[Scan]
initial_time=2016-01-28T19:41:39
final_time=2016-01-28T19:42:00
ip_count=19
run=1026
dataset=6
scan=419
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-8.16846E-1
ql1_imon=1.39346E-8
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=2.01331E-9
ql3_vset=
ql3_vmon=-9.13091E0
ql3_imon=7.20656E-10
ql4_vset=
ql4_vmon=-9.14152E0
ql4_imon=-1.86133E-10
mult1=-9.97222E-9
mult2=-2.72718E-9
rf_tmon=-4.43869E-3
rf_agc=3.34566E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.72023E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68094E0
bslens_imon=2.45521E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19806E1
lens5a_imon=1.99038E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04778E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53871E1
cs_ef1b_imon=3.08753E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02431E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04856E1
cs_ea1_imon=1.22363E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43414E0
lens1_imon=2.9677E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64581E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03472E1
cs_ea2_imon=1.40836E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84347E1
cs_ef1a_imon=2.99468E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.19203E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11049E1
os_restr1_imon=4.30265E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15511E1
os_ea1_imon=2.43493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63858E1
os_ef1bup_imon=3.07658E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22627E0
cs_ionrep_imon=9.62612E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93253E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01781E1
cs_anode1_imon=2.04391E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.15116E-8
tplens_vset=1.4E-1
tplens_vmon=1.63614E0
tplens_imon=-1.3109E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26148E1
iondef3_imon=1.48861E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26697E1
iondef2_imon=1.58118E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98449E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.94155E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.35539E0
ionrepsh_imon=9.21295E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33367E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74758E1
cs_ef2b_imon=3.11875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48583E0
os_ea2_imon=-8.34277E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00575E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7119E1
cs_ef2a_imon=3.19538E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.67131E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94045E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10887E1
os_restr2_imon=3.37215E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22997E2
cs_ionfoca_imon=6.29849E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.10757E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73139E1
iondef1_imon=1.07941E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67806E1
iondef4_imon=1.08057E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.0148E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.37973E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12136E0
cs_ionaccel_imon=-9.60327E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.46999E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56236E1
einzel_imon=7.70406E-6
window_vset=0.0E0
window_vmon=1.81678E-1
window_imon=-1.19954E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39194E-4
mask2_vset=0.0E0
mask2_vmon=-1.86709E1
mask2_imon=-8.2653E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.49272E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.86502E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.27819E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48522E0
defgridb_imon=6.19759E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.42981E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07248E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61676E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30574E1
cs_fil1_imon=9.24858E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28316E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61864E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35877E-2
os_fil2_imon=-2.72904E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06198E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.70612E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34459E-1
cs_fil2_imon=-2.73579E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21718E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.0284E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.17227E-1	-7.98631E-1	-9.13124E0	-9.14176E0	4.76837E-3	9.35078E-2	2.73016E1	-3.26915E1	-3.26242E1	2.67433E1	1.19895E-7	2.50949E-3	2.50949E-3	6.33648E-3	3.0286E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.16941E-1	-7.9875E-1	-9.13086E0	-9.14211E0	4.8399E-3	9.3627E-2	2.73051E1	-3.26591E1	-3.26505E1	2.70234E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.04063E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.17013E-1	-7.98965E-1	-9.13124E0	-9.14176E0	5.03063E-3	9.34362E-2	2.73093E1	-3.26524E1	-3.26296E1	2.68059E1	1.19829E-7	2.51045E-3	2.51045E-3	6.3245E-3	3.02972E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.17037E-1	-7.98464E-1	-9.13103E0	-9.14197E0	4.88758E-3	9.38177E-2	2.73393E1	-3.26703E1	-3.26372E1	2.6828E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.17132E-1	-7.98607E-1	-9.13117E0	-9.14211E0	4.8399E-3	9.39131E-2	2.72775E1	-3.26432E1	-3.26125E1	2.68406E1	1.19851E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.17251E-1	-7.98655E-1	-9.13119E0	-9.1423E0	5.05447E-3	9.39131E-2	2.73263E1	-3.2639E1	-3.2629E1	2.68454E1	1.1966E-7	2.52139E-3	2.52139E-3	6.29624E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17132E-1	-7.9875E-1	-9.131E0	-9.14218E0	4.91142E-3	9.34839E-2	2.72823E1	-3.26176E1	-3.26176E1	2.68136E1	1.19861E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.17275E-1	-7.98798E-1	-9.13084E0	-9.14187E0	4.86374E-3	9.34601E-2	2.72943E1	-3.26747E1	-3.26356E1	2.6855E1	1.198E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16989E-1	-7.98678E-1	-9.13079E0	-9.14164E0	5.19753E-3	9.33886E-2	2.73145E1	-3.26437E1	-3.26708E1	2.68989E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.02133E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.17275E-1	-7.9875E-1	-9.13081E0	-9.14178E0	5.17368E-3	9.33409E-2	2.73006E1	-3.26428E1	-3.25936E1	2.67148E1	1.20106E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01223E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.1706E-1	-7.98869E-1	-9.13086E0	-9.14209E0	5.10216E-3	9.34124E-2	2.73229E1	-3.26744E1	-3.26464E1	2.66261E1	1.20028E-7	2.52301E-3	2.52301E-3	6.33341E-3	3.00989E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.17084E-1	-7.9875E-1	-9.13093E0	-9.14178E0	4.74453E-3	9.37462E-2	2.73213E1	-3.26224E1	-3.25996E1	2.66791E1	1.19991E-7	2.51838E-3	2.51838E-3	6.33021E-3	3.01337E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.17084E-1	-7.98631E-1	-9.13084E0	-9.14176E0	4.673E-3	9.34839E-2	2.72967E1	-3.26621E1	-3.26693E1	2.68917E1	1.20031E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.02277E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.17204E-1	-7.98488E-1	-9.13107E0	-9.14216E0	4.48227E-3	9.38654E-2	2.73484E1	-3.26777E1	-3.26074E1	2.67583E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0071E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.17108E-1	-7.98535E-1	-9.13079E0	-9.1419E0	4.52995E-3	9.35555E-2	2.7278E1	-3.26803E1	-3.26024E1	2.69037E1	1.19965E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16965E-1	-7.98464E-1	-9.13067E0	-9.14187E0	4.74453E-3	9.34839E-2	2.73169E1	-3.26779E1	-3.26602E1	2.68157E1	1.20158E-7	2.51417E-3	2.51417E-3	6.3723E-3	3.02253E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16965E-1	-7.98512E-1	-9.13074E0	-9.14168E0	4.95911E-3	9.3174E-2	2.72961E1	-3.26338E1	-3.26122E1	2.66959E1	1.19653E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16751E-1	-7.98821E-1	-9.13067E0	-9.14197E0	4.74453E-3	9.35555E-2	2.73499E1	-3.26508E1	-3.26467E1	2.67752E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17132E-1	-7.98798E-1	-9.13081E0	-9.14152E0	4.64916E-3	9.3627E-2	2.72985E1	-3.26458E1	-3.26314E1	2.68881E1	1.19809E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16846E-1	-7.98893E-1	-9.13091E0	-9.14152E0	4.86374E-3	9.3627E-2	2.73139E1	-3.26697E1	-3.26148E1	2.67806E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9841E-1
