[Scan]
initial_time=2016-01-28T19:51:34
final_time=2016-01-28T19:51:54
ip_count=19
run=1026
dataset=6
scan=440
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.38062E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.00347E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=4.07803E-10
ql4_vset=
ql4_vmon=-9.14159E0
ql4_imon=-1.28329E-10
mult1=-9.64406E-9
mult2=-2.70464E-9
rf_tmon=-5.79218E-3
rf_agc=3.25765E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.71341E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19966E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05121E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53563E1
cs_ef1b_imon=3.08956E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.0222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04923E1
cs_ea1_imon=1.23049E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40795E0
lens1_imon=2.7627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64562E1
os_ef1alow_imon=2.98183E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03537E1
cs_ea2_imon=1.40923E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84215E1
cs_ef1a_imon=2.98808E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.21694E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11002E1
os_restr1_imon=4.28991E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15482E1
os_ea1_imon=2.42681E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63728E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=9.58668E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.9347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01879E1
cs_anode1_imon=2.03829E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.19418E-8
tplens_vset=1.4E-1
tplens_vmon=1.59955E0
tplens_imon=-3.62597E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.50586E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.91568E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32289E0
ionrepsh_imon=9.346E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33581E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74704E1
cs_ef2b_imon=3.13265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4621E0
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06061E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.17435E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05108E0
os_ef2alow_imon=-2.58501E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98968E-1
os_ef2bup_imon=-5.35479E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10897E1
os_restr2_imon=3.38461E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.08764E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72829E1
iondef1_imon=1.06627E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.08156E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.23074E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.50224E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12782E0
cs_ionaccel_imon=-1.00029E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47136E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56191E1
einzel_imon=7.66004E-6
window_vset=0.0E0
window_vmon=1.44706E-1
window_imon=-1.0559E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39035E-4
mask2_vset=0.0E0
mask2_vmon=-1.86425E1
mask2_imon=-6.70144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.62939E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.63128E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=6.86488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=5.97295E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33262E1
os_fil1_imon=9.43161E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07312E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62277E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30646E1
cs_fil1_imon=9.25455E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36792E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63132E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.8082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0282E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.36822E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.2232E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35052E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2182E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.2677E-1
res40_imon=-2.49465E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16011E-1	-7.98655E-1	-9.13136E0	-9.14171E0	4.43459E-3	9.3627E-2	2.72976E1	-3.26828E1	-3.26399E1	2.67578E1	1.19841E-7	2.51919E-3	2.51919E-3	6.32328E-3	2.98842E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.16202E-1	-7.98488E-1	-9.13126E0	-9.14173E0	4.76837E-3	9.38177E-2	2.73153E1	-3.26591E1	-3.264E1	2.68163E1	1.20106E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16321E-1	-7.98488E-1	-9.1315E0	-9.14199E0	4.64916E-3	9.38654E-2	2.73312E1	-3.26793E1	-3.26081E1	2.68215E1	1.19937E-7	2.52293E-3	2.52293E-3	6.34737E-3	3.01065E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16584E-1	-7.98678E-1	-9.13141E0	-9.14187E0	4.673E-3	9.35555E-2	2.73207E1	-3.26536E1	-3.26386E1	2.67801E1	1.20042E-7	2.51182E-3	2.51182E-3	6.34982E-3	3.02368E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16464E-1	-7.98583E-1	-9.13117E0	-9.14164E0	4.57764E-3	9.36031E-2	2.73388E1	-3.26744E1	-3.25911E1	2.67956E1	1.19978E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.02277E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16512E-1	-7.98607E-1	-9.13134E0	-9.14185E0	4.14848E-3	9.38892E-2	2.73153E1	-3.26434E1	-3.2638E1	2.6819E1	1.20226E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
7.0E0	0.0E0	3.0E0	1.163E3	7.54E2	-2.09526E0	-8.16655E-1	-7.98631E-1	-9.13138E0	-9.14171E0	4.45843E-3	9.37223E-2	2.72874E1	-3.26791E1	-3.26054E1	2.68148E1	1.20122E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16965E-1	-7.98726E-1	-9.13129E0	-9.14142E0	4.12464E-3	9.36747E-2	2.72342E1	-3.26633E1	-3.25966E1	2.67884E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.17013E-1	-7.98392E-1	-9.13136E0	-9.14142E0	4.52995E-3	9.38892E-2	2.73135E1	-3.26332E1	-3.26446E1	2.6854E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.1687E-1	-7.98559E-1	-9.13143E0	-9.14168E0	4.43459E-3	9.39131E-2	2.73237E1	-3.26428E1	-3.26206E1	2.67523E1	1.20017E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01085E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16703E-1	-7.98535E-1	-9.13136E0	-9.14166E0	4.8399E-3	9.37223E-2	2.72815E1	-3.2672E1	-3.26201E1	2.6837E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.1656E-1	-7.98583E-1	-9.13124E0	-9.14178E0	4.62532E-3	9.36508E-2	2.73222E1	-3.26664E1	-3.2645E1	2.6771E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16727E-1	-7.98893E-1	-9.13136E0	-9.14145E0	4.673E-3	9.33886E-2	2.73169E1	-3.26608E1	-3.26195E1	2.68376E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16584E-1	-7.99012E-1	-9.13126E0	-9.14176E0	4.86374E-3	9.34601E-2	2.73051E1	-3.26753E1	-3.26326E1	2.67776E1	1.198E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16679E-1	-7.99012E-1	-9.13112E0	-9.14183E0	4.43459E-3	9.36031E-2	2.73225E1	-3.26777E1	-3.26579E1	2.68581E1	1.20069E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16751E-1	-7.98965E-1	-9.13153E0	-9.14195E0	4.41074E-3	9.36747E-2	2.72955E1	-3.26723E1	-3.26098E1	2.67523E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01347E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16751E-1	-7.99012E-1	-9.1316E0	-9.14192E0	4.93526E-3	9.34839E-2	2.72998E1	-3.26413E1	-3.26089E1	2.68514E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.1656E-1	-7.98988E-1	-9.13162E0	-9.14185E0	4.57764E-3	9.35078E-2	2.72985E1	-3.26585E1	-3.26452E1	2.67763E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9926E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16846E-1	-7.98798E-1	-9.13155E0	-9.14154E0	4.45843E-3	9.34601E-2	2.73381E1	-3.26667E1	-3.26425E1	2.67842E1	1.198E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16798E-1	-7.98702E-1	-9.13141E0	-9.14159E0	4.52995E-3	9.34362E-2	2.72829E1	-3.26639E1	-3.26032E1	2.68106E1	1.19953E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.00453E-1
