[Scan]
initial_time=2016-01-28T19:42:08
final_time=2016-01-28T19:42:29
ip_count=19
run=1026
dataset=6
scan=420
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=1.39441E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.9977E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=6.8419E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-1.87647E-10
mult1=-9.44109E-9
mult2=-2.76046E-9
rf_tmon=-5.64798E-3
rf_agc=3.22542E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.68374E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61539E0
bslens_imon=2.6022E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19926E1
lens5a_imon=1.96972E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12422E2
lens4a_imon=2.05168E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53621E1
cs_ef1b_imon=3.10172E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0514E1
cs_ea1_imon=1.22998E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3719E0
lens1_imon=2.52274E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65081E1
os_ef1alow_imon=2.96468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.40558E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84293E1
cs_ef1a_imon=2.99914E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.18637E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1115E1
os_restr1_imon=4.30387E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15313E1
os_ea1_imon=2.44129E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63899E1
os_ef1bup_imon=3.08672E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24481E0
cs_ionrep_imon=9.7016E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93412E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01984E1
cs_anode1_imon=2.0508E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.15035E-8
tplens_vset=1.4E-1
tplens_vmon=1.63614E0
tplens_imon=-2.78084E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26324E1
iondef3_imon=1.49974E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26671E1
iondef2_imon=1.56926E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98473E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.97507E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28189E0
ionrepsh_imon=9.17719E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33354E1
lens5b_imon=2.18504E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74643E1
cs_ef2b_imon=3.11997E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45537E0
os_ea2_imon=-6.23718E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00361E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.18362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89991E-1
os_ef2bup_imon=-5.35942E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11008E1
os_restr2_imon=3.35918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.31001E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01727E1
cs_anode2_imon=2.10149E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73341E1
iondef1_imon=1.05796E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67856E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.0406E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.35318E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10446E0
cs_ionaccel_imon=-1.06574E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47198E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5627E1
einzel_imon=7.59864E-6
window_vset=0.0E0
window_vmon=1.6546E-1
window_imon=-1.06574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-7.21114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.73109E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.62268E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.06763E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.20951E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33214E1
os_fil1_imon=9.429E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06207E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61464E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30545E1
cs_fil1_imon=9.25459E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30816E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61522E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37298E-2
os_fil2_imon=-2.64119E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87953E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.78424E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.68174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36597E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21607E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40078E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.13652E-1
res40_imon=-2.50913E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=230
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16965E-1	-7.98845E-1	-9.13126E0	-9.14152E0	4.55379E-3	9.33886E-2	2.7349E1	-3.26675E1	-3.26212E1	2.68476E1	1.19991E-7	2.5199E-3	2.5199E-3	6.3383E-3	3.0102E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.17084E-1	-7.98607E-1	-9.13129E0	-9.14149E0	4.45843E-3	9.35316E-2	2.72925E1	-3.26693E1	-3.2611E1	2.6772E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.1706E-1	-7.98726E-1	-9.13091E0	-9.1418E0	4.62532E-3	9.36031E-2	2.72912E1	-3.26915E1	-3.26393E1	2.6785E1	1.19925E-7	2.51693E-3	2.51693E-3	6.34099E-3	2.99879E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16941E-1	-7.98702E-1	-9.13112E0	-9.14152E0	4.74453E-3	9.35555E-2	2.72889E1	-3.27023E1	-3.2632E1	2.68298E1	1.20177E-7	2.51783E-3	2.51783E-3	6.33863E-3	2.98768E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17013E-1	-7.98941E-1	-9.13117E0	-9.14171E0	4.55379E-3	9.38177E-2	2.73069E1	-3.26699E1	-3.25906E1	2.67145E1	1.19757E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.17347E-1	-7.98893E-1	-9.13105E0	-9.14166E0	4.88758E-3	9.36508E-2	2.72962E1	-3.26661E1	-3.26331E1	2.69866E1	1.19913E-7	2.5199E-3	2.5199E-3	6.36244E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.17275E-1	-7.98607E-1	-9.13098E0	-9.1418E0	4.86374E-3	9.39131E-2	2.73339E1	-3.265E1	-3.26134E1	2.6828E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09356E0	-8.17347E-1	-7.99036E-1	-9.13119E0	-9.1418E0	4.48227E-3	9.377E-2	2.73237E1	-3.265E1	-3.26128E1	2.68827E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.17347E-1	-7.98631E-1	-9.13103E0	-9.1418E0	4.64916E-3	9.37939E-2	2.72019E1	-3.2636E1	-3.2606E1	2.67487E1	1.20209E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.17037E-1	-7.98583E-1	-9.13103E0	-9.14168E0	4.86374E-3	9.36985E-2	2.73658E1	-3.26783E1	-3.26242E1	2.66755E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.98092E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16989E-1	-7.9875E-1	-9.13093E0	-9.1418E0	4.76837E-3	9.3627E-2	2.72737E1	-3.26516E1	-3.26124E1	2.69015E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.17108E-1	-7.99036E-1	-9.131E0	-9.14197E0	4.72069E-3	9.34839E-2	2.73111E1	-3.26657E1	-3.265E1	2.6739E1	1.20002E-7	2.52271E-3	2.52271E-3	6.3168E-3	2.99929E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.17275E-1	-7.98631E-1	-9.13095E0	-9.14207E0	4.74453E-3	9.35078E-2	2.72886E1	-3.26708E1	-3.26762E1	2.68012E1	1.19913E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17537E-1	-7.98464E-1	-9.13119E0	-9.1418E0	4.86374E-3	9.32455E-2	2.73231E1	-3.26597E1	-3.25924E1	2.68184E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9926E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.17132E-1	-7.98416E-1	-9.13126E0	-9.1418E0	4.72069E-3	9.31978E-2	2.72485E1	-3.2652E1	-3.26077E1	2.69199E1	1.20055E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0071E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17204E-1	-7.98488E-1	-9.13136E0	-9.14164E0	4.93526E-3	9.32455E-2	2.73309E1	-3.26549E1	-3.26152E1	2.66767E1	1.19953E-7	2.51739E-3	2.51739E-3	6.28592E-3	3.0148E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17132E-1	-7.98368E-1	-9.13134E0	-9.14164E0	4.93526E-3	9.37223E-2	2.72833E1	-3.26644E1	-3.26773E1	2.68991E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17204E-1	-7.98845E-1	-9.1316E0	-9.14156E0	4.93526E-3	9.377E-2	2.72892E1	-3.26089E1	-3.26172E1	2.66484E1	1.198E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.9892E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.17466E-1	-7.98583E-1	-9.13146E0	-9.1418E0	4.673E-3	9.37939E-2	2.73688E1	-3.26561E1	-3.2629E1	2.68227E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.17299E-1	-7.98559E-1	-9.13143E0	-9.14178E0	4.62532E-3	9.38177E-2	2.73341E1	-3.26671E1	-3.26324E1	2.67856E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
