[Scan]
initial_time=2016-01-28T19:57:25
final_time=2016-01-28T19:57:45
ip_count=19
run=1026
dataset=6
scan=453
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09348E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.37078E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=2.00429E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=3.73983E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-1.05691E-10
mult1=-9.60794E-9
mult2=-2.78648E-9
rf_tmon=-3.48501E-3
rf_agc=3.32435E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.69988E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63606E0
bslens_imon=2.33737E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20313E1
lens5a_imon=1.96077E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04843E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.10127E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02356E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04731E1
cs_ea1_imon=1.22654E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41847E0
lens1_imon=2.82588E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.96576E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04327E1
cs_ea2_imon=1.3988E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84544E1
cs_ef1a_imon=2.99676E-5
olens2_vset=9.7E-1
olens2_vmon=9.69648E-1
olens2_imon=1.2398E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.2722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14841E1
os_ea1_imon=2.42136E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22271E0
cs_ionrep_imon=9.69801E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91846E2
cs_nozzle_imon=1.93284E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.04026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.22133E-8
tplens_vset=1.4E-1
tplens_vmon=1.65E0
tplens_imon=-4.68779E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.4763E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.58025E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02885E2
lens6_imon=2.98397E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=3.92243E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26128E0
ionrepsh_imon=9.58782E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33952E1
lens5b_imon=2.17637E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49329E0
os_ea2_imon=-7.25887E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00546E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86612E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.37625E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.28202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.08495E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.08036E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.23146E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.58434E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-9.83303E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47057E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=1.80702E-1
window_imon=-1.13827E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86602E1
mask2_imon=-9.04015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.4832E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.8037E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.03143E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2534E0
defgridb_imon=5.96627E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.40102E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07888E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6317E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30573E1
cs_fil1_imon=9.25067E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33887E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63319E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83206E-2
os_fil2_imon=-2.82815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.94966E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.07965E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21936E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18157E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16774E-1	-7.98297E-1	-9.13162E0	-9.14187E0	5.03063E-3	9.35078E-2	2.72802E1	-3.26642E1	-3.26503E1	2.68198E1	1.20017E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00563E-1
2.0E0	3.5E1	1.0E0	3.16E2	1.6E2	-2.09565E0	-8.16703E-1	-7.98011E-1	-9.1315E0	-9.14204E0	5.10216E-3	9.32932E-2	2.72898E1	-3.26505E1	-3.26223E1	2.67471E1	1.19841E-7	2.52236E-3	2.52236E-3	6.33388E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16369E-1	-7.97939E-1	-9.13146E0	-9.14168E0	4.86374E-3	9.36031E-2	2.73387E1	-3.26822E1	-3.26376E1	2.67948E1	1.20084E-7	2.51804E-3	2.51804E-3	6.29624E-3	2.99879E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-8.16321E-1	-7.98297E-1	-9.13153E0	-9.14228E0	4.57764E-3	9.35078E-2	2.73009E1	-3.26591E1	-3.26272E1	2.68119E1	1.19891E-7	2.51393E-3	2.51393E-3	6.3074E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.16345E-1	-7.98178E-1	-9.13124E0	-9.14209E0	4.64916E-3	9.34601E-2	2.73235E1	-3.26768E1	-3.26236E1	2.68502E1	1.20383E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09657E0	-8.16512E-1	-7.98106E-1	-9.13131E0	-9.14195E0	4.74453E-3	9.34362E-2	2.72815E1	-3.26638E1	-3.26048E1	2.68088E1	1.20226E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09673E0	-8.16607E-1	-7.98297E-1	-9.13105E0	-9.1419E0	4.48227E-3	9.36985E-2	2.72871E1	-3.26747E1	-3.2614E1	2.68047E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09696E0	-8.16584E-1	-7.98249E-1	-9.1311E0	-9.14195E0	4.52995E-3	9.36031E-2	2.72931E1	-3.26783E1	-3.2623E1	2.68016E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.16798E-1	-7.98345E-1	-9.13129E0	-9.14197E0	4.69685E-3	9.34839E-2	2.73063E1	-3.26496E1	-3.26089E1	2.68364E1	1.20122E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16536E-1	-7.98488E-1	-9.13129E0	-9.14209E0	4.69685E-3	9.35555E-2	2.72853E1	-3.26747E1	-3.26254E1	2.6795E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.97394E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16584E-1	-7.98225E-1	-9.13122E0	-9.14209E0	5.05447E-3	9.37462E-2	2.72721E1	-3.26337E1	-3.26602E1	2.67956E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.97963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16393E-1	-7.9844E-1	-9.13129E0	-9.14176E0	4.31538E-3	9.34124E-2	2.7321E1	-3.2664E1	-3.25911E1	2.68046E1	1.20004E-7	2.52276E-3	2.52276E-3	6.34518E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16274E-1	-7.98154E-1	-9.1315E0	-9.14178E0	4.43459E-3	9.34124E-2	2.72939E1	-3.26478E1	-3.26537E1	2.67833E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16202E-1	-7.98321E-1	-9.13153E0	-9.14209E0	4.62532E-3	9.34839E-2	2.73001E1	-3.26663E1	-3.26277E1	2.68065E1	1.19653E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16345E-1	-7.98368E-1	-9.13129E0	-9.14199E0	4.673E-3	9.34839E-2	2.7239E1	-3.26787E1	-3.27319E1	2.67882E1	1.19919E-7	2.51549E-3	2.51549E-3	6.32273E-3	2.99179E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.16321E-1	-7.98512E-1	-9.13122E0	-9.14195E0	4.76837E-3	9.34124E-2	2.73176E1	-3.26784E1	-3.26322E1	2.67926E1	1.20045E-7	2.52066E-3	2.52066E-3	6.33021E-3	2.97823E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16441E-1	-7.98678E-1	-9.13129E0	-9.14221E0	4.88758E-3	9.35793E-2	2.72892E1	-3.26874E1	-3.26455E1	2.67613E1	1.19925E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99613E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16393E-1	-7.98512E-1	-9.13153E0	-9.1419E0	4.673E-3	9.37462E-2	2.72997E1	-3.26633E1	-3.26188E1	2.68099E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16178E-1	-7.98488E-1	-9.13136E0	-9.14195E0	4.673E-3	9.377E-2	2.73163E1	-3.26461E1	-3.26296E1	2.68028E1	1.19902E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09348E0	-8.16417E-1	-7.98631E-1	-9.13155E0	-9.14168E0	4.88758E-3	9.37223E-2	2.73135E1	-3.26747E1	-3.26266E1	2.68364E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
