[Scan]
initial_time=2016-01-28T19:57:52
final_time=2016-01-28T19:58:12
ip_count=19
run=1026
dataset=6
scan=454
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.37611E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.0522E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=3.64351E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=-1.07098E-10
mult1=-9.19856E-9
mult2=-2.68069E-9
rf_tmon=-2.3855E-3
rf_agc=3.44932E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.72049E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67095E0
bslens_imon=2.53938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1978E1
lens5a_imon=2.00558E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04972E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=3.08541E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02037E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05221E1
cs_ea1_imon=1.23021E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41725E0
lens1_imon=2.67896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03831E1
cs_ea2_imon=1.40982E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.98811E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.24487E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15214E1
os_ea1_imon=2.41916E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25271E0
cs_ionrep_imon=9.5364E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93258E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.05144E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.22594E-8
tplens_vset=1.4E-1
tplens_vmon=1.64205E0
tplens_imon=-4.17357E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.50018E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.57217E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98419E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=3.95796E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26801E0
ionrepsh_imon=9.23154E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33946E1
lens5b_imon=2.18004E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4835E0
os_ea2_imon=-7.40579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00476E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01028E-1
os_ef2bup_imon=-5.42699E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.3849E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.31104E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.08784E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.08991E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.26072E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.62954E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11152E0
cs_ionaccel_imon=-1.12025E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=1.83105E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.91661E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.53558E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.03877E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36371E0
defgridb_imon=5.99198E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33307E1
os_fil1_imon=9.37531E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0769E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62278E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30597E1
cs_fil1_imon=9.2449E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32986E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63096E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81892E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.18211E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21875E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.70104E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16369E-1	-7.9844E-1	-9.13136E0	-9.14204E0	5.03063E-3	9.3174E-2	2.72638E1	-3.26803E1	-3.2616E1	2.68382E1	1.19809E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.02396E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16441E-1	-7.98845E-1	-9.13172E0	-9.14178E0	5.05447E-3	9.33647E-2	2.72922E1	-3.26707E1	-3.26291E1	2.67806E1	1.19851E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16202E-1	-7.98631E-1	-9.13129E0	-9.14152E0	4.93526E-3	9.34124E-2	2.73316E1	-3.26732E1	-3.26248E1	2.67848E1	1.20191E-7	2.51693E-3	2.51693E-3	6.26289E-3	3.00942E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16178E-1	-7.98655E-1	-9.13167E0	-9.14192E0	4.57764E-3	9.33647E-2	2.73228E1	-3.26585E1	-3.2648E1	2.6828E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16011E-1	-7.98583E-1	-9.13188E0	-9.14185E0	4.673E-3	9.33886E-2	2.72939E1	-3.26443E1	-3.26319E1	2.67776E1	1.20017E-7	2.51935E-3	2.51935E-3	6.31563E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16321E-1	-7.98726E-1	-9.13191E0	-9.14195E0	5.22137E-3	9.35555E-2	2.73267E1	-3.26356E1	-3.26458E1	2.67686E1	1.19851E-7	2.51525E-3	2.51525E-3	6.29128E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16274E-1	-7.98607E-1	-9.13165E0	-9.14171E0	4.74453E-3	9.35555E-2	2.7301E1	-3.26408E1	-3.2659E1	2.68642E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16178E-1	-7.98464E-1	-9.13153E0	-9.14197E0	4.76837E-3	9.38177E-2	2.73112E1	-3.26756E1	-3.2604E1	2.68431E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.16035E-1	-7.98416E-1	-9.13174E0	-9.14183E0	4.72069E-3	9.32932E-2	2.72787E1	-3.26554E1	-3.26338E1	2.67758E1	1.19965E-7	2.51662E-3	2.51662E-3	6.26916E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16202E-1	-7.9844E-1	-9.1315E0	-9.14195E0	4.673E-3	9.35078E-2	2.73611E1	-3.26585E1	-3.26354E1	2.68731E1	1.19965E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16298E-1	-7.98655E-1	-9.13167E0	-9.14187E0	4.79221E-3	9.35555E-2	2.7257E1	-3.2632E1	-3.2605E1	2.68028E1	1.20311E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.98665E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16107E-1	-7.9875E-1	-9.13174E0	-9.14195E0	4.81606E-3	9.3627E-2	2.73334E1	-3.26809E1	-3.26549E1	2.68184E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98481E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16131E-1	-7.98512E-1	-9.13177E0	-9.1418E0	4.69685E-3	9.38177E-2	2.72709E1	-3.26791E1	-3.26006E1	2.68176E1	1.20036E-7	2.51538E-3	2.51538E-3	6.32099E-3	3.00378E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16154E-1	-7.98583E-1	-9.13136E0	-9.14173E0	4.81606E-3	9.38416E-2	2.72714E1	-3.26425E1	-3.26946E1	2.67623E1					
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16083E-1	-7.98345E-1	-9.13138E0	-9.14176E0	4.8399E-3	9.38654E-2	2.74172E1	-3.27817E1	-3.25894E1	2.68262E1	1.20226E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16131E-1	-7.98535E-1	-9.13148E0	-9.14187E0	4.91142E-3	9.35316E-2	2.72997E1	-3.26615E1	-3.26536E1	2.6825E1	1.19965E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.01085E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.16083E-1	-7.9875E-1	-9.13117E0	-9.14197E0	4.93526E-3	9.34601E-2	2.73296E1	-3.26554E1	-3.26278E1	2.68207E1	1.20414E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.1625E-1	-7.98702E-1	-9.13155E0	-9.14202E0	4.48227E-3	9.35555E-2	2.7311E1	-3.26402E1	-3.2626E1	2.67884E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.0201E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16202E-1	-7.98607E-1	-9.13141E0	-9.14199E0	4.52995E-3	9.377E-2	2.7278E1	-3.26679E1	-3.26225E1	2.68366E1	1.19705E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.16298E-1	-7.98702E-1	-9.13126E0	-9.14209E0	4.45843E-3	9.39131E-2	2.73087E1	-3.26753E1	-3.26224E1	2.68004E1	1.19697E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1
