[Scan]
initial_time=2016-01-28T19:56:31
final_time=2016-01-28T19:56:51
ip_count=19
run=1026
dataset=6
scan=451
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08845E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.36338E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.99866E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=3.95334E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-6.59347E-11
mult1=-8.87098E-9
mult2=-2.62473E-9
rf_tmon=-5.20607E-3
rf_agc=3.34869E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.68663E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70084E0
bslens_imon=2.56414E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19551E1
lens5a_imon=1.96559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05166E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.09364E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04568E2
lens23_imon=1.01852E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05241E1
cs_ea1_imon=1.25584E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41928E0
lens1_imon=2.32665E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64576E1
os_ef1alow_imon=2.96676E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.43298E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84414E1
cs_ef1a_imon=3.00451E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.23382E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.29441E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15475E1
os_ea1_imon=2.38063E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63739E1
os_ef1bup_imon=3.08314E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2229E0
cs_ionrep_imon=9.72012E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93221E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.03923E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.2071E-8
tplens_vset=1.4E-1
tplens_vmon=1.59666E0
tplens_imon=-2.85791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26344E1
iondef3_imon=1.48438E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26607E1
iondef2_imon=1.57976E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.97419E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22095E0
ionrepsh_imon=9.18673E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33807E1
lens5b_imon=2.17973E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74624E1
cs_ef2b_imon=3.12517E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44547E0
os_ea2_imon=-8.85367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00494E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71323E1
cs_ef2a_imon=3.18044E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.74737E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08885E-1
os_ef2bup_imon=-5.37077E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.38673E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.27047E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02075E1
cs_anode2_imon=2.09138E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72906E1
iondef1_imon=1.09309E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67774E1
iondef4_imon=1.08328E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.22078E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.62554E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13209E0
cs_ionaccel_imon=-1.02698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47113E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56133E1
einzel_imon=7.56718E-6
window_vset=0.0E0
window_vmon=1.55595E-1
window_imon=-1.14764E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39057E-4
mask2_vset=0.0E0
mask2_vmon=-1.86662E1
mask2_imon=-6.53323E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=7.45808E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.69109E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50097E3
multb_neg_imon=7.20501E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.08842E0
defgridb_imon=6.18496E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33266E1
os_fil1_imon=9.42959E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07264E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62523E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30652E1
cs_fil1_imon=9.22874E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35749E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63103E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.05204E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01198E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.18965E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35385E-1
cs_fil2_imon=-2.17871E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07134E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2189E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8154E-1
res40_imon=-2.50994E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.16441E-1	-7.98488E-1	-9.13134E0	-9.14204E0	4.81606E-3	9.34124E-2	2.73039E1	-3.26773E1	-3.26567E1	2.6774E1	1.20281E-7	2.51758E-3	2.51758E-3	6.33065E-3	3.02581E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16536E-1	-7.98559E-1	-9.13141E0	-9.14178E0	4.43459E-3	9.36031E-2	2.73651E1	-3.26646E1	-3.26695E1	2.68869E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02396E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16536E-1	-7.98512E-1	-9.13107E0	-9.14187E0	4.62532E-3	9.35555E-2	2.7255E1	-3.26803E1	-3.25906E1	2.67763E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.99348E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16369E-1	-7.98702E-1	-9.13134E0	-9.14192E0	4.57764E-3	9.36985E-2	2.7298E1	-3.26573E1	-3.2629E1	2.67926E1	1.19991E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16536E-1	-7.98464E-1	-9.13148E0	-9.14156E0	4.88758E-3	9.377E-2	2.72953E1	-3.26634E1	-3.26187E1	2.67752E1	1.19705E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16536E-1	-7.98583E-1	-9.13143E0	-9.14185E0	4.74453E-3	9.38177E-2	2.73045E1	-3.26461E1	-3.26514E1	2.68154E1	1.20017E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16393E-1	-7.98607E-1	-9.13134E0	-9.14195E0	4.72069E-3	9.3627E-2	2.72684E1	-3.26627E1	-3.2584E1	2.67956E1	1.19861E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.1625E-1	-7.9844E-1	-9.1311E0	-9.14204E0	4.88758E-3	9.34601E-2	2.72715E1	-3.26502E1	-3.26001E1	2.68059E1	1.19851E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.02511E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16178E-1	-7.98273E-1	-9.13122E0	-9.14192E0	4.55379E-3	9.37223E-2	2.73129E1	-3.26362E1	-3.26422E1	2.68538E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16107E-1	-7.97868E-1	-9.13119E0	-9.14176E0	4.74453E-3	9.34601E-2	2.72696E1	-3.26476E1	-3.26434E1	2.68064E1	1.19809E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16059E-1	-7.98059E-1	-9.13119E0	-9.14209E0	4.45843E-3	9.34839E-2	2.736E1	-3.26419E1	-3.26219E1	2.68214E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16226E-1	-7.98392E-1	-9.13138E0	-9.14178E0	4.24385E-3	9.33647E-2	2.72534E1	-3.26579E1	-3.26026E1	2.68334E1	1.19646E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16059E-1	-7.98726E-1	-9.13112E0	-9.14166E0	4.79221E-3	9.34839E-2	2.73472E1	-3.26524E1	-3.26765E1	2.67607E1	1.19965E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.1594E-1	-7.98488E-1	-9.1315E0	-9.14178E0	4.86374E-3	9.35078E-2	2.72992E1	-3.2688E1	-3.26284E1	2.68128E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.15964E-1	-7.98702E-1	-9.13155E0	-9.14168E0	4.76837E-3	9.35793E-2	2.73424E1	-3.26597E1	-3.2626E1	2.67882E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00197E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.15868E-1	-7.98631E-1	-9.13146E0	-9.14183E0	4.74453E-3	9.35316E-2	2.72744E1	-3.26602E1	-3.2616E1	2.68146E1	1.20122E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.01085E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.15773E-1	-7.98345E-1	-9.13136E0	-9.1419E0	4.60148E-3	9.33409E-2	2.72892E1	-3.26608E1	-3.26514E1	2.67995E1	1.19749E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16059E-1	-7.98273E-1	-9.13138E0	-9.14166E0	4.57764E-3	9.32455E-2	2.73123E1	-3.26693E1	-3.26506E1	2.67595E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16059E-1	-7.98583E-1	-9.13155E0	-9.14185E0	4.81606E-3	9.34124E-2	2.72877E1	-3.26663E1	-3.26074E1	2.68148E1	1.19749E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.0071E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16131E-1	-7.98559E-1	-9.13148E0	-9.1419E0	4.72069E-3	9.35555E-2	2.72906E1	-3.26607E1	-3.26344E1	2.67774E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00563E-1
