[Scan]
initial_time=2016-01-28T20:06:46
final_time=2016-01-28T20:07:05
ip_count=19
run=1026
dataset=6
scan=474
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08851E-4
ql1_vset=
ql1_vmon=-8.16083E-1
ql1_imon=1.3692E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.0308E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=3.17764E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-6.34432E-11
mult1=-9.70427E-9
mult2=-2.6208E-9
rf_tmon=-4.81885E-3
rf_agc=3.29671E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.68821E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65282E0
bslens_imon=2.66926E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19856E1
lens5a_imon=1.99402E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5321E1
cs_ef1b_imon=3.08586E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05124E1
cs_ea1_imon=1.24532E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4368E0
lens1_imon=2.56414E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64453E1
os_ef1alow_imon=2.99283E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03522E1
cs_ea2_imon=1.40106E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84731E1
cs_ef1a_imon=3.00179E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.25644E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11E1
os_restr1_imon=4.27534E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15734E1
os_ea1_imon=2.42112E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.10221E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26962E0
cs_ionrep_imon=9.93425E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93401E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02379E1
cs_anode1_imon=2.05441E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.23495E-8
tplens_vset=1.4E-1
tplens_vmon=1.64662E0
tplens_imon=-2.78005E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.50268E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.57392E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98521E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.91138E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28324E0
ionrepsh_imon=9.23734E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33464E1
lens5b_imon=2.17739E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74638E1
cs_ef2b_imon=3.10688E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50322E0
os_ea2_imon=-7.3742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00459E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7116E1
cs_ef2a_imon=3.1855E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07986E0
os_ef2alow_imon=-2.48659E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8099E-1
os_ef2bup_imon=-5.24233E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1076E1
os_restr2_imon=3.38245E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.28059E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01582E1
cs_anode2_imon=2.11045E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72889E1
iondef1_imon=1.09115E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69253E1
iondef4_imon=1.07822E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.38437E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.70042E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13403E0
cs_ionaccel_imon=-8.71291E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02121E2
cs_ionfocb_imon=1.47152E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55815E1
einzel_imon=7.46209E-6
window_vset=0.0E0
window_vmon=1.69866E-1
window_imon=-8.67399E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82671E2
mask1_imon=2.39244E-4
mask2_vset=0.0E0
mask2_vmon=-1.86351E1
mask2_imon=-9.41352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92677E3
multa_neg_imon=7.21669E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.31733E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.27509E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35477E0
defgridb_imon=5.91242E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.46416E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06882E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6351E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30616E1
cs_fil1_imon=9.26922E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36009E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6388E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.95454E-2
os_fil2_imon=-2.55497E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1547E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.46576E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33707E-1
cs_fil2_imon=-2.82094E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.57269E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21892E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.15176E-1
res40_imon=-2.26084E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16321E-1	-7.98154E-1	-9.13136E0	-9.14192E0	4.76837E-3	9.36985E-2	2.72929E1	-3.26706E1	-3.26196E1	2.66622E1	1.20019E-7	2.52029E-3	2.52029E-3	6.32518E-3	2.99916E-1
2.0E0	3.8E1	1.0E0	3.16E2	1.6E2	-2.09533E0	-8.16631E-1	-7.98607E-1	-9.1316E0	-9.14125E0	4.95911E-3	9.38892E-2	2.72555E1	-3.27074E1	-3.26529E1	2.67084E1	1.19979E-7	2.51886E-3	2.51886E-3	6.30221E-3	2.99506E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16774E-1	-7.98512E-1	-9.13169E0	-9.14166E0	4.88758E-3	9.38177E-2	2.7252E1	-3.26431E1	-3.26095E1	2.69015E1	1.19937E-7	2.51725E-3	2.51725E-3	6.31879E-3	3.03246E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16202E-1	-7.98631E-1	-9.13179E0	-9.14156E0	5.126E-3	9.36031E-2	2.72859E1	-3.2644E1	-3.26344E1	2.67451E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16345E-1	-7.98345E-1	-9.13212E0	-9.14178E0	4.86374E-3	9.38177E-2	2.73285E1	-3.26963E1	-3.2647E1	2.66364E1	1.20069E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16441E-1	-7.98512E-1	-9.13208E0	-9.14166E0	5.14984E-3	9.35555E-2	2.73063E1	-3.26354E1	-3.2593E1	2.68617E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16369E-1	-7.98464E-1	-9.13177E0	-9.14164E0	5.07832E-3	9.377E-2	2.72769E1	-3.26224E1	-3.26452E1	2.69067E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16417E-1	-7.98368E-1	-9.13172E0	-9.14185E0	4.86374E-3	9.39369E-2	2.73087E1	-3.26675E1	-3.26122E1	2.67637E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16226E-1	-7.9844E-1	-9.13177E0	-9.14156E0	4.86374E-3	9.38654E-2	2.73334E1	-3.26832E1	-3.26278E1	2.6631E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.1656E-1	-7.98297E-1	-9.13157E0	-9.14147E0	4.79221E-3	9.36985E-2	2.73039E1	-3.26719E1	-3.26634E1	2.67818E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99686E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16584E-1	-7.98202E-1	-9.1316E0	-9.14171E0	4.98295E-3	9.37462E-2	2.73016E1	-3.27056E1	-3.2629E1	2.67283E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16298E-1	-7.98178E-1	-9.1316E0	-9.14171E0	4.91142E-3	9.37223E-2	2.73213E1	-3.26921E1	-3.26224E1	2.66809E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.98481E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16369E-1	-7.98464E-1	-9.13126E0	-9.14166E0	4.8399E-3	9.37462E-2	2.73541E1	-3.26832E1	-3.26526E1	2.68424E1	1.20158E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.98156E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16488E-1	-7.98368E-1	-9.13117E0	-9.14173E0	5.00679E-3	9.408E-2	2.73219E1	-3.26813E1	-3.26134E1	2.69181E1	1.19757E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01347E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16441E-1	-7.98416E-1	-9.13138E0	-9.1418E0	5.17368E-3	9.35793E-2	2.72739E1	-3.26404E1	-3.2635E1	2.67523E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16131E-1	-7.98345E-1	-9.13138E0	-9.14178E0	4.93526E-3	9.34839E-2	2.72754E1	-3.26629E1	-3.26513E1	2.67941E1	1.20122E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01609E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16202E-1	-7.98321E-1	-9.13143E0	-9.14183E0	5.03063E-3	9.37223E-2	2.73433E1	-3.26381E1	-3.26515E1	2.68536E1	1.20099E-7	2.51423E-3	2.51423E-3	6.31744E-3	3.02449E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16202E-1	-7.98416E-1	-9.13134E0	-9.14168E0	5.05447E-3	9.36508E-2	2.72995E1	-3.2679E1	-3.26404E1	2.69373E1	1.1984E-7	2.52106E-3	2.52106E-3	6.29581E-3	3.02581E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16202E-1	-7.98678E-1	-9.13124E0	-9.14173E0	4.93526E-3	9.3627E-2	2.7308E1	-3.26785E1	-3.26065E1	2.67079E1	1.19991E-7	2.51952E-3	2.51952E-3	6.3131E-3	3.03246E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16083E-1	-7.98702E-1	-9.13134E0	-9.14176E0	5.05447E-3	9.36747E-2	2.72889E1	-3.26765E1	-3.26404E1	2.69253E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01995E-1
