[Scan]
initial_time=2016-01-28T20:00:59
final_time=2016-01-28T20:01:19
ip_count=19
run=1026
dataset=6
scan=461
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.36276E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=1.98231E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=3.34525E-10
ql4_vset=
ql4_vmon=-9.1423E0
ql4_imon=-8.20398E-11
mult1=-9.8433E-9
mult2=-2.77887E-9
rf_tmon=-5.6235E-3
rf_agc=3.14307E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.66183E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66149E0
bslens_imon=2.73085E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19742E1
lens5a_imon=1.97731E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53615E1
cs_ef1b_imon=3.10728E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04675E1
cs_ea1_imon=1.22483E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4404E0
lens1_imon=2.63528E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64603E1
os_ef1alow_imon=2.96688E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.40286E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84603E1
cs_ef1a_imon=3.00824E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.2502E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11089E1
os_restr1_imon=4.284E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15718E1
os_ea1_imon=2.43142E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63931E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2167E0
cs_ionrep_imon=9.60438E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93303E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01879E1
cs_anode1_imon=2.06332E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.22062E-8
tplens_vset=1.4E-1
tplens_vmon=1.57949E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26438E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26511E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98569E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=3.96442E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30165E0
ionrepsh_imon=9.13718E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33369E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74559E1
cs_ef2b_imon=3.11076E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54469E0
os_ea2_imon=-8.1918E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.00506E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.18339E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04587E0
os_ef2alow_imon=-2.63019E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74642E-1
os_ef2bup_imon=-5.2401E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1084E1
os_restr2_imon=3.39295E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23098E2
cs_ionfoca_imon=6.29751E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01873E1
cs_anode2_imon=2.10641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.09104E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67193E1
iondef4_imon=1.08851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.22718E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.66452E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13709E0
cs_ionaccel_imon=-1.18448E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47344E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5611E1
einzel_imon=7.52103E-6
window_vset=0.0E0
window_vmon=1.59765E-1
window_imon=-1.03505E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.86582E1
mask2_imon=-9.09936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.59045E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.45077E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.04185E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27563E0
defgridb_imon=6.07205E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33282E1
os_fil1_imon=9.44308E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08522E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63029E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30635E1
cs_fil1_imon=9.25501E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33606E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64009E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.96467E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83706E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.88731E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33897E-1
cs_fil2_imon=-2.55914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43161E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21916E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=2.99845E-1
chamber_ion_pmon=1.20092E-7
chamber_cvt_pmon=2.50867E-3
foreline_cvt_pmon=2.50867E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.85271E-1
res40_imon=-2.36607E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16655E-1	-7.98607E-1	-9.13174E0	-9.14183E0	4.43459E-3	9.33886E-2	2.72626E1	-3.26809E1	-3.26337E1	2.70749E1	1.20042E-7	2.51919E-3	2.51919E-3	6.29157E-3	3.02621E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16679E-1	-7.98154E-1	-9.13198E0	-9.14154E0	4.64916E-3	9.32693E-2	2.73525E1	-3.26366E1	-3.25973E1	2.68862E1	1.20122E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.02922E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16464E-1	-7.98321E-1	-9.13203E0	-9.14202E0	4.64916E-3	9.31263E-2	2.72889E1	-3.26579E1	-3.26735E1	2.69501E1	1.20297E-7	2.52139E-3	2.52139E-3	6.34099E-3	3.01742E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16488E-1	-7.98321E-1	-9.13157E0	-9.14211E0	4.55379E-3	9.30071E-2	2.72793E1	-3.2644E1	-3.25918E1	2.67343E1	1.20311E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16464E-1	-7.98321E-1	-9.13167E0	-9.14202E0	4.81606E-3	9.32217E-2	2.73351E1	-3.26573E1	-3.25918E1	2.68743E1	1.20069E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.1625E-1	-7.98273E-1	-9.13165E0	-9.14173E0	4.52995E-3	9.36747E-2	2.73027E1	-3.26537E1	-3.26431E1	2.68708E1	1.20174E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9874E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16464E-1	-7.98225E-1	-9.13167E0	-9.14187E0	4.673E-3	9.3627E-2	2.72648E1	-3.26609E1	-3.2647E1	2.68899E1	1.2026E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16345E-1	-7.98273E-1	-9.13181E0	-9.14171E0	4.57764E-3	9.37462E-2	2.73369E1	-3.26621E1	-3.2635E1	2.67535E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16274E-1	-7.98416E-1	-9.13165E0	-9.14178E0	4.64916E-3	9.36031E-2	2.7298E1	-3.26756E1	-3.26331E1	2.69091E1	1.20069E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.1625E-1	-7.98774E-1	-9.13146E0	-9.14192E0	4.60148E-3	9.38416E-2	2.72757E1	-3.26597E1	-3.26621E1	2.66574E1	1.19749E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01995E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16607E-1	-7.98583E-1	-9.13136E0	-9.14199E0	4.22001E-3	9.36747E-2	2.73472E1	-3.27101E1	-3.25737E1	2.6661E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16369E-1	-7.98488E-1	-9.13117E0	-9.14202E0	4.62532E-3	9.32932E-2	2.72787E1	-3.26837E1	-3.26603E1	2.68274E1	1.20017E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9978E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.1656E-1	-7.98249E-1	-9.13143E0	-9.14164E0	4.48227E-3	9.3174E-2	2.7346E1	-3.26651E1	-3.26753E1	2.68785E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16298E-1	-7.98416E-1	-9.13134E0	-9.14161E0	4.45843E-3	9.37462E-2	2.72841E1	-3.26663E1	-3.26182E1	2.68058E1	1.19902E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16464E-1	-7.98345E-1	-9.13126E0	-9.14159E0	4.41074E-3	9.33409E-2	2.73087E1	-3.26999E1	-3.2629E1	2.6831E1	1.19925E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.99879E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16298E-1	-7.98416E-1	-9.13131E0	-9.14202E0	4.31538E-3	9.37223E-2	2.73144E1	-3.26637E1	-3.26196E1	2.68412E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01871E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16226E-1	-7.98321E-1	-9.13174E0	-9.14166E0	4.673E-3	9.34124E-2	2.73472E1	-3.27035E1	-3.25809E1	2.69319E1	1.20142E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.00097E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16488E-1	-7.98488E-1	-9.13181E0	-9.14156E0	4.88758E-3	9.36985E-2	2.72811E1	-3.26579E1	-3.26512E1	2.68803E1	1.20487E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16417E-1	-7.98559E-1	-9.13165E0	-9.14178E0	4.8399E-3	9.37462E-2	2.73294E1	-3.26671E1	-3.26277E1	2.6642E1	1.20017E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.00041E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16655E-1	-7.98202E-1	-9.13165E0	-9.1423E0	4.64916E-3	9.377E-2	2.73033E1	-3.26511E1	-3.26438E1	2.67193E1	1.20092E-7	2.50867E-3	2.50867E-3	6.32858E-3	2.99845E-1
