[Scan]
initial_time=2016-01-28T20:03:13
final_time=2016-01-28T20:03:32
ip_count=19
run=1026
dataset=6
scan=466
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.37085E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.01447E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=3.02815E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-9.8145E-11
mult1=-1.00294E-8
mult2=-2.7765E-9
rf_tmon=-4.86691E-3
rf_agc=3.26967E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.68965E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65147E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19671E1
lens5a_imon=1.99041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53806E1
cs_ef1b_imon=3.1045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04782E1
cs_ea1_imon=1.24571E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40088E0
lens1_imon=2.5468E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64487E1
os_ef1alow_imon=2.94985E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03968E1
cs_ea2_imon=1.40994E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=3.01414E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.25259E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11575E1
os_restr1_imon=4.28956E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15441E1
os_ea1_imon=2.41478E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.07809E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26213E0
cs_ionrep_imon=9.74242E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93314E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01636E1
cs_anode1_imon=2.04073E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.23079E-8
tplens_vset=1.4E-1
tplens_vmon=1.61725E0
tplens_imon=-3.73215E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26422E1
iondef3_imon=1.49914E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26452E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.95304E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26979E0
ionrepsh_imon=9.20797E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74571E1
cs_ef2b_imon=3.13508E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48924E0
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00478E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71495E1
cs_ef2a_imon=3.17366E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03313E0
os_ef2alow_imon=-2.70317E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03602E-1
os_ef2bup_imon=-5.25053E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10921E1
os_restr2_imon=3.39017E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.08625E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67343E1
iondef4_imon=1.07704E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.27761E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.67939E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12609E0
cs_ionaccel_imon=-1.23313E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47216E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56446E1
einzel_imon=7.91373E-6
window_vset=0.0E0
window_vmon=1.81196E-1
window_imon=-1.32349E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86767E1
mask2_imon=-6.8752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.02415E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.29503E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.27545E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33469E0
defgridb_imon=6.07205E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33258E1
os_fil1_imon=9.4213E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07555E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63158E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30648E1
cs_fil1_imon=9.25635E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28104E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63648E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82537E-2
os_fil2_imon=-2.79661E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.82277E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.98741E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21939E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40082E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77741E-1
res40_imon=-2.60238E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=256
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16107E-1	-7.98821E-1	-9.13138E0	-9.14178E0	4.88758E-3	9.32932E-2	2.73186E1	-3.26309E1	-3.26395E1	2.6855E1	1.20004E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.99941E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16202E-1	-7.98368E-1	-9.13148E0	-9.14207E0	4.88758E-3	9.37223E-2	2.73033E1	-3.26639E1	-3.26278E1	2.66983E1	1.20084E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.98026E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16274E-1	-7.98512E-1	-9.13169E0	-9.14183E0	4.64916E-3	9.36747E-2	2.73346E1	-3.26312E1	-3.26973E1	2.67926E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.97963E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16059E-1	-7.98321E-1	-9.13157E0	-9.14168E0	4.673E-3	9.35078E-2	2.73311E1	-3.26785E1	-3.26573E1	2.69067E1	1.20092E-7	2.51603E-3	2.51603E-3	6.33919E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16202E-1	-7.98225E-1	-9.13153E0	-9.14211E0	5.05447E-3	9.35316E-2	2.72745E1	-3.26825E1	-3.26008E1	2.67337E1	1.20017E-7	2.5188E-3	2.5188E-3	6.35692E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.16345E-1	-7.9813E-1	-9.13157E0	-9.14202E0	4.79221E-3	9.377E-2	2.72997E1	-3.26777E1	-3.26404E1	2.68178E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.15988E-1	-7.98416E-1	-9.13129E0	-9.14195E0	4.88758E-3	9.37223E-2	2.73345E1	-3.26651E1	-3.2629E1	2.6774E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.03976E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16202E-1	-7.98559E-1	-9.13138E0	-9.14204E0	4.57764E-3	9.377E-2	2.72973E1	-3.26591E1	-3.25924E1	2.67662E1	1.198E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16441E-1	-7.98535E-1	-9.13155E0	-9.1419E0	5.14984E-3	9.38416E-2	2.72626E1	-3.26708E1	-3.25995E1	2.6818E1	1.19965E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16488E-1	-7.98512E-1	-9.13124E0	-9.14195E0	4.98295E-3	9.36031E-2	2.72606E1	-3.26831E1	-3.26176E1	2.68118E1	1.20122E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.9926E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16488E-1	-7.98321E-1	-9.13167E0	-9.14202E0	4.79221E-3	9.377E-2	2.74001E1	-3.27003E1	-3.26437E1	2.69259E1	1.20055E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.1625E-1	-7.98225E-1	-9.13162E0	-9.14202E0	4.88758E-3	9.34839E-2	2.72787E1	-3.26579E1	-3.26338E1	2.67421E1	1.19913E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00563E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16369E-1	-7.98154E-1	-9.13131E0	-9.14214E0	4.91142E-3	9.34601E-2	2.73027E1	-3.26714E1	-3.26296E1	2.68684E1	1.20122E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16464E-1	-7.98082E-1	-9.13124E0	-9.14218E0	4.79221E-3	9.34839E-2	2.72775E1	-3.26512E1	-3.26206E1	2.70575E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99175E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16298E-1	-7.98202E-1	-9.13119E0	-9.14221E0	4.86374E-3	9.34124E-2	2.72978E1	-3.27148E1	-3.26119E1	2.70623E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16226E-1	-7.98321E-1	-9.13129E0	-9.14195E0	4.8399E-3	9.35555E-2	2.72986E1	-3.26703E1	-3.26166E1	2.68178E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16274E-1	-7.98416E-1	-9.13155E0	-9.14197E0	4.93526E-3	9.35793E-2	2.73424E1	-3.26609E1	-3.2611E1	2.66628E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16751E-1	-7.98583E-1	-9.13129E0	-9.14216E0	4.62532E-3	9.35078E-2	2.72632E1	-3.26738E1	-3.26832E1	2.68599E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.16488E-1	-7.9875E-1	-9.13143E0	-9.14176E0	5.00679E-3	9.33886E-2	2.72921E1	-3.26396E1	-3.25717E1	2.69171E1	1.20004E-7	2.5131E-3	2.5131E-3	6.33977E-3	2.9841E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16321E-1	-7.98488E-1	-9.13115E0	-9.14173E0	5.03063E-3	9.33886E-2	2.73225E1	-3.26452E1	-3.26422E1	2.67343E1	1.19809E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.9926E-1
