[Scan]
initial_time=2016-01-28T20:04:06
final_time=2016-01-28T20:04:25
ip_count=19
run=1026
dataset=6
scan=468
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.37081E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.97768E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=3.90863E-10
ql4_vset=
ql4_vmon=-9.14154E0
ql4_imon=-9.05395E-11
mult1=-9.03831E-9
mult2=-2.78401E-9
rf_tmon=-4.59796E-3
rf_agc=3.27487E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.66525E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.37691E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19895E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53719E1
cs_ef1b_imon=3.10311E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02029E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=1.25067E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38967E0
lens1_imon=2.6636E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64678E1
os_ef1alow_imon=2.96653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.44003E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84371E1
cs_ef1a_imon=3.0138E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.24971E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11176E1
os_restr1_imon=4.27253E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15046E1
os_ea1_imon=2.40806E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.07844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=9.4982E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01757E1
cs_anode1_imon=2.05289E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.23383E-8
tplens_vset=1.4E-1
tplens_vmon=1.63376E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26449E1
iondef3_imon=1.51259E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26685E1
iondef2_imon=1.57346E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.98136E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2869E0
ionrepsh_imon=9.36016E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.16242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49455E0
os_ea2_imon=-6.49289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.19277E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09105E0
os_ef2alow_imon=-2.70664E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94335E-1
os_ef2bup_imon=-5.36869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.39468E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23014E2
cs_ionfoca_imon=6.28442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.10849E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72909E1
iondef1_imon=1.09423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67181E1
iondef4_imon=1.06905E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.23612E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.67492E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13246E0
cs_ionaccel_imon=-9.23837E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56341E1
einzel_imon=7.56968E-6
window_vset=0.0E0
window_vmon=2.11894E-1
window_imon=-1.03505E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.34978E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.24194E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.39933E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4971E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33277E1
os_fil1_imon=9.44679E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07011E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63357E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30549E1
cs_fil1_imon=9.25536E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29204E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64096E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.77344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99924E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.71773E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.62285E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11305E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21929E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.48984E-1
res40_imon=-2.37302E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.1625E-1	-7.98392E-1	-9.1316E0	-9.14218E0	4.55379E-3	9.34362E-2	2.73339E1	-3.26663E1	-3.26428E1	2.67313E1	1.19653E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01609E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16441E-1	-7.98416E-1	-9.13165E0	-9.14185E0	4.91142E-3	9.31978E-2	2.73444E1	-3.26441E1	-3.25917E1	2.69211E1	1.20278E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16178E-1	-7.98249E-1	-9.13143E0	-9.1419E0	4.81606E-3	9.32932E-2	2.73196E1	-3.26353E1	-3.26434E1	2.68702E1	1.19925E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.00942E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16321E-1	-7.98559E-1	-9.13155E0	-9.14187E0	5.07832E-3	9.34601E-2	2.72895E1	-3.267E1	-3.26614E1	2.68771E1	1.20042E-7	2.52131E-3	2.52131E-3	6.33919E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.16488E-1	-7.98535E-1	-9.13148E0	-9.14195E0	4.88758E-3	9.3317E-2	2.73088E1	-3.26621E1	-3.26401E1	2.68313E1	1.20004E-7	2.50989E-3	2.50989E-3	6.33436E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.15964E-1	-7.98154E-1	-9.13126E0	-9.14192E0	4.72069E-3	9.36747E-2	2.73249E1	-3.26573E1	-3.26332E1	2.68929E1	1.20244E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.01209E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.1625E-1	-7.98249E-1	-9.13129E0	-9.14187E0	4.74453E-3	9.33886E-2	2.72438E1	-3.26603E1	-3.26302E1	2.67223E1	1.20174E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.1594E-1	-7.98535E-1	-9.13148E0	-9.14168E0	4.81606E-3	9.34124E-2	2.72852E1	-3.26402E1	-3.26454E1	2.68328E1	1.20311E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.15964E-1	-7.98273E-1	-9.13119E0	-9.14197E0	4.88758E-3	9.36508E-2	2.7335E1	-3.26728E1	-3.26316E1	2.69236E1	1.20226E-7	2.51265E-3	2.51265E-3	6.33341E-3	3.01485E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.15916E-1	-7.98583E-1	-9.13143E0	-9.14185E0	5.17368E-3	9.35793E-2	2.72632E1	-3.26478E1	-3.26585E1	2.66676E1	1.20226E-7	2.51296E-3	2.51296E-3	6.33065E-3	3.00916E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.1594E-1	-7.98154E-1	-9.13122E0	-9.14202E0	5.05447E-3	9.34124E-2	2.7209E1	-3.2584E1	-3.26278E1	2.68388E1	1.19953E-7	2.52707E-3	2.52707E-3	6.28592E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16083E-1	-7.98202E-1	-9.13146E0	-9.14183E0	5.07832E-3	9.34839E-2	2.72949E1	-3.26657E1	-3.265E1	2.68743E1	1.20055E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.97394E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.15964E-1	-7.98488E-1	-9.13148E0	-9.14168E0	4.91142E-3	9.33409E-2	2.73022E1	-3.26683E1	-3.26573E1	2.68574E1	1.20278E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16154E-1	-7.9844E-1	-9.13122E0	-9.14195E0	4.91142E-3	9.34362E-2	2.73271E1	-3.26591E1	-3.2648E1	2.68863E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9943E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16417E-1	-7.98249E-1	-9.13148E0	-9.14173E0	4.93526E-3	9.33886E-2	2.73508E1	-3.26987E1	-3.26086E1	2.66556E1	1.20174E-7	2.5199E-3	2.5199E-3	6.26371E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16321E-1	-7.98202E-1	-9.13138E0	-9.14195E0	4.72069E-3	9.35316E-2	2.72921E1	-3.26944E1	-3.26472E1	2.68647E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.03185E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.16011E-1	-7.98297E-1	-9.13169E0	-9.14159E0	4.95911E-3	9.38177E-2	2.73219E1	-3.26669E1	-3.26266E1	2.66388E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.03712E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16131E-1	-7.98655E-1	-9.1316E0	-9.14156E0	4.60148E-3	9.36031E-2	2.72672E1	-3.265E1	-3.26609E1	2.69235E1	1.20174E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16154E-1	-7.98321E-1	-9.13155E0	-9.14161E0	4.69685E-3	9.34601E-2	2.73351E1	-3.26855E1	-3.2608E1	2.68209E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16298E-1	-7.98559E-1	-9.13148E0	-9.14154E0	4.93526E-3	9.33886E-2	2.72909E1	-3.26685E1	-3.26449E1	2.67181E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9978E-1
