[Scan]
initial_time=2016-01-28T19:48:50
final_time=2016-01-28T19:49:10
ip_count=19
run=1026
dataset=6
scan=434
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.37864E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=2.02454E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=4.15516E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-1.31631E-10
mult1=-9.26292E-9
mult2=-2.80361E-9
rf_tmon=-4.60386E-3
rf_agc=3.27251E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.6777E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.45831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04856E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53713E1
cs_ef1b_imon=3.09755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04817E1
cs_ea1_imon=1.23651E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42506E0
lens1_imon=2.66006E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64684E1
os_ef1alow_imon=2.96445E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03643E1
cs_ea2_imon=1.40923E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84348E1
cs_ef1a_imon=3.00546E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.20701E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11158E1
os_restr1_imon=4.2986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14839E1
os_ea1_imon=2.4169E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63722E1
os_ef1bup_imon=3.08087E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22673E0
cs_ionrep_imon=9.55837E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93328E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02029E1
cs_anode1_imon=2.04281E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.1843E-8
tplens_vset=1.4E-1
tplens_vmon=1.59778E0
tplens_imon=-4.19227E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26142E1
iondef3_imon=1.48533E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26697E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.98191E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29693E0
ionrepsh_imon=9.45572E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.16773E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.12987E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46623E0
os_ea2_imon=-6.95301E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71101E1
cs_ef2a_imon=3.17922E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06788E0
os_ef2alow_imon=-2.70664E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6885E-1
os_ef2bup_imon=-5.40691E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10926E1
os_restr2_imon=3.37939E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.30671E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02244E1
cs_anode2_imon=2.08034E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72968E1
iondef1_imon=1.09033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66815E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.04234E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=7.47014E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12956E0
cs_ionaccel_imon=-1.04547E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47306E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.60096E-6
window_vset=0.0E0
window_vmon=1.7077E-1
window_imon=-1.19491E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86327E1
mask2_imon=-8.47382E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.62939E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.36936E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.08078E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27563E0
defgridb_imon=6.16053E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33262E1
os_fil1_imon=9.42339E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06704E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62234E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30543E1
cs_fil1_imon=9.24847E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32795E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62234E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07863E-2
os_fil2_imon=-2.62864E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.4239E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.5881E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.21909E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21721E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.03804E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.76003E-1
res40_imon=-2.49465E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16584E-1	-7.98798E-1	-9.13112E0	-9.14171E0	5.03063E-3	9.37462E-2	2.7308E1	-3.26561E1	-3.2606E1	2.69542E1	1.19749E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00966E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16512E-1	-7.98392E-1	-9.13119E0	-9.14173E0	4.81606E-3	9.36031E-2	2.72379E1	-3.2662E1	-3.26195E1	2.66634E1	1.20209E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.1687E-1	-7.98559E-1	-9.13107E0	-9.14166E0	4.79221E-3	9.36031E-2	2.73543E1	-3.26724E1	-3.25779E1	2.66431E1	1.20209E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01738E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16798E-1	-7.98893E-1	-9.13136E0	-9.1418E0	4.55379E-3	9.32932E-2	2.73057E1	-3.26511E1	-3.26232E1	2.66425E1	1.20142E-7	2.52765E-3	2.52765E-3	6.31798E-3	3.02875E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.16679E-1	-7.98726E-1	-9.13119E0	-9.14183E0	4.72069E-3	9.32932E-2	2.73033E1	-3.26756E1	-3.26278E1	2.6891E1	1.19891E-7	2.51814E-3	2.51814E-3	6.33919E-3	3.00097E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16917E-1	-7.98559E-1	-9.13126E0	-9.14173E0	4.86374E-3	9.32455E-2	2.72931E1	-3.26452E1	-3.26338E1	2.67073E1	1.19941E-7	2.51603E-3	2.51603E-3	6.29157E-3	3.01356E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16631E-1	-7.98416E-1	-9.13119E0	-9.14204E0	4.76837E-3	9.34124E-2	2.72992E1	-3.26596E1	-3.26431E1	2.68458E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.16774E-1	-7.98416E-1	-9.13136E0	-9.14221E0	4.55379E-3	9.33647E-2	2.72678E1	-3.26567E1	-3.26062E1	2.6953E1	1.20363E-7	2.52384E-3	2.52384E-3	6.33977E-3	3.00966E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.16631E-1	-7.98464E-1	-9.13119E0	-9.14197E0	4.62532E-3	9.32693E-2	2.72697E1	-3.26514E1	-3.26101E1	2.68436E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09657E0	-8.16631E-1	-7.98774E-1	-9.13131E0	-9.14195E0	4.62532E-3	9.34362E-2	2.72883E1	-3.26386E1	-3.25972E1	2.67415E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16703E-1	-7.98798E-1	-9.13112E0	-9.14185E0	4.76837E-3	9.3174E-2	2.73247E1	-3.26536E1	-3.26101E1	2.68779E1	1.19757E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.16584E-1	-7.98512E-1	-9.13115E0	-9.14202E0	4.95911E-3	9.33647E-2	2.72841E1	-3.26729E1	-3.25984E1	2.67451E1	1.20137E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.00942E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16417E-1	-7.98368E-1	-9.13086E0	-9.14214E0	5.03063E-3	9.33647E-2	2.73345E1	-3.26615E1	-3.26476E1	2.69343E1	1.20122E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.16751E-1	-7.98392E-1	-9.13098E0	-9.14168E0	4.52995E-3	9.35078E-2	2.7304E1	-3.26602E1	-3.26289E1	2.67086E1	1.20122E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16798E-1	-7.98464E-1	-9.13105E0	-9.14209E0	4.86374E-3	9.34601E-2	2.72574E1	-3.26604E1	-3.26343E1	2.68862E1	1.19979E-7	2.51265E-3	2.51265E-3	6.33341E-3	3.00989E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16607E-1	-7.98488E-1	-9.131E0	-9.1419E0	4.91142E-3	9.3627E-2	2.73452E1	-3.26756E1	-3.26402E1	2.6807E1	1.2006E-7	2.51874E-3	2.51874E-3	6.3074E-3	3.00363E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16607E-1	-7.98702E-1	-9.13091E0	-9.14159E0	5.05447E-3	9.37939E-2	2.73556E1	-3.26452E1	-3.25894E1	2.68971E1	1.19953E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.98665E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16536E-1	-7.98607E-1	-9.13098E0	-9.14178E0	4.88758E-3	9.32455E-2	2.72889E1	-3.26452E1	-3.2638E1	2.67511E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01609E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.1656E-1	-7.98512E-1	-9.13095E0	-9.14187E0	4.74453E-3	9.34362E-2	2.7288E1	-3.26195E1	-3.26461E1	2.66414E1	1.2033E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16703E-1	-7.9875E-1	-9.13103E0	-9.14176E0	4.86374E-3	9.36747E-2	2.72968E1	-3.26697E1	-3.26142E1	2.66815E1	1.20004E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.03804E-1
