[Scan]
initial_time=2016-01-28T20:02:19
final_time=2016-01-28T20:02:39
ip_count=19
run=1026
dataset=6
scan=464
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09688E0
qbias_imon=-1.08828E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.36917E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=1.99865E-9
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=3.18849E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-7.91669E-11
mult1=-9.7697E-9
mult2=-2.60803E-9
rf_tmon=-4.38081E-3
rf_agc=3.39711E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=1.67178E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67913E0
bslens_imon=2.41068E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19876E1
lens5a_imon=1.98375E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05092E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.10294E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05414E1
cs_ea1_imon=1.22089E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40162E0
lens1_imon=2.5364E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64352E1
os_ef1alow_imon=2.95008E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03778E1
cs_ea2_imon=1.40867E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84617E1
cs_ef1a_imon=3.02023E-5
olens2_vset=9.7E-1
olens2_vmon=9.69505E-1
olens2_imon=1.25627E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11137E1
os_restr1_imon=4.28279E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1509E1
os_ea1_imon=2.42864E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6375E1
os_ef1bup_imon=3.07577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25886E0
cs_ionrep_imon=9.82832E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93225E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01727E1
cs_anode1_imon=2.04797E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.22864E-8
tplens_vset=1.4E-1
tplens_vmon=1.634E0
tplens_imon=-3.39E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.4987E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2667E1
iondef2_imon=1.55791E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0288E2
lens6_imon=2.9835E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=3.98072E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28589E0
ionrepsh_imon=9.29704E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.17355E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74974E1
cs_ef2b_imon=3.12564E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48462E0
os_ea2_imon=-6.55335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00521E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70974E1
cs_ef2a_imon=3.17754E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08564E0
os_ef2alow_imon=-2.76456E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10263E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10894E1
os_restr2_imon=3.40135E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.28225E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.017E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.07408E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68346E1
iondef4_imon=1.05989E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.32585E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.66933E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09095E0
cs_ionaccel_imon=-1.00493E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47137E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56392E1
einzel_imon=7.59459E-6
window_vset=0.0E0
window_vmon=1.72894E-1
window_imon=-1.15494E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39335E-4
mask2_vset=0.0E0
mask2_vmon=-1.86459E1
mask2_imon=-8.2653E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.4842E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.2513E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.05836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.05664E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.44278E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06762E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63488E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30663E1
cs_fil1_imon=9.25797E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35006E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63868E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83672E-2
os_fil2_imon=-2.65471E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92008E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.55474E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35915E-1
cs_fil2_imon=-2.47225E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25785E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22059E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40078E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.10949E-1
res40_imon=-2.50102E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16107E-1	-7.98512E-1	-9.13131E0	-9.14192E0	5.07832E-3	9.37223E-2	2.73057E1	-3.26874E1	-3.26509E1	2.66588E1	1.19874E-7	2.51621E-3	2.51621E-3	6.31974E-3	3.03976E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16321E-1	-7.98464E-1	-9.13165E0	-9.14178E0	5.14984E-3	9.34839E-2	2.72781E1	-3.26567E1	-3.26488E1	2.69103E1	1.20142E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.00852E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16226E-1	-7.9844E-1	-9.13162E0	-9.14207E0	5.4121E-3	9.32217E-2	2.73114E1	-3.26744E1	-3.26175E1	2.68117E1	1.19846E-7	2.51564E-3	2.51564E-3	6.31808E-3	3.0002E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16226E-1	-7.98774E-1	-9.13138E0	-9.14199E0	4.88758E-3	9.37223E-2	2.73253E1	-3.26138E1	-3.26817E1	2.678E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16226E-1	-7.98535E-1	-9.13148E0	-9.14176E0	4.88758E-3	9.36985E-2	2.72709E1	-3.27041E1	-3.26128E1	2.67992E1	1.19978E-7	2.51804E-3	2.51804E-3	6.29624E-3	3.00144E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16202E-1	-7.98583E-1	-9.13165E0	-9.14154E0	5.00679E-3	9.36747E-2	2.72877E1	-3.26488E1	-3.26164E1	2.68058E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16202E-1	-7.98321E-1	-9.13177E0	-9.14166E0	4.69685E-3	9.36985E-2	2.73016E1	-3.26891E1	-3.26337E1	2.67962E1	1.19913E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16274E-1	-7.98225E-1	-9.13153E0	-9.14168E0	4.86374E-3	9.40084E-2	2.72853E1	-3.2653E1	-3.25972E1	2.68064E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99175E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16226E-1	-7.98297E-1	-9.13162E0	-9.14168E0	4.88758E-3	9.37462E-2	2.73423E1	-3.26602E1	-3.26248E1	2.68128E1	1.20158E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16083E-1	-7.98368E-1	-9.1316E0	-9.14192E0	5.03063E-3	9.36031E-2	2.73231E1	-3.26723E1	-3.26134E1	2.69728E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.16274E-1	-7.98202E-1	-9.13179E0	-9.14202E0	4.72069E-3	9.36985E-2	2.73646E1	-3.27378E1	-3.2599E1	2.664E1	1.19653E-7	2.50789E-3	2.50789E-3	6.33486E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16393E-1	-7.98297E-1	-9.13174E0	-9.14168E0	5.24521E-3	9.35793E-2	2.72883E1	-3.26789E1	-3.26488E1	2.67169E1	1.19861E-7	2.52867E-3	2.52867E-3	6.33486E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16631E-1	-7.98559E-1	-9.13153E0	-9.14185E0	4.93526E-3	9.33409E-2	2.7291E1	-3.2678E1	-3.2604E1	2.69211E1	1.20226E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.1656E-1	-7.98941E-1	-9.13162E0	-9.1419E0	5.00679E-3	9.37939E-2	2.73063E1	-3.26514E1	-3.26207E1	2.67763E1	1.19766E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00144E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16584E-1	-7.98535E-1	-9.13153E0	-9.1419E0	5.17368E-3	9.34601E-2	2.72781E1	-3.26609E1	-3.26176E1	2.68448E1	1.19646E-7	2.51632E-3	2.51632E-3	6.26985E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.16464E-1	-7.98559E-1	-9.13129E0	-9.14218E0	5.00679E-3	9.37223E-2	2.73045E1	-3.2675E1	-3.26644E1	2.68016E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01085E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.16441E-1	-7.98655E-1	-9.13103E0	-9.14218E0	4.72069E-3	9.3627E-2	2.73092E1	-3.26502E1	-3.26207E1	2.67781E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16441E-1	-7.98512E-1	-9.13124E0	-9.14187E0	5.05447E-3	9.36031E-2	2.73297E1	-3.26711E1	-3.2653E1	2.68352E1	1.19902E-7	2.52384E-3	2.52384E-3	6.33436E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.1625E-1	-7.98678E-1	-9.13153E0	-9.14161E0	5.14984E-3	9.37462E-2	2.72945E1	-3.2659E1	-3.2649E1	2.68472E1	1.20122E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09688E0	-8.1656E-1	-7.98488E-1	-9.13136E0	-9.14185E0	5.43594E-3	9.38654E-2	2.73375E1	-3.2667E1	-3.26425E1	2.68346E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
