[Scan]
initial_time=2016-01-28T19:59:12
final_time=2016-01-28T19:59:32
ip_count=19
run=1026
dataset=6
scan=457
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08716E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=1.37176E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.00883E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=3.77679E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-8.57115E-11
mult1=-9.83671E-9
mult2=-2.73458E-9
rf_tmon=-4.60856E-3
rf_agc=3.3628E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.6765E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.43354E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=1.96138E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=3.10798E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04923E1
cs_ea1_imon=1.22908E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4227E0
lens1_imon=2.58219E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64464E1
os_ef1alow_imon=2.95924E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03649E1
cs_ea2_imon=1.40039E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84464E1
cs_ef1a_imon=2.99885E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.24405E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11343E1
os_restr1_imon=4.28991E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15477E1
os_ea1_imon=2.39921E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.08852E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=9.72118E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9184E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02134E1
cs_anode1_imon=2.05185E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.22814E-8
tplens_vset=1.4E-1
tplens_vmon=1.63848E0
tplens_imon=-2.03323E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26026E1
iondef3_imon=1.50409E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.5586E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.95614E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28218E0
ionrepsh_imon=9.28583E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7475E1
cs_ef2b_imon=3.13369E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51047E0
os_ea2_imon=-7.27156E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7131E1
cs_ef2a_imon=3.18965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.71012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85067E-1
os_ef2bup_imon=-5.41039E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=3.39225E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.28796E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.09355E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.0737E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66256E1
iondef4_imon=1.08329E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.25945E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.64575E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1423E0
cs_ionaccel_imon=-1.12888E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47191E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56376E1
einzel_imon=7.74344E-6
window_vset=0.0E0
window_vmon=1.69611E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.86471E1
mask2_imon=-7.08371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92696E3
multa_neg_imon=7.02769E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.8401E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.97979E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27858E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.3803E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07289E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62841E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30549E1
cs_fil1_imon=9.23306E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29957E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63059E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.54755E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96448E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.02146E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3552E-1
cs_fil2_imon=-2.59968E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11884E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21825E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.1481E-1
res40_imon=-2.52593E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16464E-1	-7.98607E-1	-9.13143E0	-9.14187E0	4.76837E-3	9.3627E-2	2.72931E1	-3.26266E1	-3.26116E1	2.69163E1	1.20055E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99686E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16679E-1	-7.98368E-1	-9.13131E0	-9.14209E0	4.62532E-3	9.36031E-2	2.73345E1	-3.26609E1	-3.25749E1	2.67577E1	1.20311E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16321E-1	-7.97939E-1	-9.13107E0	-9.14214E0	4.62532E-3	9.35793E-2	2.73115E1	-3.26706E1	-3.26301E1	2.68123E1	1.20191E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.0041E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16536E-1	-7.98368E-1	-9.13124E0	-9.14221E0	4.55379E-3	9.34839E-2	2.7302E1	-3.26407E1	-3.26529E1	2.69417E1	1.20042E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16298E-1	-7.98392E-1	-9.13136E0	-9.14228E0	4.74453E-3	9.35316E-2	2.72889E1	-3.26494E1	-3.26128E1	2.68082E1	1.20084E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.0041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16441E-1	-7.98583E-1	-9.13141E0	-9.14207E0	4.3869E-3	9.37462E-2	2.73039E1	-3.26615E1	-3.26434E1	2.68046E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16464E-1	-7.98535E-1	-9.13131E0	-9.14199E0	4.64916E-3	9.34839E-2	2.73021E1	-3.26514E1	-3.26148E1	2.68823E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.16417E-1	-7.98345E-1	-9.13141E0	-9.14187E0	4.69685E-3	9.35793E-2	2.72702E1	-3.26585E1	-3.26242E1	2.67541E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.9892E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16083E-1	-7.98416E-1	-9.13153E0	-9.1419E0	4.55379E-3	9.39608E-2	2.72862E1	-3.2629E1	-3.2629E1	2.69169E1	1.19705E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.1625E-1	-7.98512E-1	-9.13162E0	-9.14207E0	4.72069E-3	9.36508E-2	2.73021E1	-3.26861E1	-3.26554E1	2.67625E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16035E-1	-7.98225E-1	-9.13162E0	-9.14192E0	4.673E-3	9.35555E-2	2.72809E1	-3.26608E1	-3.26685E1	2.67955E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.03545E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16035E-1	-7.98488E-1	-9.13143E0	-9.14192E0	4.76837E-3	9.36747E-2	2.73267E1	-3.26729E1	-3.2602E1	2.6804E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01995E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16131E-1	-7.98488E-1	-9.13143E0	-9.14166E0	4.81606E-3	9.35555E-2	2.72979E1	-3.26711E1	-3.26074E1	2.6797E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.97704E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16059E-1	-7.98392E-1	-9.13155E0	-9.14178E0	4.64916E-3	9.35793E-2	2.73207E1	-3.26867E1	-3.2635E1	2.67387E1	1.20084E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.98554E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.1594E-1	-7.98273E-1	-9.13148E0	-9.14173E0	4.74453E-3	9.36031E-2	2.73151E1	-3.2672E1	-3.26301E1	2.68094E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.15964E-1	-7.98345E-1	-9.13129E0	-9.14185E0	4.86374E-3	9.36747E-2	2.73285E1	-3.26849E1	-3.26284E1	2.67535E1	1.20055E-7	2.52707E-3	2.52707E-3	6.28056E-3	2.9943E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.15892E-1	-7.98154E-1	-9.13129E0	-9.14216E0	4.86374E-3	9.36747E-2	2.73283E1	-3.2666E1	-3.26585E1	2.68047E1	1.20226E-7	2.51662E-3	2.51662E-3	6.28006E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16107E-1	-7.98488E-1	-9.13098E0	-9.14216E0	4.79221E-3	9.3627E-2	2.72921E1	-3.26384E1	-3.26201E1	2.67561E1	1.2026E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16178E-1	-7.9844E-1	-9.13112E0	-9.14226E0	4.91142E-3	9.37462E-2	2.73165E1	-3.26819E1	-3.25719E1	2.68322E1	1.19891E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.99093E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16154E-1	-7.98464E-1	-9.13126E0	-9.14178E0	4.76837E-3	9.35316E-2	2.73267E1	-3.2647E1	-3.26026E1	2.66256E1	1.19965E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9874E-1
