[Scan]
initial_time=2016-01-28T20:01:26
final_time=2016-01-28T20:01:46
ip_count=19
run=1026
dataset=6
scan=462
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.1594E-1
ql1_imon=1.37471E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.97426E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.71146E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-9.0754E-11
mult1=-8.60857E-9
mult2=-2.66272E-9
rf_tmon=-2.51168E-3
rf_agc=3.42348E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.66054E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63984E0
bslens_imon=2.74713E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19882E1
lens5a_imon=1.9765E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05088E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53535E1
cs_ef1b_imon=3.10376E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02059E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.24494E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36218E0
lens1_imon=2.55246E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64829E1
os_ef1alow_imon=2.96909E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04138E1
cs_ea2_imon=1.39639E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84109E1
cs_ef1a_imon=2.99751E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.25226E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11539E1
os_restr1_imon=4.29208E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15339E1
os_ea1_imon=2.39347E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63454E1
os_ef1bup_imon=3.07146E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23458E0
cs_ionrep_imon=9.7318E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93404E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02036E1
cs_anode1_imon=2.06063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.22652E-8
tplens_vset=1.4E-1
tplens_vmon=1.66544E0
tplens_imon=-2.93578E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.48204E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.57821E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.95901E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24107E0
ionrepsh_imon=9.47873E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33496E1
lens5b_imon=2.17817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74547E1
cs_ef2b_imon=3.11505E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47597E0
os_ea2_imon=-4.57099E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00436E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71316E1
cs_ef2a_imon=3.18628E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0818E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13426E-1
os_ef2bup_imon=-5.51479E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10812E1
os_restr2_imon=3.39179E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.30279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01698E1
cs_anode2_imon=2.08983E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72522E1
iondef1_imon=1.09777E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66929E1
iondef4_imon=1.08406E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.20526E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.65952E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08343E0
cs_ionaccel_imon=-1.15932E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56081E1
einzel_imon=7.55939E-6
window_vset=0.0E0
window_vmon=1.61433E-1
window_imon=-9.53029E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39014E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-6.37754E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.9175E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.47306E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22484E0
defgridb_imon=6.21221E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.42777E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07868E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63248E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30539E1
cs_fil1_imon=9.24632E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36268E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63379E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94061E-2
os_fil2_imon=-2.76904E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96657E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.78037E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36783E-1
cs_fil2_imon=-2.32143E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.68041E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21906E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40102E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21112E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16512E-1	-7.98154E-1	-9.13169E0	-9.1419E0	4.88758E-3	9.38654E-2	2.73051E1	-3.26714E1	-3.26077E1	2.68569E1					
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16822E-1	-7.97987E-1	-9.13148E0	-9.14185E0	4.69685E-3	9.35316E-2	2.72984E1	-3.26578E1	-3.26058E1	2.69142E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16655E-1	-7.98464E-1	-9.13134E0	-9.14199E0	4.60148E-3	9.32932E-2	2.73191E1	-3.26775E1	-3.26137E1	2.68395E1	1.19872E-7	2.51248E-3	2.51248E-3	6.31299E-3	2.99348E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16727E-1	-7.98321E-1	-9.13143E0	-9.14195E0	4.64916E-3	9.36031E-2	2.73014E1	-3.26204E1	-3.26198E1	2.68462E1	1.20064E-7	2.5165E-3	2.5165E-3	6.31251E-3	2.98696E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16536E-1	-7.98464E-1	-9.13126E0	-9.14192E0	4.57764E-3	9.34601E-2	2.72739E1	-3.26723E1	-3.26194E1	2.69734E1	1.19991E-7	2.52179E-3	2.52179E-3	6.33592E-3	3.00251E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.1656E-1	-7.98535E-1	-9.13107E0	-9.14209E0	4.95911E-3	9.38416E-2	2.73138E1	-3.26237E1	-3.26208E1	2.67005E1	1.20069E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00041E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16178E-1	-7.98678E-1	-9.13136E0	-9.14218E0	4.74453E-3	9.38177E-2	2.73095E1	-3.26641E1	-3.26011E1	2.67664E1	1.19991E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.01609E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.1625E-1	-7.98583E-1	-9.13138E0	-9.14154E0	4.69685E-3	9.36747E-2	2.73183E1	-3.26651E1	-3.26398E1	2.69325E1	1.19991E-7	2.52066E-3	2.52066E-3	6.3074E-3	3.0352E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16226E-1	-7.98416E-1	-9.13136E0	-9.14168E0	4.60148E-3	9.36985E-2	2.72898E1	-3.26174E1	-3.26413E1	2.67704E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.03712E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16202E-1	-7.98535E-1	-9.1316E0	-9.14166E0	4.93526E-3	9.34839E-2	2.73257E1	-3.26809E1	-3.25936E1	2.66226E1	1.20084E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.02813E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16202E-1	-7.98559E-1	-9.13136E0	-9.14176E0	5.03063E-3	9.32455E-2	2.73281E1	-3.27027E1	-3.25776E1	2.69084E1	1.20209E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.01738E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16154E-1	-7.98512E-1	-9.1315E0	-9.14173E0	5.05447E-3	9.34839E-2	2.72739E1	-3.26554E1	-3.26218E1	2.69193E1	1.19953E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.01738E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16202E-1	-7.98583E-1	-9.13157E0	-9.14176E0	4.74453E-3	9.36031E-2	2.72871E1	-3.26663E1	-3.26458E1	2.68917E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16464E-1	-7.98345E-1	-9.13165E0	-9.14178E0	4.74453E-3	9.34601E-2	2.73122E1	-3.26284E1	-3.258E1	2.67397E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16393E-1	-7.98273E-1	-9.13172E0	-9.14176E0	4.88758E-3	9.36985E-2	2.73112E1	-3.27148E1	-3.26585E1	2.68358E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16321E-1	-7.98535E-1	-9.1316E0	-9.14192E0	5.05447E-3	9.38892E-2	2.72913E1	-3.26609E1	-3.26302E1	2.67637E1	1.2054E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9952E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16536E-1	-7.98273E-1	-9.13146E0	-9.14202E0	5.03063E-3	9.36985E-2	2.72829E1	-3.26398E1	-3.26386E1	2.69217E1	1.20244E-7	2.52139E-3	2.52139E-3	6.32978E-3	3.01742E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16441E-1	-7.98059E-1	-9.13153E0	-9.14178E0	5.17368E-3	9.36031E-2	2.73375E1	-3.27121E1	-3.25871E1	2.6771E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16035E-1	-7.98321E-1	-9.13162E0	-9.14185E0	5.24521E-3	9.3627E-2	2.72839E1	-3.26915E1	-3.26413E1	2.66344E1	1.20174E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.1594E-1	-7.98464E-1	-9.13141E0	-9.14197E0	5.26905E-3	9.3317E-2	2.72522E1	-3.26735E1	-3.26158E1	2.66929E1	1.19851E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99175E-1
