[Scan]
initial_time=2016-01-28T19:52:01
final_time=2016-01-28T19:52:21
ip_count=19
run=1026
dataset=6
scan=441
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.37818E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.99339E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=4.12262E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=-1.12188E-10
mult1=-9.31021E-9
mult2=-2.77421E-9
rf_tmon=-4.80443E-3
rf_agc=3.32914E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.69905E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62138E0
bslens_imon=2.36275E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20125E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.04813E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53719E1
cs_ef1b_imon=3.09929E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02418E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=1.23722E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38377E0
lens1_imon=2.69545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03584E1
cs_ea2_imon=1.41561E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84498E1
cs_ef1a_imon=2.99225E-5
olens2_vset=9.7E-1
olens2_vmon=9.69505E-1
olens2_imon=1.21997E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=4.29686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15642E1
os_ea1_imon=2.41513E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6389E1
os_ef1bup_imon=3.08017E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22791E0
cs_ionrep_imon=9.53713E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01711E1
cs_anode1_imon=2.05324E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.19136E-8
tplens_vset=1.4E-1
tplens_vmon=1.61312E0
tplens_imon=-2.88269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26201E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.55364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98452E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.97518E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23617E0
ionrepsh_imon=9.20443E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.17127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74727E1
cs_ef2b_imon=3.12014E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44028E0
os_ea2_imon=-6.10355E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00364E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.1959E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05803E0
os_ef2alow_imon=-2.73792E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86226E-1
os_ef2bup_imon=-5.37911E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=3.37522E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01728E1
cs_anode2_imon=2.0939E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72951E1
iondef1_imon=1.06414E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.08329E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.19636E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.52691E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13246E0
cs_ionaccel_imon=-9.86392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.78879E-1
window_imon=-1.22966E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86558E1
mask2_imon=-7.39649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.89484E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.53217E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.32854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27268E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.43098E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06206E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62684E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30677E1
cs_fil1_imon=9.2421E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30131E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62756E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04064E-2
os_fil2_imon=-2.72711E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87181E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.0898E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.67498E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.57641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21825E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.21558E-1
res40_imon=-2.4877E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16607E-1	-7.98726E-1	-9.131E0	-9.14178E0	4.62532E-3	9.35793E-2	2.73075E1	-3.26508E1	-3.26372E1	2.68136E1	1.20042E-7	2.51814E-3	2.51814E-3	6.32858E-3	2.98592E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16464E-1	-7.98678E-1	-9.13117E0	-9.14171E0	4.79221E-3	9.35078E-2	2.7318E1	-3.2668E1	-3.26249E1	2.68199E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.1656E-1	-7.98345E-1	-9.13157E0	-9.14195E0	4.64916E-3	9.34601E-2	2.72721E1	-3.26738E1	-3.26095E1	2.67824E1	1.20028E-7	2.51679E-3	2.51679E-3	6.29185E-3	3.0E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09309E0	-8.16393E-1	-7.9844E-1	-9.1315E0	-9.14185E0	4.62532E-3	9.36508E-2	2.73099E1	-3.262E1	-3.26434E1	2.68169E1	1.20004E-7	2.50882E-3	2.50882E-3	6.29665E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09294E0	-8.1625E-1	-7.98488E-1	-9.13141E0	-9.14176E0	4.55379E-3	9.35316E-2	2.73297E1	-3.2617E1	-3.26122E1	2.67795E1	1.20158E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09333E0	-8.16369E-1	-7.98225E-1	-9.13112E0	-9.14178E0	4.41074E-3	9.36985E-2	2.72895E1	-3.26693E1	-3.26621E1	2.67974E1	1.19925E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.16417E-1	-7.98392E-1	-9.13122E0	-9.14204E0	4.45843E-3	9.34839E-2	2.73259E1	-3.26383E1	-3.26009E1	2.68184E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16536E-1	-7.98702E-1	-9.13105E0	-9.14207E0	4.26769E-3	9.377E-2	2.72961E1	-3.26366E1	-3.26417E1	2.68065E1	1.19861E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16417E-1	-7.98583E-1	-9.131E0	-9.14183E0	4.45843E-3	9.3627E-2	2.72949E1	-3.26394E1	-3.26158E1	2.68153E1	1.1993E-7	2.51472E-3	2.51472E-3	6.29703E-3	3.00247E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.16464E-1	-7.98416E-1	-9.13124E0	-9.14166E0	4.8399E-3	9.38654E-2	2.72877E1	-3.26759E1	-3.26404E1	2.68117E1	1.2006E-7	2.51642E-3	2.51642E-3	6.31902E-3	2.9871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.1656E-1	-7.98774E-1	-9.13119E0	-9.14185E0	4.64916E-3	9.36031E-2	2.72809E1	-3.26862E1	-3.25617E1	2.6795E1	1.198E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.00453E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16274E-1	-7.98845E-1	-9.13105E0	-9.1419E0	4.55379E-3	9.37462E-2	2.73085E1	-3.26715E1	-3.26169E1	2.67984E1	1.19861E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.16417E-1	-7.9875E-1	-9.13153E0	-9.14185E0	4.86374E-3	9.34124E-2	2.73194E1	-3.2641E1	-3.26254E1	2.6828E1	1.20177E-7	2.5199E-3	2.5199E-3	6.28667E-3	2.9926E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.16274E-1	-7.98512E-1	-9.13131E0	-9.14187E0	4.69685E-3	9.37223E-2	2.72862E1	-3.26331E1	-3.26638E1	2.67986E1	1.20137E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.01209E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16298E-1	-7.98678E-1	-9.13134E0	-9.14211E0	4.48227E-3	9.36985E-2	2.73482E1	-3.26585E1	-3.26183E1	2.68118E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16298E-1	-7.98535E-1	-9.13162E0	-9.14187E0	5.00679E-3	9.37939E-2	2.73186E1	-3.26682E1	-3.26181E1	2.67674E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01871E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16107E-1	-7.98583E-1	-9.13157E0	-9.14183E0	4.8399E-3	9.3627E-2	2.72957E1	-3.26537E1	-3.25953E1	2.68366E1	1.19705E-7	2.51552E-3	2.51552E-3	6.35692E-3	3.00563E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.16178E-1	-7.98512E-1	-9.13119E0	-9.1419E0	4.88758E-3	9.34362E-2	2.72962E1	-3.26431E1	-3.26449E1	2.67956E1	1.20055E-7	2.52599E-3	2.52599E-3	6.32896E-3	3.00197E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.1625E-1	-7.98392E-1	-9.13162E0	-9.14183E0	4.95911E-3	9.39846E-2	2.73069E1	-3.26554E1	-3.26464E1	2.68196E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.98222E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16274E-1	-7.98583E-1	-9.13131E0	-9.14207E0	4.93526E-3	9.36985E-2	2.72951E1	-3.26714E1	-3.26201E1	2.68088E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9874E-1
