[Scan]
initial_time=2016-01-28T20:01:53
final_time=2016-01-28T20:02:12
ip_count=19
run=1026
dataset=6
scan=463
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.0886E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.36966E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=1.9949E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=3.83341E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-7.49111E-11
mult1=-9.4755E-9
mult2=-2.82241E-9
rf_tmon=-4.7828E-3
rf_agc=3.27808E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=1.7076E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64262E0
bslens_imon=2.76978E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19718E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04895E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53673E1
cs_ef1b_imon=3.10485E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0513E1
cs_ea1_imon=1.22908E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39675E0
lens1_imon=2.78748E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.96549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.40357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84371E1
cs_ef1a_imon=2.99642E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.2524E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.29895E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14757E1
os_ea1_imon=2.39001E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27451E0
cs_ionrep_imon=9.50174E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01699E1
cs_anode1_imon=2.04316E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.23854E-8
tplens_vset=1.4E-1
tplens_vmon=1.6898E0
tplens_imon=-4.05069E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26561E1
iondef3_imon=1.50834E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.9555E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26154E0
ionrepsh_imon=9.33892E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.17622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.11284E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50812E0
os_ea2_imon=-8.36877E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7135E1
cs_ef2a_imon=3.18617E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04935E0
os_ef2alow_imon=-2.69969E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97231E-1
os_ef2bup_imon=-5.44514E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=3.38669E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01757E1
cs_anode2_imon=2.10154E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72805E1
iondef1_imon=1.11653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68839E1
iondef4_imon=1.09824E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.28004E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.65562E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-1.08022E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47268E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56278E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=1.84092E-1
window_imon=-1.17058E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39008E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.52767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.73203E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.06851E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.17634E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27858E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.36419E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07121E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63207E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30566E1
cs_fil1_imon=9.25774E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.27698E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63502E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98999E-2
os_fil2_imon=-2.64602E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01082E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.69874E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37517E-1
cs_fil2_imon=-2.57651E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62454E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21922E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.44147E-1
res40_imon=-2.67189E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16441E-1	-7.98464E-1	-9.13112E0	-9.1419E0	5.38826E-3	9.36031E-2	2.72973E1	-3.26621E1	-3.26116E1	2.70328E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01738E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16345E-1	-7.98321E-1	-9.13136E0	-9.14204E0	5.05447E-3	9.34839E-2	2.72867E1	-3.26248E1	-3.26285E1	2.68612E1	1.2026E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16345E-1	-7.98273E-1	-9.13136E0	-9.14218E0	4.74453E-3	9.33409E-2	2.73028E1	-3.26585E1	-3.26237E1	2.6891E1	1.20154E-7	2.51611E-3	2.51611E-3	6.29035E-3	3.01609E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16298E-1	-7.97987E-1	-9.13122E0	-9.14216E0	4.74453E-3	9.35078E-2	2.72855E1	-3.26682E1	-3.2645E1	2.69061E1	1.20226E-7	2.52093E-3	2.52093E-3	6.30221E-3	3.01981E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16131E-1	-7.98345E-1	-9.13162E0	-9.14178E0	4.86374E-3	9.34124E-2	2.72856E1	-3.26496E1	-3.26154E1	2.69252E1	1.20174E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16345E-1	-7.9813E-1	-9.13153E0	-9.14207E0	4.86374E-3	9.34124E-2	2.73496E1	-3.26597E1	-3.26092E1	2.67187E1	1.19757E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16202E-1	-7.9844E-1	-9.13169E0	-9.14204E0	4.88758E-3	9.35078E-2	2.72817E1	-3.26308E1	-3.26008E1	2.69421E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16107E-1	-7.98488E-1	-9.1316E0	-9.14192E0	4.8399E-3	9.36031E-2	2.73135E1	-3.26723E1	-3.26218E1	2.69313E1	1.19749E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.16083E-1	-7.9844E-1	-9.1315E0	-9.14226E0	5.17368E-3	9.37223E-2	2.72745E1	-3.26753E1	-3.2638E1	2.66466E1	1.20191E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.00942E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16107E-1	-7.98321E-1	-9.13148E0	-9.14207E0	4.74453E-3	9.34839E-2	2.73321E1	-3.26837E1	-3.2632E1	2.68749E1	1.19851E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.99175E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16178E-1	-7.98321E-1	-9.13131E0	-9.14192E0	4.86374E-3	9.34601E-2	2.73511E1	-3.2662E1	-3.25723E1	2.68683E1	1.19913E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16035E-1	-7.98392E-1	-9.13162E0	-9.14195E0	4.91142E-3	9.35555E-2	2.73263E1	-3.26596E1	-3.26496E1	2.69721E1	1.19851E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16035E-1	-7.98368E-1	-9.1316E0	-9.14214E0	4.86374E-3	9.33647E-2	2.73129E1	-3.26561E1	-3.262E1	2.70575E1	1.20383E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.16178E-1	-7.98416E-1	-9.13141E0	-9.14214E0	4.93526E-3	9.35316E-2	2.72986E1	-3.26732E1	-3.26508E1	2.69632E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.02253E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16011E-1	-7.9844E-1	-9.13134E0	-9.14197E0	4.88758E-3	9.32932E-2	2.73291E1	-3.26609E1	-3.26422E1	2.67295E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.1594E-1	-7.98225E-1	-9.13141E0	-9.14228E0	4.74453E-3	9.35555E-2	2.73159E1	-3.26963E1	-3.26266E1	2.66436E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.9978E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16131E-1	-7.98488E-1	-9.13143E0	-9.14183E0	5.17368E-3	9.36031E-2	2.72865E1	-3.26741E1	-3.26146E1	2.68262E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16298E-1	-7.98535E-1	-9.13129E0	-9.14168E0	4.86374E-3	9.35316E-2	2.73364E1	-3.26637E1	-3.26457E1	2.67821E1	1.19965E-7	2.51116E-3	2.51116E-3	6.27461E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16321E-1	-7.98583E-1	-9.13136E0	-9.14192E0	4.81606E-3	9.33886E-2	2.72709E1	-3.26993E1	-3.26549E1	2.66887E1	1.1954E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16298E-1	-7.98512E-1	-9.13167E0	-9.14199E0	5.29289E-3	9.36031E-2	2.72805E1	-3.26597E1	-3.26561E1	2.68839E1	1.20174E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
