[Scan]
initial_time=2016-01-28T19:45:03
final_time=2016-01-28T19:45:25
ip_count=19
run=1026
dataset=6
scan=426
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.38511E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.04247E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=5.56874E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-1.53816E-10
mult1=-9.86079E-9
mult2=-2.77849E-9
rf_tmon=-5.2935E-3
rf_agc=3.31533E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.6812E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.98668E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53493E1
cs_ef1b_imon=3.0972E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0476E1
cs_ea1_imon=1.22062E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39058E0
lens1_imon=2.56659E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.96063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.41421E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84191E1
cs_ef1a_imon=3.00893E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.22041E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.29373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1536E1
os_ea1_imon=2.41999E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63809E1
os_ef1bup_imon=3.07948E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=9.67916E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02029E1
cs_anode1_imon=2.04629E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.20853E-8
tplens_vset=1.4E-1
tplens_vmon=1.64444E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26464E1
iondef2_imon=1.56958E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98288E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=3.98457E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=9.24297E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74461E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49844E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71321E1
cs_ef2a_imon=3.19382E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0841E0
os_ef2alow_imon=-2.63714E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08815E-1
os_ef2bup_imon=-5.24358E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10944E1
os_restr2_imon=3.38078E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.31262E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01578E1
cs_anode2_imon=2.1005E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.084E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6818E1
iondef4_imon=1.10102E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.11982E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.51025E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12551E0
cs_ionaccel_imon=-1.03505E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56266E1
einzel_imon=7.58706E-6
window_vset=0.0E0
window_vmon=1.96255E-1
window_imon=-1.17753E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.86639E1
mask2_imon=-5.86738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=6.88533E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.60414E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43465E0
defgridb_imon=5.96606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33245E1
os_fil1_imon=9.42073E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06889E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62038E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30573E1
cs_fil1_imon=9.25357E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.23991E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64038E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.56493E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.23564E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32648E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26943E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21772E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.03185E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.73686E-1
res40_imon=-2.41125E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.16846E-1	-7.98512E-1	-9.13126E0	-9.14214E0	4.8399E-3	9.31978E-2	2.72903E1	-3.26697E1	-3.2639E1	2.66815E1	1.20004E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00966E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16727E-1	-7.98559E-1	-9.13093E0	-9.14197E0	4.91142E-3	9.34839E-2	2.73393E1	-3.2639E1	-3.26349E1	2.67457E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16798E-1	-7.98941E-1	-9.1311E0	-9.14195E0	4.79221E-3	9.3174E-2	2.73369E1	-3.26416E1	-3.26212E1	2.67145E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00966E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16917E-1	-7.98845E-1	-9.131E0	-9.14166E0	4.55379E-3	9.34124E-2	2.72862E1	-3.26726E1	-3.26526E1	2.68777E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09657E0	-8.16751E-1	-7.98774E-1	-9.13095E0	-9.14187E0	4.81606E-3	9.36747E-2	2.7307E1	-3.26666E1	-3.26229E1	2.66236E1	1.20017E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16798E-1	-7.98607E-1	-9.13098E0	-9.14171E0	5.14984E-3	9.37223E-2	2.73558E1	-3.26555E1	-3.26154E1	2.66316E1	1.20122E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.1656E-1	-7.98583E-1	-9.13103E0	-9.14168E0	4.93526E-3	9.36747E-2	2.72709E1	-3.26609E1	-3.25978E1	2.66321E1	1.19959E-7	2.51593E-3	2.51593E-3	6.32644E-3	2.99217E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16798E-1	-7.98678E-1	-9.13153E0	-9.14185E0	4.79221E-3	9.38177E-2	2.73291E1	-3.26609E1	-3.26122E1	2.68899E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.17108E-1	-7.98488E-1	-9.13091E0	-9.14147E0	4.91142E-3	9.35793E-2	2.72797E1	-3.26537E1	-3.26195E1	2.69542E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.97187E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.17347E-1	-7.98273E-1	-9.13119E0	-9.1418E0	5.00679E-3	9.36031E-2	2.72924E1	-3.267E1	-3.26619E1	2.67677E1	1.19965E-7	2.51334E-3	2.51334E-3	6.34588E-3	2.9874E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17108E-1	-7.98512E-1	-9.13091E0	-9.14147E0	5.03063E-3	9.34839E-2	2.72971E1	-3.26829E1	-3.26529E1	2.66198E1	1.19831E-7	2.52093E-3	2.52093E-3	6.31779E-3	3.00741E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16989E-1	-7.98488E-1	-9.1311E0	-9.1418E0	5.19753E-3	9.36747E-2	2.73259E1	-3.26603E1	-3.26229E1	2.69115E1	1.20371E-7	2.52293E-3	2.52293E-3	6.3245E-3	2.9971E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.17108E-1	-7.98512E-1	-9.13126E0	-9.14183E0	5.126E-3	9.36747E-2	2.73196E1	-3.267E1	-3.26602E1	2.69947E1	1.20244E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.99348E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16917E-1	-7.98535E-1	-9.13134E0	-9.14211E0	4.74453E-3	9.35078E-2	2.73069E1	-3.26753E1	-3.26506E1	2.68761E1	1.20243E-7	2.51709E-3	2.51709E-3	6.33388E-3	3.006E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.17132E-1	-7.98631E-1	-9.13112E0	-9.14176E0	5.126E-3	9.35316E-2	2.72455E1	-3.2659E1	-3.26296E1	2.68599E1	1.2033E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.1718E-1	-7.98535E-1	-9.13122E0	-9.14154E0	4.72069E-3	9.35793E-2	2.73219E1	-3.26458E1	-3.26074E1	2.66424E1	1.19902E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.02769E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.17204E-1	-7.98678E-1	-9.13124E0	-9.14164E0	4.91142E-3	9.36747E-2	2.72787E1	-3.26579E1	-3.26543E1	2.68496E1	1.19861E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.1718E-1	-7.98607E-1	-9.13146E0	-9.14178E0	4.673E-3	9.39846E-2	2.74219E1	-3.27346E1	-3.25446E1	2.66958E1	1.19861E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16917E-1	-7.98225E-1	-9.131E0	-9.14187E0	4.673E-3	9.40323E-2	2.72915E1	-3.26555E1	-3.25971E1	2.68665E1	1.20142E-7	2.51603E-3	2.51603E-3	6.32858E-3	2.99343E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.1687E-1	-7.98392E-1	-9.13103E0	-9.14168E0	4.57764E-3	9.38892E-2	2.73123E1	-3.26464E1	-3.26398E1	2.6818E1	1.20226E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.03185E-1
