.13091E0	-9.14171E0	4.74453E-3	9.35078E-2	2.72276E1	-3.26687E1	-3.26266E1	2.67974E1	1.20174E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16965E-1	-7.98583E-1	-9.13086E0	-9.14183E0	4.57764E-3	9.35078E-2	2.73263E1	-3.26366E1	-3.2626E1	2.69445E1	1.19882E-7	2.51755E-3	2.51755E-3	6.32099E-3	3.00249E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.17275E-1	-7.98607E-1	-9.13105E0	-9.1418E0	4.673E-3	9.36985E-2	2.7318E1	-3.2675E1	-3.25936E1	2.68569E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0965E0	-8.1718E-1	-7.98798E-1	-9.13095E0	-9.14168E0	4.64916E-3	9.38892E-2	2.72921E1	-3.26933E1	-3.2636E1	2.66803E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.17037E-1	-7.99108E-1	-9.13115E0	-9.14154E0	4.72069E-3	9.38416E-2	2.72959E1	-3.26848E1	-3.26517E1	2.68995E1	1.19749E-7	2.52707E-3	2.52707E-3	6.30202E-3	2.99686E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.17251E-1	-7.98941E-1	-9.13115E0	-9.14156E0	4.48227E-3	9.35078E-2	2.73316E1	-3.26537E1	-3.26036E1	2.6825E1	1.20137E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.99613E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.1718E-1	-7.9875E-1	-9.13095E0	-9.14197E0	4.48227E-3	9.35793E-2	2.72473E1	-3.26178E1	-3.2685E1	2.688E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17418E-1	-7.98798E-1	-9.13086E0	-9.14173E0	4.45843E-3	9.36747E-2	2.72898E1	-3.26756E1	-3.25905E1	2.68313E1	1.19697E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-8.1718E-1	-7.98702E-1	-9.13093E0	-9.14161E0	4.45843E-3	9.37223E-2	2.72066E1	-3.26638E1	-3.26001E1	2.6825E1	1.19705E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16965E-1	-7.98869E-1	-9.13074E0	-9.1418E0	4.50611E-3	9.34839E-2	2.72732E1	-3.26671E1	-3.26382E1	2.67364E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00824E-1
