[Scan]
initial_time=2016-01-28T19:53:23
final_time=2016-01-28T19:53:42
ip_count=19
run=1026
dataset=6
scan=444
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=1.37243E-8
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=2.05787E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=4.01104E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-1.1152E-10
mult1=-9.12106E-9
mult2=-2.71934E-9
rf_tmon=-4.78673E-3
rf_agc=3.29788E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.73588E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65749E0
bslens_imon=2.67528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19639E1
lens5a_imon=1.98281E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53845E1
cs_ef1b_imon=3.11929E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02007E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=1.2438E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39888E0
lens1_imon=2.54306E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64464E1
os_ef1alow_imon=2.96504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03439E1
cs_ea2_imon=1.38999E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8419E1
cs_ef1a_imon=3.01117E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.22031E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11105E1
os_restr1_imon=4.29022E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15122E1
os_ea1_imon=2.40226E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=9.70902E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.04567E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.19098E-8
tplens_vset=1.4E-1
tplens_vmon=1.65551E0
tplens_imon=-2.52073E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26384E1
iondef3_imon=1.47851E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26514E1
iondef2_imon=1.57254E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02879E2
lens6_imon=2.98445E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.05703E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28148E0
ionrepsh_imon=9.30133E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34031E1
lens5b_imon=2.16609E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47799E0
os_ea2_imon=-8.39749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06049E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.20002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03774E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.38238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.28937E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.10297E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.09689E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.06683E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.16363E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.51049E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-1.03015E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.46985E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56093E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.38656E-1
window_imon=-1.22116E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.87131E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.28486E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.3152E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=6.8992E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40968E0
defgridb_imon=6.003E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.41922E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62293E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30635E1
cs_fil1_imon=9.26316E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29142E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62933E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.96347E-2
os_fil2_imon=-2.78009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.31213E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37032E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2177E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.25054E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16798E-1	-7.98559E-1	-9.13134E0	-9.14168E0	4.50611E-3	9.33409E-2	2.72986E1	-3.26555E1	-3.26313E1	2.6804E1	1.20174E-7	2.52428E-3	2.52428E-3	6.29645E-3	2.9952E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16679E-1	-7.98774E-1	-9.13119E0	-9.14192E0	4.60148E-3	9.39846E-2	2.73087E1	-3.26627E1	-3.2623E1	2.6813E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16607E-1	-7.98726E-1	-9.13136E0	-9.14156E0	4.86374E-3	9.3627E-2	2.72962E1	-3.2649E1	-3.26189E1	2.67601E1	1.20191E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.00942E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.1656E-1	-7.98941E-1	-9.13131E0	-9.14145E0	4.74453E-3	9.34124E-2	2.73257E1	-3.26502E1	-3.26219E1	2.68346E1	1.20293E-7	2.51919E-3	2.51919E-3	6.33919E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16607E-1	-7.98535E-1	-9.13136E0	-9.14171E0	4.69685E-3	9.35316E-2	2.72474E1	-3.26627E1	-3.26008E1	2.68106E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16512E-1	-7.98464E-1	-9.13124E0	-9.1418E0	4.52995E-3	9.33886E-2	2.73057E1	-3.26482E1	-3.26338E1	2.67776E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16798E-1	-7.98774E-1	-9.1315E0	-9.14178E0	4.88758E-3	9.35793E-2	2.73135E1	-3.26554E1	-3.2641E1	2.68106E1	1.20226E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16655E-1	-7.98798E-1	-9.13174E0	-9.14156E0	4.79221E-3	9.3627E-2	2.72968E1	-3.26602E1	-3.26089E1	2.67992E1	1.20148E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01216E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16536E-1	-7.98464E-1	-9.13119E0	-9.14145E0	4.673E-3	9.37462E-2	2.72841E1	-3.2632E1	-3.26164E1	2.68034E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16345E-1	-7.98488E-1	-9.13124E0	-9.14171E0	4.88758E-3	9.36985E-2	2.72606E1	-3.2653E1	-3.26242E1	2.67665E1	1.19705E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9926E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16417E-1	-7.98512E-1	-9.13136E0	-9.14185E0	4.86374E-3	9.36031E-2	2.73098E1	-3.26891E1	-3.26124E1	2.67998E1	1.20209E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16703E-1	-7.98965E-1	-9.13141E0	-9.14171E0	4.98295E-3	9.35793E-2	2.73099E1	-3.2653E1	-3.26056E1	2.68244E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.97704E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16584E-1	-7.98821E-1	-9.1315E0	-9.14199E0	4.81606E-3	9.39608E-2	2.73081E1	-3.26428E1	-3.26506E1	2.68364E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16584E-1	-7.98798E-1	-9.13117E0	-9.14164E0	4.79221E-3	9.35793E-2	2.73123E1	-3.26711E1	-3.26332E1	2.68064E1	1.20122E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16512E-1	-7.98392E-1	-9.13136E0	-9.14192E0	4.62532E-3	9.34124E-2	2.73213E1	-3.26921E1	-3.26434E1	2.68082E1	1.19653E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16298E-1	-7.98655E-1	-9.13136E0	-9.1419E0	4.48227E-3	9.36031E-2	2.72702E1	-3.26819E1	-3.2614E1	2.67662E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00824E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16226E-1	-7.98607E-1	-9.13136E0	-9.14192E0	4.3869E-3	9.36031E-2	2.72721E1	-3.26344E1	-3.26506E1	2.68406E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01871E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.16345E-1	-7.98583E-1	-9.13153E0	-9.14168E0	4.31538E-3	9.36508E-2	2.73057E1	-3.26756E1	-3.25953E1	2.67976E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16631E-1	-7.9875E-1	-9.1316E0	-9.14176E0	4.31538E-3	9.37223E-2	2.73213E1	-3.26428E1	-3.26338E1	2.68748E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16727E-1	-7.99012E-1	-9.13153E0	-9.14176E0	4.57764E-3	9.33886E-2	2.73063E1	-3.26514E1	-3.26384E1	2.68202E1	1.19809E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01085E-1
