[Scan]
initial_time=2016-01-28T19:41:09
final_time=2016-01-28T19:41:31
ip_count=19
run=1026
dataset=6
scan=418
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08882E-4
ql1_vset=
ql1_vmon=-8.17347E-1
ql1_imon=1.3923E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.00309E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=7.58779E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-1.9083E-10
mult1=-9.51118E-9
mult2=-2.68798E-9
rf_tmon=-4.99319E-3
rf_agc=3.22532E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.7128E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70215E0
bslens_imon=2.52376E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19586E1
lens5a_imon=1.9811E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.04894E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53596E1
cs_ef1b_imon=3.10492E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02235E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05115E1
cs_ea1_imon=1.24862E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40946E0
lens1_imon=2.7795E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.96449E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03957E1
cs_ea2_imon=1.40702E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84372E1
cs_ef1a_imon=3.00837E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.18505E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11403E1
os_restr1_imon=4.2997E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=2.44296E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63499E1
os_ef1bup_imon=3.08813E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24319E0
cs_ionrep_imon=9.56232E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93397E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0193E1
cs_anode1_imon=2.02538E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.15222E-8
tplens_vset=1.4E-1
tplens_vmon=1.66561E0
tplens_imon=-2.6266E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26608E1
iondef3_imon=1.50512E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26862E1
iondef2_imon=1.57115E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98403E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.96963E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33162E0
ionrepsh_imon=9.33712E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33499E1
lens5b_imon=2.196E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.13277E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48239E0
os_ea2_imon=-9.07735E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00489E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71385E1
cs_ef2a_imon=3.1736E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05933E0
os_ef2alow_imon=-2.50842E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78344E-1
os_ef2bup_imon=-5.29025E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10742E1
os_restr2_imon=3.37356E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.30539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01904E1
cs_anode2_imon=2.09483E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73782E1
iondef1_imon=1.10128E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68943E1
iondef4_imon=1.08932E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.02193E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.33158E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14413E0
cs_ionaccel_imon=-1.10033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47322E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56481E1
einzel_imon=7.50086E-6
window_vset=0.0E0
window_vmon=2.26635E-1
window_imon=-1.08506E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39191E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.75306E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.67285E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.21486E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24216E0
defgridb_imon=6.07358E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.40722E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06998E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61544E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3057E1
cs_fil1_imon=9.25325E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35081E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61428E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.19434E-2
os_fil2_imon=-2.66067E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93121E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.85215E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33422E-1
cs_fil2_imon=-2.03739E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19982E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21654E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=3.02769E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40061E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91551E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=224
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.17156E-1	-7.98655E-1	-9.13098E0	-9.14166E0	4.76837E-3	9.36031E-2	2.72603E1	-3.26361E1	-3.26456E1	2.67182E1	1.20019E-7	2.52502E-3	2.52502E-3	6.31332E-3	3.00761E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.17227E-1	-7.98869E-1	-9.13126E0	-9.14156E0	4.88758E-3	9.3627E-2	2.74196E1	-3.26775E1	-3.26534E1	2.6646E1	1.1987E-7	2.51549E-3	2.51549E-3	6.28703E-3	3.00149E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09727E0	-8.17275E-1	-7.98965E-1	-9.13124E0	-9.14209E0	4.76837E-3	9.377E-2	2.72898E1	-3.27015E1	-3.25824E1	2.66815E1	1.201E-7	2.51725E-3	2.51725E-3	6.3074E-3	2.9944E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.1737E-1	-7.99251E-1	-9.13153E0	-9.14173E0	4.48227E-3	9.377E-2	2.72644E1	-3.26909E1	-3.26207E1	2.68597E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.17323E-1	-7.9906E-1	-9.1311E0	-9.14171E0	4.673E-3	9.37223E-2	2.72843E1	-3.2648E1	-3.25874E1	2.66286E1	1.20158E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.1718E-1	-7.99179E-1	-9.13103E0	-9.14211E0	4.60148E-3	9.34362E-2	2.72974E1	-3.26272E1	-3.26284E1	2.68268E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.17275E-1	-7.98893E-1	-9.13069E0	-9.14209E0	4.36306E-3	9.3627E-2	2.72697E1	-3.26638E1	-3.26396E1	2.68511E1	1.19953E-7	2.52492E-3	2.52492E-3	6.35059E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.17585E-1	-7.99084E-1	-9.13093E0	-9.14192E0	4.72069E-3	9.3627E-2	2.73213E1	-3.26944E1	-3.26249E1	2.69594E1	1.20226E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09364E0	-8.17418E-1	-7.98798E-1	-9.13112E0	-9.14211E0	4.41074E-3	9.37223E-2	2.72837E1	-3.26487E1	-3.26468E1	2.6676E1	1.19841E-7	2.51287E-3	2.51287E-3	6.33388E-3	3.02621E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.17466E-1	-7.98798E-1	-9.13115E0	-9.14195E0	4.8399E-3	9.35555E-2	2.72799E1	-3.26717E1	-3.26434E1	2.692E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.17513E-1	-7.98965E-1	-9.13117E0	-9.14168E0	4.88758E-3	9.3627E-2	2.73249E1	-3.26759E1	-3.26392E1	2.69641E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.17561E-1	-7.99084E-1	-9.13095E0	-9.14183E0	4.673E-3	9.3627E-2	2.72907E1	-3.26675E1	-3.26134E1	2.67781E1	1.20174E-7	2.52099E-3	2.52099E-3	6.28552E-3	2.98481E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.17537E-1	-7.99251E-1	-9.1311E0	-9.14161E0	4.62532E-3	9.37223E-2	2.73027E1	-3.26795E1	-3.26452E1	2.67951E1	1.19705E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17347E-1	-7.99251E-1	-9.13165E0	-9.14178E0	4.72069E-3	9.33409E-2	2.72833E1	-3.26667E1	-3.2636E1	2.67746E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.17442E-1	-7.99012E-1	-9.13122E0	-9.14183E0	4.64916E-3	9.35316E-2	2.72805E1	-3.26603E1	-3.26152E1	2.66334E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.17204E-1	-7.98917E-1	-9.13134E0	-9.14178E0	5.05447E-3	9.34601E-2	2.72636E1	-3.26729E1	-3.2587E1	2.66322E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01223E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09665E0	-8.1706E-1	-7.98798E-1	-9.13112E0	-9.14197E0	4.673E-3	9.33647E-2	2.73472E1	-3.26561E1	-3.26026E1	2.67397E1	1.20084E-7	2.52139E-3	2.52139E-3	6.30182E-3	3.01475E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.17537E-1	-7.98726E-1	-9.13117E0	-9.14183E0	4.50611E-3	9.38416E-2	2.7298E1	-3.26354E1	-3.26425E1	2.68713E1	1.1983E-7	2.51701E-3	2.51701E-3	6.30469E-3	3.00766E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.17442E-1	-7.98869E-1	-9.13124E0	-9.14176E0	4.88758E-3	9.35078E-2	2.73039E1	-3.26741E1	-3.25731E1	2.68294E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.17347E-1	-7.98535E-1	-9.13103E0	-9.14195E0	4.93526E-3	9.35078E-2	2.73782E1	-3.26862E1	-3.26608E1	2.68943E1	1.19902E-7	2.52384E-3	2.52384E-3	6.35059E-3	3.02769E-1
