[Scan]
initial_time=2016-01-28T19:49:17
final_time=2016-01-28T19:49:37
ip_count=19
run=1026
dataset=6
scan=435
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08834E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=1.37766E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=1.99877E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=4.64606E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-1.19865E-10
mult1=-9.9604E-9
mult2=-2.79969E-9
rf_tmon=-3.09371E-3
rf_agc=3.37928E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.67528E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.77207E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.96E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53719E1
cs_ef1b_imon=3.10798E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.01858E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=1.27434E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42663E0
lens1_imon=2.38274E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64585E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03498E1
cs_ea2_imon=1.42827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=3.00476E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.21317E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11425E1
os_restr1_imon=4.28922E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=2.41458E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.07322E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=9.73324E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91836E2
cs_nozzle_imon=1.93233E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01717E1
cs_anode1_imon=2.0303E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.18008E-8
tplens_vset=1.4E-1
tplens_vmon=1.60418E0
tplens_imon=-5.42091E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.4809E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26596E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98202E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.99007E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33321E0
ionrepsh_imon=9.42321E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.16728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74779E1
cs_ef2b_imon=3.11771E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49183E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06012E2
lens4b_imon=2.00475E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7102E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07889E0
os_ef2alow_imon=-2.77615E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79275E-1
os_ef2bup_imon=-5.35479E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10984E1
os_restr2_imon=3.37835E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23101E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.09668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73104E1
iondef1_imon=1.07282E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68302E1
iondef4_imon=1.07669E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.18765E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.49296E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1035E0
cs_ionaccel_imon=-1.042E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47021E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56139E1
einzel_imon=7.60096E-6
window_vset=0.0E0
window_vmon=1.91621E-1
window_imon=-1.04895E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39227E-4
mask2_vset=0.0E0
mask2_vmon=-1.86645E1
mask2_imon=-4.89431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92702E3
multa_neg_imon=7.64958E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.63298E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50173E3
multb_neg_imon=6.62577E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26923E0
defgridb_imon=5.90838E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33283E1
os_fil1_imon=9.41059E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06617E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62122E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30575E1
cs_fil1_imon=9.25328E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.26308E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62153E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1382E-2
os_fil2_imon=-2.72711E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90656E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.36711E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33897E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02617E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.13652E-1
res40_imon=-2.44947E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09789E0	-8.16536E-1	-7.98559E-1	-9.13095E0	-9.14173E0	4.60148E-3	9.36747E-2	2.73352E1	-3.26408E1	-3.26443E1	2.68532E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01871E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09704E0	-8.16441E-1	-7.9844E-1	-9.13122E0	-9.14197E0	4.62532E-3	9.35555E-2	2.72858E1	-3.26541E1	-3.2616E1	2.68188E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.1625E-1	-7.98893E-1	-9.13131E0	-9.14199E0	4.48227E-3	9.36747E-2	2.72981E1	-3.26428E1	-3.2622E1	2.67451E1	1.19829E-7	2.51498E-3	2.51498E-3	6.29603E-3	3.01609E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09665E0	-8.16369E-1	-7.98798E-1	-9.13146E0	-9.14178E0	4.88758E-3	9.35793E-2	2.72739E1	-3.26585E1	-3.2647E1	2.67962E1	1.20092E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16536E-1	-7.98702E-1	-9.13122E0	-9.14171E0	4.69685E-3	9.3627E-2	2.73387E1	-3.2662E1	-3.25806E1	2.68088E1	1.19959E-7	2.51918E-3	2.51918E-3	6.28843E-3	3.00249E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.16464E-1	-7.98631E-1	-9.13112E0	-9.14187E0	4.43459E-3	9.35555E-2	2.72895E1	-3.26657E1	-3.26506E1	2.68148E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-8.16321E-1	-7.98559E-1	-9.13134E0	-9.14202E0	4.52995E-3	9.35555E-2	2.73057E1	-3.26681E1	-3.26086E1	2.68065E1	1.19809E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16345E-1	-7.98535E-1	-9.13119E0	-9.14204E0	4.62532E-3	9.35555E-2	2.72573E1	-3.26537E1	-3.26272E1	2.67824E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.1656E-1	-7.98392E-1	-9.13081E0	-9.14199E0	4.74453E-3	9.35316E-2	2.73526E1	-3.26633E1	-3.26434E1	2.6819E1	1.20209E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16488E-1	-7.98464E-1	-9.13088E0	-9.1419E0	4.93526E-3	9.35555E-2	2.72841E1	-3.26771E1	-3.26296E1	2.67836E1	1.19887E-7	2.51935E-3	2.51935E-3	6.31288E-3	2.98481E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.1656E-1	-7.98774E-1	-9.13124E0	-9.14171E0	4.88758E-3	9.33886E-2	2.72603E1	-3.26649E1	-3.2603E1	2.68148E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16607E-1	-7.98678E-1	-9.13124E0	-9.14168E0	5.14984E-3	9.33886E-2	2.73137E1	-3.26787E1	-3.26003E1	2.681E1	1.19902E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16393E-1	-7.98512E-1	-9.13119E0	-9.14202E0	5.07832E-3	9.32693E-2	2.73069E1	-3.26614E1	-3.26166E1	2.68088E1	1.20191E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.01209E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.16655E-1	-7.98583E-1	-9.13146E0	-9.14202E0	5.03063E-3	9.35078E-2	2.73568E1	-3.26386E1	-3.26675E1	2.68053E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16631E-1	-7.98512E-1	-9.13131E0	-9.14185E0	5.00679E-3	9.36747E-2	2.72166E1	-3.26596E1	-3.26278E1	2.68196E1	1.19965E-7	2.5188E-3	2.5188E-3	6.28006E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.16441E-1	-7.98631E-1	-9.13146E0	-9.1418E0	4.88758E-3	9.35316E-2	2.72889E1	-3.26645E1	-3.26645E1	2.68478E1	1.20055E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.9892E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16584E-1	-7.98559E-1	-9.13126E0	-9.14185E0	4.76837E-3	9.34362E-2	2.73057E1	-3.27005E1	-3.26032E1	2.68268E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.98222E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16631E-1	-7.98464E-1	-9.13119E0	-9.1419E0	4.64916E-3	9.38177E-2	2.72408E1	-3.26651E1	-3.26182E1	2.68124E1	1.20122E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9874E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16393E-1	-7.98464E-1	-9.13095E0	-9.14164E0	5.03063E-3	9.39369E-2	2.72791E1	-3.26791E1	-3.26178E1	2.67998E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16512E-1	-7.98631E-1	-9.13129E0	-9.14183E0	4.673E-3	9.38177E-2	2.73104E1	-3.26596E1	-3.2629E1	2.68302E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1
