[Scan]
initial_time=2016-01-28T19:53:50
final_time=2016-01-28T19:54:09
ip_count=19
run=1026
dataset=6
scan=445
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08812E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=1.37271E-8
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=2.00942E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=4.34494E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-1.04308E-10
mult1=-9.57029E-9
mult2=-2.59783E-9
rf_tmon=-3.47715E-3
rf_agc=3.44181E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.62357E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62727E0
bslens_imon=2.56199E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1965E1
lens5a_imon=1.98874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05009E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.10659E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04854E1
cs_ea1_imon=1.25807E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40444E0
lens1_imon=2.42774E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.97244E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04127E1
cs_ea2_imon=1.40339E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.00789E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.2302E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=4.28018E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15356E1
os_ea1_imon=2.41802E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63844E1
os_ef1bup_imon=3.076E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25545E0
cs_ionrep_imon=9.59352E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01804E1
cs_anode1_imon=2.03239E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.20877E-8
tplens_vset=1.4E-1
tplens_vmon=1.64591E0
tplens_imon=-3.94939E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2639E1
iondef3_imon=1.5108E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.57557E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98249E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=4.00279E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24315E0
ionrepsh_imon=9.23439E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33864E1
lens5b_imon=2.17904E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4876E0
os_ea2_imon=-6.90297E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00603E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.18999E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05977E0
os_ef2alow_imon=-2.55373E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.33741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1099E1
os_restr2_imon=3.386E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.31405E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01699E1
cs_anode2_imon=2.10154E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73004E1
iondef1_imon=1.09864E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.09372E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.15213E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.57136E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13188E0
cs_ionaccel_imon=-1.0698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47174E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55919E1
einzel_imon=7.62181E-6
window_vset=0.0E0
window_vmon=1.71349E-1
window_imon=-1.19143E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86842E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=8.26776E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93681E3
defgrida_imon=6.76077E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.25415E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3747E0
defgridb_imon=5.89819E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33271E1
os_fil1_imon=9.4249E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07323E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62353E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3055E1
cs_fil1_imon=9.25554E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32853E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62428E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02034E-2
os_fil2_imon=-2.76186E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.20688E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33897E-1
cs_fil2_imon=-2.6576E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10726E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21749E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.58627E-1
res40_imon=-2.60238E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=233
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.16727E-1	-7.98631E-1	-9.13131E0	-9.14199E0	4.52995E-3	9.34601E-2	2.73172E1	-3.26629E1	-3.26222E1	2.68363E1	1.1988E-7	2.5199E-3	2.5199E-3	6.33863E-3	2.9926E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16369E-1	-7.98774E-1	-9.1311E0	-9.14173E0	4.72069E-3	9.35793E-2	2.73388E1	-3.26425E1	-3.2648E1	2.68333E1	1.19775E-7	2.52066E-3	2.52066E-3	6.30171E-3	3.00522E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16202E-1	-7.98678E-1	-9.13095E0	-9.14178E0	4.74453E-3	9.36031E-2	2.73098E1	-3.26685E1	-3.26644E1	2.67811E1	1.20191E-7	2.52697E-3	2.52697E-3	6.27954E-3	3.0041E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.1625E-1	-7.98583E-1	-9.13155E0	-9.14178E0	4.55379E-3	9.34839E-2	2.72781E1	-3.26717E1	-3.26194E1	2.68292E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16059E-1	-7.98559E-1	-9.1316E0	-9.14195E0	4.60148E-3	9.38416E-2	2.73159E1	-3.26374E1	-3.26476E1	2.67704E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16441E-1	-7.98678E-1	-9.13153E0	-9.14173E0	4.79221E-3	9.34362E-2	2.7301E1	-3.26349E1	-3.26213E1	2.67995E1	1.20174E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16369E-1	-7.98726E-1	-9.13148E0	-9.1418E0	4.8399E-3	9.37223E-2	2.72913E1	-3.26627E1	-3.26356E1	2.68292E1	1.20106E-7	2.50882E-3	2.50882E-3	6.32896E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16512E-1	-7.9875E-1	-9.13146E0	-9.14197E0	4.95911E-3	9.36747E-2	2.73138E1	-3.26822E1	-3.26417E1	2.68343E1	1.20278E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16298E-1	-7.98583E-1	-9.13162E0	-9.1418E0	4.64916E-3	9.38892E-2	2.72805E1	-3.26892E1	-3.25734E1	2.67995E1	1.20293E-7	2.52342E-3	2.52342E-3	6.33919E-3	3.01862E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16441E-1	-7.98726E-1	-9.13153E0	-9.14164E0	4.673E-3	9.377E-2	2.72977E1	-3.26544E1	-3.26334E1	2.68069E1	1.20016E-7	2.51345E-3	2.51345E-3	6.29721E-3	3.00635E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16298E-1	-7.98821E-1	-9.1315E0	-9.14171E0	4.69685E-3	9.38654E-2	2.73129E1	-3.26398E1	-3.26272E1	2.68298E1	1.19991E-7	2.52113E-3	2.52113E-3	6.33211E-3	2.99845E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.1625E-1	-7.98631E-1	-9.13146E0	-9.14166E0	4.79221E-3	9.37223E-2	2.73033E1	-3.26585E1	-3.2623E1	2.67914E1	1.19757E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16321E-1	-7.98583E-1	-9.13124E0	-9.1418E0	4.72069E-3	9.36031E-2	2.72968E1	-3.26502E1	-3.26472E1	2.67962E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.16369E-1	-7.98559E-1	-9.13153E0	-9.14176E0	4.72069E-3	9.37939E-2	2.72979E1	-3.26687E1	-3.26404E1	2.67902E1	1.20004E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16536E-1	-7.98774E-1	-9.13119E0	-9.14178E0	4.43459E-3	9.41277E-2	2.72992E1	-3.2672E1	-3.26124E1	2.68052E1	1.2033E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01347E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.1656E-1	-7.98512E-1	-9.13126E0	-9.14202E0	4.43459E-3	9.3627E-2	2.73252E1	-3.26685E1	-3.26172E1	2.67792E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16464E-1	-7.98726E-1	-9.13153E0	-9.1419E0	4.72069E-3	9.36508E-2	2.73093E1	-3.26825E1	-3.26506E1	2.68526E1	1.20004E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.9714E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16154E-1	-7.98988E-1	-9.13155E0	-9.14187E0	4.57764E-3	9.38654E-2	2.72591E1	-3.26514E1	-3.26248E1	2.67668E1	1.20217E-7	2.51755E-3	2.51755E-3	6.31555E-3	3.00249E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.1625E-1	-7.98941E-1	-9.13138E0	-9.1418E0	4.86374E-3	9.3627E-2	2.73057E1	-3.26717E1	-3.26368E1	2.68505E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16107E-1	-7.98845E-1	-9.1316E0	-9.14176E0	4.86374E-3	9.36508E-2	2.73004E1	-3.26649E1	-3.2639E1	2.67902E1	1.19749E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.00966E-1
