[Scan]
initial_time=2016-01-28T19:50:11
final_time=2016-01-28T19:50:32
ip_count=19
run=1026
dataset=6
scan=437
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08866E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.37714E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=2.07627E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=4.23026E-10
ql4_vset=
ql4_vmon=-9.14149E0
ql4_imon=-1.30439E-10
mult1=-8.99387E-9
mult2=-2.7226E-9
rf_tmon=-4.16995E-3
rf_agc=3.35799E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.71455E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67447E0
bslens_imon=2.70253E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.96528E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05238E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=3.10127E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02032E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04888E1
cs_ea1_imon=1.24394E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39911E0
lens1_imon=2.55034E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04044E1
cs_ea2_imon=1.41561E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=2.98883E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.21115E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.28301E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.39531E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.95478E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91846E2
cs_nozzle_imon=1.93172E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.04999E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.19127E-8
tplens_vset=1.4E-1
tplens_vmon=1.64438E0
tplens_imon=-1.6439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.48816E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.59081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02858E2
lens6_imon=2.98126E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.99154E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24738E0
ionrepsh_imon=9.29645E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33227E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.1074E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49396E0
os_ea2_imon=-6.88222E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.00371E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04194E0
os_ef2alow_imon=-2.67717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83609E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.3622E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.08675E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.07122E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67832E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.21715E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.51257E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.12746E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.48241E-6
window_vset=0.0E0
window_vmon=1.57877E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.37809E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.79763E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.02415E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=5.93401E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33281E1
os_fil1_imon=9.44282E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08278E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62071E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30605E1
cs_fil1_imon=9.24905E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30644E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62885E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02798E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.45554E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.78009E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17826E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21781E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40071E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91127E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09665E0	-8.1706E-1	-7.98464E-1	-9.13117E0	-9.1418E0	4.81606E-3	9.35555E-2	2.72751E1	-3.26741E1	-3.26194E1	2.68184E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.03027E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.17132E-1	-7.98488E-1	-9.13112E0	-9.14173E0	4.86374E-3	9.35078E-2	2.73228E1	-3.2694E1	-3.26009E1	2.67842E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16941E-1	-7.9844E-1	-9.13105E0	-9.14176E0	4.79221E-3	9.36747E-2	2.72964E1	-3.26637E1	-3.26005E1	2.68046E1	1.2035E-7	2.51693E-3	2.51693E-3	6.29067E-3	2.99879E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16941E-1	-7.98583E-1	-9.13126E0	-9.14202E0	4.8399E-3	9.32932E-2	2.72979E1	-3.26543E1	-3.26014E1	2.68192E1	1.20042E-7	2.51182E-3	2.51182E-3	6.33919E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16846E-1	-7.98583E-1	-9.13136E0	-9.14178E0	4.79221E-3	9.36031E-2	2.73111E1	-3.26729E1	-3.26056E1	2.68118E1	1.2033E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16512E-1	-7.98488E-1	-9.13129E0	-9.14214E0	4.79221E-3	9.34839E-2	2.73129E1	-3.26651E1	-3.26374E1	2.68334E1	1.19913E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16631E-1	-7.98607E-1	-9.13148E0	-9.14178E0	4.72069E-3	9.33886E-2	2.72853E1	-3.26338E1	-3.26512E1	2.6804E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16584E-1	-7.98488E-1	-9.13126E0	-9.14168E0	4.79221E-3	9.33647E-2	2.73183E1	-3.26392E1	-3.26098E1	2.68262E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16751E-1	-7.98631E-1	-9.13119E0	-9.14164E0	4.74453E-3	9.33647E-2	2.72426E1	-3.26705E1	-3.25876E1	2.67794E1	1.19965E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16512E-1	-7.98392E-1	-9.13126E0	-9.14195E0	5.05447E-3	9.34124E-2	2.73103E1	-3.2655E1	-3.26098E1	2.67974E1	1.20158E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.01738E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16274E-1	-7.98368E-1	-9.13129E0	-9.14178E0	4.88758E-3	9.35078E-2	2.72654E1	-3.26825E1	-3.26044E1	2.6795E1	1.19902E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16321E-1	-7.98178E-1	-9.13157E0	-9.14176E0	4.86374E-3	9.36985E-2	2.73311E1	-3.2606E1	-3.26938E1	2.68105E1	1.19757E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.97704E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16178E-1	-7.98845E-1	-9.13131E0	-9.14199E0	4.79221E-3	9.35793E-2	2.73149E1	-3.26676E1	-3.26236E1	2.67845E1	1.19902E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.97394E-1
1.7E1	3.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16441E-1	-7.98655E-1	-9.13129E0	-9.14173E0	4.52995E-3	9.39131E-2	2.73021E1	-3.26476E1	-3.26356E1	2.68041E1	1.20077E-7	2.52008E-3	2.52008E-3	6.3157E-3	3.00487E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.1625E-1	-7.98774E-1	-9.13143E0	-9.14164E0	4.673E-3	9.34601E-2	2.73045E1	-3.26962E1	-3.26142E1	2.67998E1					
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16417E-1	-7.98798E-1	-9.13138E0	-9.1419E0	4.48227E-3	9.36031E-2	2.72935E1	-3.26706E1	-3.26393E1	2.68586E1	1.20004E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.9943E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16345E-1	-7.98678E-1	-9.13112E0	-9.14156E0	4.55379E-3	9.377E-2	2.73014E1	-3.26765E1	-3.26142E1	2.68094E1	1.19979E-7	2.51679E-3	2.51679E-3	6.323E-3	3.00494E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16512E-1	-7.98965E-1	-9.13126E0	-9.14164E0	4.52995E-3	9.37939E-2	2.73219E1	-3.26488E1	-3.26633E1	2.6816E1	1.20171E-7	2.51642E-3	2.51642E-3	6.3074E-3	2.9926E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16417E-1	-7.98321E-1	-9.13153E0	-9.14166E0	4.64916E-3	9.36747E-2	2.72591E1	-3.26585E1	-3.26655E1	2.68325E1	1.20088E-7	2.51918E-3	2.51918E-3	6.31012E-3	3.00249E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.16655E-1	-7.98202E-1	-9.13148E0	-9.14149E0	4.88758E-3	9.36985E-2	2.73027E1	-3.26723E1	-3.25996E1	2.67832E1					
