[Scan]
initial_time=2016-01-28T20:00:32
final_time=2016-01-28T20:00:52
ip_count=19
run=1026
dataset=6
scan=460
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.38142E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=2.03006E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=3.35395E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-8.67486E-11
mult1=-1.00414E-8
mult2=-2.68867E-9
rf_tmon=-4.65662E-3
rf_agc=3.27688E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=1.73855E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62768E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19947E1
lens5a_imon=1.97478E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=3.09803E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05186E1
cs_ea1_imon=1.25271E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42483E0
lens1_imon=2.55938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.39835E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=3.00252E-5
olens2_vset=9.7E-1
olens2_vmon=9.69648E-1
olens2_imon=1.24371E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.2931E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.42468E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.639E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=9.74405E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.04134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.22987E-8
tplens_vset=1.4E-1
tplens_vmon=1.57534E0
tplens_imon=-3.57025E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.48739E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.57751E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.97117E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2527E0
ionrepsh_imon=9.25739E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33195E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50444E0
os_ea2_imon=-8.36484E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.46664E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11027E1
os_restr2_imon=3.38851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.29424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01515E1
cs_anode2_imon=2.08892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.06597E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67493E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.24045E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.64351E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15537E0
cs_ionaccel_imon=-1.11305E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=1.63884E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92716E3
multa_neg_imon=7.18093E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.44192E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.17012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38953E0
defgridb_imon=6.21841E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33256E1
os_fil1_imon=9.42696E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06668E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63251E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30588E1
cs_fil1_imon=9.26611E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30163E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63627E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.58342E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22033E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.98481E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.07345E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16131E-1	-7.98464E-1	-9.13146E0	-9.14159E0	4.60148E-3	9.3627E-2	2.73163E1	-3.26762E1	-3.26278E1	2.66436E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16441E-1	-7.98464E-1	-9.13179E0	-9.14207E0	4.79221E-3	9.34362E-2	2.72922E1	-3.26444E1	-3.26474E1	2.67025E1	1.20055E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16441E-1	-7.98273E-1	-9.13143E0	-9.14183E0	4.88758E-3	9.34124E-2	2.7337E1	-3.26744E1	-3.26337E1	2.68929E1	1.19978E-7	2.51248E-3	2.51248E-3	6.31299E-3	2.99613E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16703E-1	-7.98321E-1	-9.13138E0	-9.14176E0	4.91142E-3	9.3627E-2	2.73111E1	-3.26819E1	-3.25924E1	2.67283E1	1.20055E-7	2.52169E-3	2.52169E-3	6.29128E-3	3.00453E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16488E-1	-7.98488E-1	-9.13131E0	-9.14161E0	4.60148E-3	9.36747E-2	2.72889E1	-3.2653E1	-3.26428E1	2.68436E1	1.20174E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16441E-1	-7.98631E-1	-9.13146E0	-9.14171E0	4.74453E-3	9.37223E-2	2.72763E1	-3.26687E1	-3.26392E1	2.68809E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.1625E-1	-7.98631E-1	-9.13153E0	-9.14161E0	4.673E-3	9.37462E-2	2.73033E1	-3.26657E1	-3.2596E1	2.68214E1	1.20435E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16083E-1	-7.98845E-1	-9.13138E0	-9.14166E0	4.86374E-3	9.34124E-2	2.72656E1	-3.26467E1	-3.26396E1	2.68557E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16107E-1	-7.98631E-1	-9.13141E0	-9.14176E0	5.00679E-3	9.32693E-2	2.73339E1	-3.26615E1	-3.2602E1	2.66779E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.16131E-1	-7.98607E-1	-9.13124E0	-9.14197E0	4.64916E-3	9.33409E-2	2.73328E1	-3.26673E1	-3.26502E1	2.67205E1	1.19965E-7	2.52318E-3	2.52318E-3	6.28552E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16131E-1	-7.98702E-1	-9.13103E0	-9.14199E0	4.52995E-3	9.36031E-2	2.72574E1	-3.26223E1	-3.2577E1	2.6852E1	1.20106E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.16393E-1	-7.98941E-1	-9.13131E0	-9.14173E0	4.673E-3	9.35316E-2	2.72973E1	-3.26488E1	-3.26242E1	2.67932E1	1.20617E-7	2.51693E-3	2.51693E-3	6.29067E-3	3.00676E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.1656E-1	-7.98941E-1	-9.13134E0	-9.14195E0	4.91142E-3	9.3317E-2	2.73246E1	-3.26708E1	-3.25865E1	2.68484E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.16154E-1	-7.98678E-1	-9.13117E0	-9.1418E0	4.95911E-3	9.36508E-2	2.73167E1	-3.26848E1	-3.26211E1	2.68923E1	1.20106E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.0071E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09325E0	-8.16226E-1	-7.98869E-1	-9.13112E0	-9.1418E0	4.72069E-3	9.35555E-2	2.72668E1	-3.26526E1	-3.26419E1	2.66646E1	1.20031E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.9829E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-8.1656E-1	-7.98798E-1	-9.13119E0	-9.1418E0	4.55379E-3	9.35793E-2	2.72715E1	-3.26419E1	-3.26366E1	2.66449E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.1656E-1	-7.98607E-1	-9.13143E0	-9.14149E0	4.57764E-3	9.3627E-2	2.72618E1	-3.26524E1	-3.25966E1	2.67277E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16464E-1	-7.98297E-1	-9.13119E0	-9.14161E0	4.64916E-3	9.35793E-2	2.73145E1	-3.26744E1	-3.26313E1	2.68076E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.1687E-1	-7.98583E-1	-9.1315E0	-9.14197E0	4.26769E-3	9.36985E-2	2.72865E1	-3.26098E1	-3.26134E1	2.68388E1	1.19953E-7	2.51203E-3	2.51203E-3	6.29665E-3	2.99686E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16464E-1	-7.98607E-1	-9.13146E0	-9.14204E0	4.19617E-3	9.35078E-2	2.73189E1	-3.26554E1	-3.26446E1	2.67493E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.98481E-1
