[Scan]
initial_time=2016-01-28T19:47:27
final_time=2016-01-28T19:47:47
ip_count=19
run=1026
dataset=6
scan=431
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.0883E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.38733E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=1.9474E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=4.68493E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-1.04308E-10
mult1=-9.43937E-9
mult2=-2.65873E-9
rf_tmon=-4.69267E-3
rf_agc=3.30512E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.71365E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66554E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.10307E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.01998E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=1.23576E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37196E0
lens1_imon=2.56659E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65065E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03774E1
cs_ea2_imon=1.39763E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=2.99495E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.23625E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=2.41819E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6387E1
os_ef1bup_imon=3.06667E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=9.62149E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93297E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.06153E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.22116E-8
tplens_vset=1.4E-1
tplens_vmon=1.60959E0
tplens_imon=-2.92136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2653E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.56273E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.9809E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.97077E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=9.18889E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4726E0
os_ea2_imon=-5.55298E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.00414E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.73123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09437E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.37733E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72835E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66586E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.18384E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.58183E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.12386E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.57612E-6
window_vset=0.0E0
window_vmon=1.6989E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39023E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.20977E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.75555E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.1557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26923E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.39855E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06771E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62699E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30555E1
cs_fil1_imon=9.2434E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28061E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64148E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97053E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.01522E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59272E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21741E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.78513E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.17442E-1	-7.9875E-1	-9.13105E0	-9.14168E0	4.8399E-3	9.34124E-2	2.73961E1	-3.25999E1	-3.2666E1	2.67288E1	1.19913E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.00041E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.1687E-1	-7.98488E-1	-9.13122E0	-9.1418E0	4.95911E-3	9.31263E-2	2.72847E1	-3.26603E1	-3.26212E1	2.68935E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.17227E-1	-7.98631E-1	-9.13126E0	-9.14199E0	5.03063E-3	9.35316E-2	2.73161E1	-3.26776E1	-3.26318E1	2.67462E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.99175E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16917E-1	-7.98416E-1	-9.13103E0	-9.14192E0	4.88758E-3	9.36508E-2	2.73265E1	-3.26389E1	-3.26425E1	2.68442E1	1.20106E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.17013E-1	-7.98559E-1	-9.13122E0	-9.14202E0	4.72069E-3	9.37939E-2	2.72732E1	-3.26679E1	-3.26561E1	2.67848E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.17227E-1	-7.98535E-1	-9.131E0	-9.14195E0	5.05447E-3	9.35555E-2	2.72684E1	-3.26579E1	-3.26056E1	2.67601E1	1.19856E-7	2.51647E-3	2.51647E-3	6.31283E-3	3.01155E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.17013E-1	-7.9875E-1	-9.13105E0	-9.14204E0	4.81606E-3	9.34362E-2	2.73267E1	-3.26363E1	-3.26112E1	2.67618E1					
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17108E-1	-7.98845E-1	-9.13105E0	-9.14197E0	5.17368E-3	9.35078E-2	2.72677E1	-3.26953E1	-3.25948E1	2.68925E1	1.20028E-7	2.51472E-3	2.51472E-3	6.2815E-3	2.99014E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.17037E-1	-7.98726E-1	-9.13112E0	-9.14195E0	4.93526E-3	9.35078E-2	2.7358E1	-3.26458E1	-3.26302E1	2.67873E1	1.1984E-7	2.5199E-3	2.5199E-3	6.32483E-3	3.01193E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.17037E-1	-7.98655E-1	-9.13119E0	-9.14185E0	4.93526E-3	9.34601E-2	2.72757E1	-3.26861E1	-3.26603E1	2.67783E1	1.20055E-7	2.51096E-3	2.51096E-3	6.30202E-3	2.99175E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.17251E-1	-7.98488E-1	-9.13119E0	-9.14183E0	4.95911E-3	9.35793E-2	2.73204E1	-3.26697E1	-3.26543E1	2.68528E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.99879E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16989E-1	-7.98631E-1	-9.13105E0	-9.14178E0	4.98295E-3	9.34124E-2	2.72467E1	-3.26767E1	-3.25888E1	2.68791E1	1.19991E-7	2.51603E-3	2.51603E-3	6.32858E-3	2.99594E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.17013E-1	-7.98535E-1	-9.13119E0	-9.14187E0	4.74453E-3	9.35793E-2	2.73455E1	-3.26995E1	-3.2634E1	2.66586E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16536E-1	-7.98321E-1	-9.13084E0	-9.14145E0	4.76837E-3	9.3627E-2	2.7301E1	-3.26986E1	-3.26455E1	2.68508E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16989E-1	-7.98416E-1	-9.1311E0	-9.14192E0	4.673E-3	9.3627E-2	2.72708E1	-3.26744E1	-3.26217E1	2.6786E1	1.19965E-7	2.51225E-3	2.51225E-3	6.29098E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16751E-1	-7.98631E-1	-9.13117E0	-9.1419E0	4.81606E-3	9.36747E-2	2.72709E1	-3.26756E1	-3.26142E1	2.69307E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16846E-1	-7.98583E-1	-9.13124E0	-9.14156E0	4.98295E-3	9.35793E-2	2.73237E1	-3.26434E1	-3.25749E1	2.68453E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.17299E-1	-7.98631E-1	-9.1311E0	-9.14185E0	4.79221E-3	9.3174E-2	2.73652E1	-3.26549E1	-3.25143E1	2.68508E1	1.2033E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.17227E-1	-7.98535E-1	-9.13117E0	-9.14183E0	4.93526E-3	9.33409E-2	2.73328E1	-3.26585E1	-3.26189E1	2.66628E1	1.20069E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.1656E-1	-7.98297E-1	-9.13105E0	-9.14199E0	5.126E-3	9.35793E-2	2.72835E1	-3.26639E1	-3.2653E1	2.66586E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.02253E-1
