[Scan]
initial_time=2016-01-28T20:04:33
final_time=2016-01-28T20:04:52
ip_count=19
run=1026
dataset=6
scan=469
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.37269E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.96997E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=3.41058E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=-6.62804E-11
mult1=-9.75944E-9
mult2=-2.72522E-9
rf_tmon=-5.74237E-3
rf_agc=3.20585E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.67079E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6547E0
bslens_imon=2.53466E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.98983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05031E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.10524E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02145E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04953E1
cs_ea1_imon=1.24801E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38762E0
lens1_imon=2.58333E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03748E1
cs_ea2_imon=1.39922E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.00144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.24913E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.28373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15265E1
os_ea1_imon=2.40976E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25268E0
cs_ionrep_imon=9.64003E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93152E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.05324E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.23519E-8
tplens_vset=1.4E-1
tplens_vmon=1.60957E0
tplens_imon=-3.5754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50733E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.58068E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=4.05186E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29439E0
ionrepsh_imon=9.29588E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33779E1
lens5b_imon=2.17337E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49369E0
os_ea2_imon=-6.8778E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00532E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07018E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.39247E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.31979E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.10874E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73263E1
iondef1_imon=1.10409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66935E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.3729E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.64953E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.04097E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.89712E-1
window_imon=-1.1635E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.63425E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.66787E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.15802E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3543E0
defgridb_imon=6.08734E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.40882E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06717E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62934E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30518E1
cs_fil1_imon=9.25794E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28481E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62955E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98389E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.05108E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56269E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2176E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.44876E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16107E-1	-7.9844E-1	-9.13131E0	-9.14185E0	4.95911E-3	9.35078E-2	2.73363E1	-3.26723E1	-3.26134E1	2.6995E1	1.20004E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.00453E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.15988E-1	-7.9813E-1	-9.13115E0	-9.14171E0	4.86374E-3	9.3627E-2	2.72941E1	-3.26511E1	-3.2678E1	2.69157E1	1.2026E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16202E-1	-7.98583E-1	-9.13131E0	-9.14185E0	5.126E-3	9.36508E-2	2.73173E1	-3.26654E1	-3.26225E1	2.69837E1	1.19925E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.99613E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16226E-1	-7.98321E-1	-9.13126E0	-9.14207E0	5.29289E-3	9.35793E-2	2.72656E1	-3.26419E1	-3.26154E1	2.67962E1	1.19991E-7	2.51498E-3	2.51498E-3	6.33919E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16226E-1	-7.98273E-1	-9.13112E0	-9.1423E0	4.95911E-3	9.36031E-2	2.73057E1	-3.26669E1	-3.26398E1	2.6661E1	1.20055E-7	2.52169E-3	2.52169E-3	6.34518E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16345E-1	-7.9844E-1	-9.13086E0	-9.14197E0	4.74453E-3	9.35555E-2	2.72856E1	-3.26561E1	-3.26325E1	2.68609E1	1.19757E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00824E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16584E-1	-7.98345E-1	-9.13134E0	-9.14214E0	4.93526E-3	9.34839E-2	2.73111E1	-3.26488E1	-3.26567E1	2.67061E1	1.19985E-7	2.52189E-3	2.52189E-3	6.32916E-3	2.99991E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16369E-1	-7.98392E-1	-9.13119E0	-9.14197E0	4.91142E-3	9.36031E-2	2.72961E1	-3.26585E1	-3.26236E1	2.66658E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.1625E-1	-7.98559E-1	-9.13117E0	-9.14183E0	4.98295E-3	9.35316E-2	2.73086E1	-3.26573E1	-3.26242E1	2.66322E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.98222E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.1625E-1	-7.98559E-1	-9.13157E0	-9.14183E0	4.72069E-3	9.33647E-2	2.7285E1	-3.26561E1	-3.26089E1	2.66495E1	1.20226E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9874E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16274E-1	-7.98631E-1	-9.13134E0	-9.14161E0	4.79221E-3	9.3627E-2	2.73712E1	-3.27466E1	-3.2675E1	2.68487E1	1.20055E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16321E-1	-7.98821E-1	-9.13141E0	-9.14161E0	4.673E-3	9.33886E-2	2.73093E1	-3.26627E1	-3.26717E1	2.68358E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16464E-1	-7.9844E-1	-9.13126E0	-9.14178E0	4.93526E-3	9.34601E-2	2.72684E1	-3.26705E1	-3.26044E1	2.69211E1	1.20031E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.0041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16536E-1	-7.98559E-1	-9.13122E0	-9.14207E0	4.86374E-3	9.39131E-2	2.72907E1	-3.26795E1	-3.2635E1	2.66905E1	1.19646E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00197E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16488E-1	-7.99084E-1	-9.13162E0	-9.14221E0	4.88758E-3	9.36508E-2	2.73273E1	-3.26482E1	-3.26969E1	2.66166E1	1.19653E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16274E-1	-7.9844E-1	-9.13181E0	-9.1419E0	4.57764E-3	9.36508E-2	2.73087E1	-3.2641E1	-3.26134E1	2.66256E1	1.19809E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.00824E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16464E-1	-7.98655E-1	-9.13174E0	-9.14197E0	4.72069E-3	9.39131E-2	2.72797E1	-3.26667E1	-3.26443E1	2.66188E1	1.20383E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.04505E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16464E-1	-7.98512E-1	-9.13146E0	-9.1418E0	4.74453E-3	9.37223E-2	2.73157E1	-3.26095E1	-3.2616E1	2.67313E1	1.19902E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16369E-1	-7.98655E-1	-9.13157E0	-9.14202E0	4.72069E-3	9.36747E-2	2.73297E1	-3.26945E1	-3.25467E1	2.6983E1	1.19595E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16298E-1	-7.98726E-1	-9.13148E0	-9.14214E0	5.00679E-3	9.37939E-2	2.73263E1	-3.26614E1	-3.26248E1	2.66935E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01609E-1
