[Scan]
initial_time=2016-01-28T19:59:39
final_time=2016-01-28T19:59:59
ip_count=19
run=1026
dataset=6
scan=458
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.36449E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.05064E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=3.91555E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-1.10805E-10
mult1=-9.58953E-9
mult2=-2.7226E-9
rf_tmon=-4.92912E-3
rf_agc=3.33173E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.65613E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65352E0
bslens_imon=2.36832E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19562E1
lens5a_imon=1.97658E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.09623E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05126E1
cs_ea1_imon=1.24802E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4044E0
lens1_imon=2.33948E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04039E1
cs_ea2_imon=1.41313E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.99531E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.25116E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=4.28878E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15546E1
os_ea1_imon=2.41314E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6387E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2509E0
cs_ionrep_imon=9.83418E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93283E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.03882E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.22696E-8
tplens_vset=1.4E-1
tplens_vmon=1.6144E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26305E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26495E1
iondef2_imon=1.58436E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.00571E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=9.42321E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51105E0
os_ea2_imon=-7.8962E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78203E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.09937E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73534E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67639E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.1269E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.632E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-1.10223E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.57972E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86548E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=6.98626E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.38063E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.99708E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24818E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.37266E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08278E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6293E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30588E1
cs_fil1_imon=9.26262E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28301E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63059E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.81576E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.06807E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21775E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33948E-3
inlet_lpb_pmon=3.02566E-1
chamber_ion_pmon=1.19972E-7
chamber_cvt_pmon=2.51937E-3
foreline_cvt_pmon=2.51937E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.71305E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16226E-1	-7.98702E-1	-9.13138E0	-9.14223E0	4.41074E-3	9.32693E-2	2.72774E1	-3.26449E1	-3.2626E1	2.68551E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.98481E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16631E-1	-7.98392E-1	-9.13117E0	-9.14216E0	4.41074E-3	9.32455E-2	2.73388E1	-3.26823E1	-3.26315E1	2.67078E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16512E-1	-7.98655E-1	-9.13148E0	-9.14211E0	4.69685E-3	9.377E-2	2.73045E1	-3.26677E1	-3.26341E1	2.68922E1	1.20036E-7	2.52189E-3	2.52189E-3	6.33734E-3	3.01674E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16369E-1	-7.98416E-1	-9.13134E0	-9.14187E0	4.79221E-3	9.36747E-2	2.72949E1	-3.26813E1	-3.25888E1	2.67295E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-8.16417E-1	-7.98655E-1	-9.13134E0	-9.14202E0	4.55379E-3	9.35316E-2	2.72943E1	-3.26957E1	-3.26206E1	2.6786E1	1.19705E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.1625E-1	-7.98965E-1	-9.13134E0	-9.14199E0	4.45843E-3	9.37939E-2	2.73129E1	-3.26861E1	-3.2635E1	2.68286E1	1.19809E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.1625E-1	-7.98678E-1	-9.13162E0	-9.1419E0	4.86374E-3	9.36031E-2	2.72638E1	-3.26437E1	-3.2626E1	2.67653E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.15988E-1	-7.9844E-1	-9.13165E0	-9.14216E0	4.72069E-3	9.33886E-2	2.73105E1	-3.2644E1	-3.25906E1	2.68647E1	1.20069E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01085E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16035E-1	-7.98392E-1	-9.13124E0	-9.14204E0	4.79221E-3	9.36031E-2	2.73051E1	-3.26633E1	-3.2611E1	2.66184E1	1.20158E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00197E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.15821E-1	-7.98297E-1	-9.13146E0	-9.14216E0	4.72069E-3	9.32932E-2	2.73045E1	-3.26579E1	-3.26296E1	2.67577E1	1.19757E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16107E-1	-7.9875E-1	-9.13138E0	-9.14192E0	4.8399E-3	9.33647E-2	2.73357E1	-3.26518E1	-3.2587E1	2.68839E1	1.19749E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16011E-1	-7.98416E-1	-9.13119E0	-9.14223E0	4.98295E-3	9.37462E-2	2.72739E1	-3.26777E1	-3.26182E1	2.67463E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.15988E-1	-7.98655E-1	-9.13141E0	-9.14197E0	4.93526E-3	9.33409E-2	2.73129E1	-3.26663E1	-3.26591E1	2.67692E1	1.20174E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16035E-1	-7.98368E-1	-9.13148E0	-9.14209E0	4.74453E-3	9.377E-2	2.73281E1	-3.26443E1	-3.26443E1	2.68186E1	1.2054E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00302E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16083E-1	-7.98416E-1	-9.13143E0	-9.14187E0	4.69685E-3	9.37223E-2	2.73369E1	-3.26879E1	-3.26272E1	2.68232E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16011E-1	-7.98368E-1	-9.13148E0	-9.14207E0	4.60148E-3	9.38177E-2	2.73217E1	-3.26577E1	-3.263E1	2.68291E1	1.2033E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01871E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16202E-1	-7.98368E-1	-9.13146E0	-9.14171E0	4.57764E-3	9.38892E-2	2.73353E1	-3.26496E1	-3.26614E1	2.68591E1	1.19857E-7	2.51879E-3	2.51879E-3	6.31073E-3	3.01529E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16202E-1	-7.98368E-1	-9.13126E0	-9.14183E0	4.673E-3	9.377E-2	2.73115E1	-3.26886E1	-3.26138E1	2.68227E1	1.20119E-7	2.50828E-3	2.50828E-3	6.32087E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16226E-1	-7.98655E-1	-9.13134E0	-9.14187E0	4.62532E-3	9.36747E-2	2.73165E1	-3.26383E1	-3.26611E1	2.67181E1	1.19831E-7	2.5199E-3	2.5199E-3	6.31779E-3	3.00741E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16321E-1	-7.98273E-1	-9.13155E0	-9.14195E0	4.673E-3	9.3627E-2	2.73534E1	-3.26495E1	-3.26305E1	2.67639E1	1.19972E-7	2.51937E-3	2.51937E-3	6.33948E-3	3.02566E-1
