[Scan]
initial_time=2016-01-28T19:58:19
final_time=2016-01-28T19:58:38
ip_count=19
run=1026
dataset=6
scan=455
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.16178E-1
ql1_imon=1.37326E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.99865E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=3.84963E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=-1.03939E-10
mult1=-8.96979E-9
mult2=-2.63877E-9
rf_tmon=-5.19136E-3
rf_agc=3.31954E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.64433E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66281E0
bslens_imon=2.46514E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19955E1
lens5a_imon=1.99574E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.04846E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53488E1
cs_ef1b_imon=3.10137E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05115E1
cs_ea1_imon=1.22646E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38415E0
lens1_imon=2.66328E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64574E1
os_ef1alow_imon=2.96028E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04119E1
cs_ea2_imon=1.41209E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84145E1
cs_ef1a_imon=3.00546E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.23759E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.29895E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14859E1
os_ea1_imon=2.42853E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63351E1
os_ef1bup_imon=3.0767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23472E0
cs_ionrep_imon=9.63307E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93403E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0196E1
cs_anode1_imon=2.04212E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.22404E-8
tplens_vset=1.4E-1
tplens_vmon=1.62927E0
tplens_imon=-2.77588E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.51776E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.56017E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98502E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.97681E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29265E0
ionrepsh_imon=9.30283E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33907E1
lens5b_imon=2.17025E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74461E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48037E0
os_ea2_imon=-7.3297E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.1813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06209E0
os_ef2alow_imon=-2.64409E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71746E-1
os_ef2bup_imon=-5.42429E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10996E1
os_restr2_imon=3.38912E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.32223E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.10849E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72895E1
iondef1_imon=1.09818E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.07912E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.12409E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.62069E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13825E0
cs_ionaccel_imon=-1.17753E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47292E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56336E1
einzel_imon=7.4828E-6
window_vset=0.0E0
window_vmon=1.66136E-1
window_imon=-1.18101E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39112E-4
mask2_vset=0.0E0
mask2_vmon=-1.86553E1
mask2_imon=-7.25748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=8.05835E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.79997E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=6.78606E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2325E0
defgridb_imon=5.89615E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.45125E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07497E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62689E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30603E1
cs_fil1_imon=9.25779E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29204E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63278E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10826E-2
os_fil2_imon=-2.66919E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.08216E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33772E-1
cs_fil2_imon=-2.35641E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.07602E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21947E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.04063E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.15389E-1
res40_imon=-2.4599E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16274E-1	-7.98821E-1	-9.13162E0	-9.14183E0	4.74453E-3	9.40561E-2	2.73231E1	-3.26669E1	-3.26663E1	2.67974E1	1.20158E-7	2.51417E-3	2.51417E-3	6.28056E-3	3.0148E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16464E-1	-7.98368E-1	-9.13143E0	-9.14171E0	4.86374E-3	9.37462E-2	2.72867E1	-3.26621E1	-3.26438E1	2.68076E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16464E-1	-7.98559E-1	-9.13138E0	-9.14156E0	4.673E-3	9.3627E-2	2.72773E1	-3.2637E1	-3.26191E1	2.68041E1	1.20084E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.0201E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16441E-1	-7.98416E-1	-9.13148E0	-9.14185E0	4.72069E-3	9.36508E-2	2.72744E1	-3.26354E1	-3.2636E1	2.68418E1	1.1979E-7	2.51603E-3	2.51603E-3	6.3074E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16464E-1	-7.98416E-1	-9.13136E0	-9.14211E0	4.55379E-3	9.3627E-2	2.73009E1	-3.26759E1	-3.26957E1	2.68052E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16655E-1	-7.98368E-1	-9.13146E0	-9.14176E0	4.57764E-3	9.38892E-2	2.72528E1	-3.26561E1	-3.26278E1	2.67992E1	1.20278E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01871E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16226E-1	-7.98178E-1	-9.13129E0	-9.14176E0	4.8399E-3	9.377E-2	2.72965E1	-3.2656E1	-3.26052E1	2.67902E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16369E-1	-7.98655E-1	-9.13138E0	-9.14197E0	4.88758E-3	9.35793E-2	2.72802E1	-3.26393E1	-3.26173E1	2.68487E1	1.19959E-7	2.51376E-3	2.51376E-3	6.32371E-3	3.02975E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16441E-1	-7.98559E-1	-9.13136E0	-9.14195E0	4.88758E-3	9.38416E-2	2.72622E1	-3.26511E1	-3.26138E1	2.67751E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16345E-1	-7.9875E-1	-9.13157E0	-9.14209E0	4.69685E-3	9.38654E-2	2.72815E1	-3.26596E1	-3.26543E1	2.6818E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16274E-1	-7.98512E-1	-9.13155E0	-9.14199E0	4.74453E-3	9.38892E-2	2.72806E1	-3.26603E1	-3.26627E1	2.68013E1	1.20069E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16369E-1	-7.9844E-1	-9.1315E0	-9.14204E0	4.69685E-3	9.377E-2	2.72921E1	-3.2688E1	-3.26307E1	2.67944E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.96671E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.1625E-1	-7.98678E-1	-9.13136E0	-9.14202E0	4.91142E-3	9.37223E-2	2.7311E1	-3.26738E1	-3.25977E1	2.6818E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16345E-1	-7.98678E-1	-9.13157E0	-9.14197E0	4.95911E-3	9.37462E-2	2.72824E1	-3.26462E1	-3.26572E1	2.67926E1	1.19941E-7	2.51393E-3	2.51393E-3	6.30212E-3	2.99845E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16154E-1	-7.98559E-1	-9.13126E0	-9.1418E0	4.81606E-3	9.37223E-2	2.7355E1	-3.273E1	-3.26705E1	2.68232E1	1.20031E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.0201E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16321E-1	-7.98368E-1	-9.1315E0	-9.14204E0	4.8399E-3	9.33886E-2	2.73075E1	-3.26759E1	-3.26326E1	2.68112E1	1.20084E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.02813E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16011E-1	-7.98512E-1	-9.13169E0	-9.1418E0	4.86374E-3	9.37462E-2	2.73369E1	-3.26374E1	-3.26026E1	2.68046E1	1.198E-7	2.52169E-3	2.52169E-3	6.34518E-3	3.04063E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16107E-1	-7.98512E-1	-9.13143E0	-9.14199E0	4.69685E-3	9.37939E-2	2.72909E1	-3.26679E1	-3.26703E1	2.68172E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02396E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.16321E-1	-7.98512E-1	-9.13169E0	-9.14159E0	4.88758E-3	9.36508E-2	2.72579E1	-3.26467E1	-3.26042E1	2.68076E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16178E-1	-7.98321E-1	-9.13129E0	-9.14218E0	4.57764E-3	9.34601E-2	2.72895E1	-3.26603E1	-3.26176E1	2.6792E1	1.19851E-7	2.52707E-3	2.52707E-3	6.3074E-3	3.04063E-1
