[Scan]
initial_time=2016-01-28T19:46:31
final_time=2016-01-28T19:46:52
ip_count=19
run=1026
dataset=6
scan=429
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08851E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.38192E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=1.94445E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=4.90344E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=-1.07491E-10
mult1=-9.13289E-9
mult2=-2.70562E-9
rf_tmon=-4.13784E-3
rf_agc=3.38695E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.68983E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.70549E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19687E1
lens5a_imon=1.97965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04882E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53807E1
cs_ef1b_imon=3.10844E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.0191E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05034E1
cs_ea1_imon=1.24548E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40368E0
lens1_imon=2.45521E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64628E1
os_ef1alow_imon=2.98116E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03425E1
cs_ea2_imon=1.4326E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84401E1
cs_ef1a_imon=3.00295E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.22638E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11227E1
os_restr1_imon=4.29714E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1526E1
os_ea1_imon=2.42659E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63733E1
os_ef1bup_imon=3.07963E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23025E0
cs_ionrep_imon=9.66188E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01757E1
cs_anode1_imon=2.04429E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.20147E-8
tplens_vset=1.4E-1
tplens_vmon=1.63945E0
tplens_imon=-4.76724E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26461E1
iondef3_imon=1.51563E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26773E1
iondef2_imon=1.56966E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.96273E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28057E0
ionrepsh_imon=9.44735E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3391E1
lens5b_imon=2.1628E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.1279E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51497E0
os_ea2_imon=-9.13733E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00512E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71219E1
cs_ef2a_imon=3.18005E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07597E0
os_ef2alow_imon=-2.6306E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88126E-1
os_ef2bup_imon=-5.48754E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10741E1
os_restr2_imon=3.38829E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.29253E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01822E1
cs_anode2_imon=2.08399E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72898E1
iondef1_imon=1.10007E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6986E1
iondef4_imon=1.079E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.18727E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.54762E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12755E0
cs_ionaccel_imon=-1.08147E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47164E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56198E1
einzel_imon=7.67616E-6
window_vset=0.0E0
window_vmon=1.75705E-1
window_imon=-1.18657E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86675E1
mask2_imon=-7.35061E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.56026E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.78556E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.27422E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23664E0
defgridb_imon=6.20553E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.39611E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07284E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62979E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3052E1
cs_fil1_imon=9.25579E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31857E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64153E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03186E-2
os_fil2_imon=-2.67822E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8498E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.01575E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37063E-1
cs_fil2_imon=-2.37333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10378E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2183E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.02922E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40078E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.06938E-1
res40_imon=-2.61503E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.16894E-1	-7.98774E-1	-9.13124E0	-9.14154E0	5.00679E-3	9.36747E-2	2.72856E1	-3.26974E1	-3.26107E1	2.67173E1	1.20149E-7	2.51829E-3	2.51829E-3	6.31344E-3	2.99451E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16703E-1	-7.98869E-1	-9.13143E0	-9.14166E0	5.10216E-3	9.38177E-2	2.72901E1	-3.26634E1	-3.2641E1	2.67864E1	1.20243E-7	2.52236E-3	2.52236E-3	6.33388E-3	3.01356E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16751E-1	-7.98917E-1	-9.13122E0	-9.14195E0	5.10216E-3	9.37223E-2	2.73079E1	-3.26687E1	-3.26254E1	2.68325E1	1.19667E-7	2.51838E-3	2.51838E-3	6.33021E-3	3.01609E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16464E-1	-7.98535E-1	-9.13136E0	-9.14166E0	5.03063E-3	9.36508E-2	2.73417E1	-3.26449E1	-3.26213E1	2.67481E1	1.19991E-7	2.51814E-3	2.51814E-3	6.31269E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16298E-1	-7.98416E-1	-9.13126E0	-9.14178E0	4.91142E-3	9.37462E-2	2.73143E1	-3.26309E1	-3.26523E1	2.68893E1	1.20055E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.16441E-1	-7.98321E-1	-9.13138E0	-9.14168E0	5.07832E-3	9.37462E-2	2.73033E1	-3.27003E1	-3.25812E1	2.67752E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16655E-1	-7.98726E-1	-9.131E0	-9.14197E0	5.10216E-3	9.36508E-2	2.72714E1	-3.26621E1	-3.26578E1	2.68743E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16894E-1	-7.98488E-1	-9.13117E0	-9.14156E0	4.72069E-3	9.39369E-2	2.7301E1	-3.26573E1	-3.26289E1	2.67086E1	1.19925E-7	2.5225E-3	2.5225E-3	6.30182E-3	2.97762E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.1687E-1	-7.98225E-1	-9.13131E0	-9.14187E0	4.69685E-3	9.39846E-2	2.72786E1	-3.2659E1	-3.26136E1	2.69026E1	1.20092E-7	2.51919E-3	2.51919E-3	6.33388E-3	3.00097E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16703E-1	-7.9844E-1	-9.13148E0	-9.14171E0	4.88758E-3	9.38177E-2	2.7242E1	-3.26681E1	-3.26633E1	2.68693E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00197E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16751E-1	-7.98631E-1	-9.13107E0	-9.14183E0	4.8399E-3	9.36747E-2	2.73394E1	-3.2705E1	-3.26083E1	2.69217E1	1.20191E-7	2.5225E-3	2.5225E-3	6.3074E-3	2.99879E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.17037E-1	-7.98893E-1	-9.13122E0	-9.14168E0	4.93526E-3	9.36031E-2	2.73338E1	-3.26654E1	-3.25957E1	2.68945E1	1.20122E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16846E-1	-7.98798E-1	-9.13138E0	-9.14178E0	4.76837E-3	9.38416E-2	2.72285E1	-3.26688E1	-3.26322E1	2.6823E1	1.19749E-7	2.52054E-3	2.52054E-3	6.32684E-3	3.0103E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16965E-1	-7.99155E-1	-9.13124E0	-9.14192E0	4.72069E-3	9.34601E-2	2.72919E1	-3.26729E1	-3.26452E1	2.68863E1	1.20126E-7	2.51278E-3	2.51278E-3	6.29482E-3	3.01158E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16679E-1	-7.98941E-1	-9.13117E0	-9.14168E0	4.79221E-3	9.34839E-2	2.73387E1	-3.26621E1	-3.2632E1	2.69361E1	1.19819E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.0041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16631E-1	-7.98774E-1	-9.13126E0	-9.14197E0	4.8399E-3	9.36985E-2	2.72877E1	-3.26669E1	-3.26062E1	2.6959E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00966E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16631E-1	-7.98821E-1	-9.13141E0	-9.1419E0	4.88758E-3	9.36985E-2	2.72294E1	-3.27113E1	-3.26392E1	2.6986E1	1.20191E-7	2.52027E-3	2.52027E-3	6.36349E-3	3.00144E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16441E-1	-7.98678E-1	-9.13122E0	-9.14178E0	4.45843E-3	9.38416E-2	2.72874E1	-3.25965E1	-3.26266E1	2.69872E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16822E-1	-7.98583E-1	-9.13122E0	-9.14199E0	4.72069E-3	9.33886E-2	2.73472E1	-3.26645E1	-3.2635E1	2.69998E1	1.19902E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16798E-1	-7.98702E-1	-9.13115E0	-9.14166E0	4.673E-3	9.33647E-2	2.72898E1	-3.26773E1	-3.26461E1	2.6986E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02922E-1
