[Scan]
initial_time=2016-01-28T20:06:19
final_time=2016-01-28T20:06:39
ip_count=19
run=1026
dataset=6
scan=473
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.36805E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.02587E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=3.44098E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-7.68781E-11
mult1=-9.26672E-9
mult2=-2.7565E-9
rf_tmon=-4.60119E-3
rf_agc=3.37324E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.71652E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65352E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19869E1
lens5a_imon=1.97081E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.0514E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=3.11641E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=1.2437E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42663E0
lens1_imon=2.63869E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.41493E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.99892E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.25026E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11099E1
os_restr1_imon=4.28625E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15474E1
os_ea1_imon=2.4272E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63888E1
os_ef1bup_imon=3.10524E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=9.55299E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93557E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=2.02549E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.23602E-8
tplens_vset=1.4E-1
tplens_vmon=1.6162E0
tplens_imon=-4.43544E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26432E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26854E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.98771E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=9.50973E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33513E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.5453E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06057E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.20326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.7961E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.37986E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.29676E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.08675E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72775E1
iondef1_imon=1.07246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68905E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.24259E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.68667E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14696E0
cs_ionaccel_imon=-1.13827E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.51871E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.38897E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.4513E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.66903E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.09441E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45269E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.463E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06831E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62947E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30521E1
cs_fil1_imon=9.28521E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31184E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64078E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0995E-2
os_fil2_imon=-2.85818E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05523E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.90953E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.63806E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21864E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.76421E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.16369E-1	-7.98368E-1	-9.13115E0	-9.14197E0	4.76837E-3	9.36985E-2	2.73081E1	-3.26554E1	-3.26573E1	2.6637E1	1.2033E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.98222E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.16536E-1	-7.98345E-1	-9.13131E0	-9.14187E0	4.55379E-3	9.36508E-2	2.72955E1	-3.26374E1	-3.26056E1	2.6649E1	1.20209E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16441E-1	-7.98345E-1	-9.13131E0	-9.14192E0	4.64916E-3	9.38416E-2	2.73033E1	-3.26779E1	-3.26307E1	2.67896E1	1.201E-7	2.51725E-3	2.51725E-3	6.29603E-3	3.00251E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.16202E-1	-7.98082E-1	-9.13117E0	-9.14173E0	4.95911E-3	9.35555E-2	2.73045E1	-3.26543E1	-3.26236E1	2.67794E1	1.19891E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16369E-1	-7.98273E-1	-9.13174E0	-9.14199E0	4.76837E-3	9.36985E-2	2.72805E1	-3.26735E1	-3.2629E1	2.66827E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.15988E-1	-7.98559E-1	-9.13157E0	-9.14176E0	4.55379E-3	9.37223E-2	2.72823E1	-3.2632E1	-3.26254E1	2.68196E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.16226E-1	-7.98416E-1	-9.13119E0	-9.14176E0	4.76837E-3	9.34601E-2	2.72913E1	-3.26585E1	-3.26236E1	2.69345E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.16536E-1	-7.97987E-1	-9.13112E0	-9.14211E0	4.62532E-3	9.34124E-2	2.73198E1	-3.26844E1	-3.26136E1	2.69313E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16321E-1	-7.98273E-1	-9.13146E0	-9.14199E0	4.31538E-3	9.35555E-2	2.72787E1	-3.26765E1	-3.2632E1	2.67097E1	1.198E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9841E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16274E-1	-7.98273E-1	-9.13134E0	-9.14204E0	4.36306E-3	9.3174E-2	2.73153E1	-3.26723E1	-3.26266E1	2.66929E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16226E-1	-7.98202E-1	-9.13143E0	-9.14204E0	4.76837E-3	9.34839E-2	2.73028E1	-3.27E1	-3.26579E1	2.69119E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16083E-1	-7.98464E-1	-9.1315E0	-9.14176E0	4.50611E-3	9.37939E-2	2.72777E1	-3.26476E1	-3.26266E1	2.69136E1	1.20177E-7	2.51265E-3	2.51265E-3	6.30221E-3	3.02479E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16154E-1	-7.98154E-1	-9.13122E0	-9.14161E0	4.76837E-3	9.36031E-2	2.73234E1	-3.26649E1	-3.26354E1	2.70274E1	1.1984E-7	2.51411E-3	2.51411E-3	6.31321E-3	3.01193E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.1625E-1	-7.98273E-1	-9.1315E0	-9.1419E0	4.57764E-3	9.34601E-2	2.73333E1	-3.26627E1	-3.26314E1	2.70005E1	1.19851E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99686E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16178E-1	-7.98464E-1	-9.13134E0	-9.14173E0	4.673E-3	9.35793E-2	2.72727E1	-3.26449E1	-3.26083E1	2.67986E1	1.20069E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16345E-1	-7.98464E-1	-9.13157E0	-9.14178E0	4.673E-3	9.34839E-2	2.73219E1	-3.26627E1	-3.26158E1	2.68118E1	1.20209E-7	2.52061E-3	2.52061E-3	6.35059E-3	3.0071E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16393E-1	-7.98321E-1	-9.13136E0	-9.14161E0	4.64916E-3	9.36747E-2	2.73187E1	-3.26679E1	-3.26608E1	2.67836E1	1.19697E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16345E-1	-7.98535E-1	-9.13143E0	-9.1414E0	4.45843E-3	9.35316E-2	2.72727E1	-3.26849E1	-3.26561E1	2.68673E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16321E-1	-7.98535E-1	-9.13117E0	-9.14159E0	4.43459E-3	9.35793E-2	2.72987E1	-3.26724E1	-3.26556E1	2.69067E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16441E-1	-7.98655E-1	-9.1311E0	-9.14176E0	4.55379E-3	9.33647E-2	2.72775E1	-3.26854E1	-3.26432E1	2.68905E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00197E-1
